1.
J Microsc
; 259(2): 114-120, 2015 Aug.
Article
in English
| MEDLINE
| ID: mdl-25627873
ABSTRACT
Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.