Micromachined resonant temperature sensors: theoretical and experimental results.

Describes the study of quartz temperature sensors based on new bulk acoustic wave microresonators operating in thickness modes. First, we compare the thermal sensitivity and the electromechanical coupling coefficients of singly or doubly rotated cuts. These investigations allow us to select some cuts with both a good thermal sensitivity and piezoelectric characteristics. In the second part, emphasis is placed on the micromachining of resonators suspended by four bridges. These two theoretical considerations lead to the choice of three cuts. Experimental measurements are then presented. The temperature-frequency characteristics of the resonators are measured over the range 20 to 100 degrees C. Motional resistances and Q factors are determined at room temperature.

Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes.

Simple microstructures such as mesa and membrane are micromachined on singly and doubly rotated quartz plates. A stereographic analysis of 3-D etching shapes is used to recognize rhombohedral faces limiting micromachined structures. An iterative procedure is used to adjust the database in which first we generate extrema in the dissolution slowness for these faces, and second, we compare step-by-step theoretical 3-D etching shapes with experimental structures. Theoretical shapes for microstructures are found to be in satisfactory agreement with experiments.