ABSTRACT
To fulfill the SIA roadmap requirements for EUV resists, the development of entirely new polymer platforms is necessary. In order to address issues like Line Edge Roughness (LER) and photospeed, we have developed a novel chemically amplified photoresist containing a photoacid generator (PAG) in the main chain of the polymer. The incorporation of a cationic PAG unit, phenyl methacrylate dimethylsulfonium nonaflate (PAG), in the resist backbone showed increased sensitivity, when compared with analogous blend PAG resist samples. In addition, the overall lithographic performance improved by using the counter anion (nonaflate) in the PAG units. The newly synthesized polymer bound PAG resist, poly (4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-PAG) showed sub-50 nm features using EUV Lithography.
Subject(s)
Methacrylates/chemistry , Nanotechnology/methods , Polymers/chemistry , Acrylates/chemistry , Anions , Light , Materials Testing , Microscopy, Atomic Force , Microscopy, Electron, Scanning , Models, Chemical , Photochemistry , Polymethacrylic Acids/chemistry , Printing , Sulfonium Compounds/chemistry , Surface Properties , Ultraviolet RaysABSTRACT
A novel template guided enzymatic approach has been developed to synthesize optically active conducting polyaniline (PANI) nanocomposites in the presence of H2O2 as an oxidant, using (+) and (-) 10-camphorsulfonic acid (CSA) as a dopant and chiral inductor. The formation of chiral polyaniline in the nanocomposites was confirmed by circular dichroism (CD). Interestingly, the CD spectra of nanocomposites formed either with (+) or with (-) CSA show the enzyme itself plays a critical role in controlling the stereospecificity of the polyaniline (PANI) in the nanocomposite. The enzyme used for the polymerization of aniline in the nanocomposite was horseradish peroxidase (HRP). It was shown that this enzyme prefers a specific helical conformation, regardless of whether induced chirality in the complex CSA-aniline is from (+) or (-) CSA. UV-vis spectra show that the polyaniline is in the conducting form, and transmission electron micrographs (TEM) show that the nanocomposites are dispersed nicely with particle size dimensions in the range of 20-50 nm. Electron diffraction patterns of these chiral polymer nanocomposites suggest that these nanocomposites are in both crystalline and amorphous states.
