ABSTRACT
Thermal spraying of metal materials is one of the key applications of this technology in industry for over a hundred years. The variety of metal-based feedstocks (powders and wires) used for thermal spray is incredibly large and utilization covers abrasion and corrosion protection, as well as tribological and electrical applications. Spraying metals using suspension- or precursor-based thermal spray methods is a relatively new and unusual approach. This publication deals with three metal types, a NiCr 80/20, copper (Cu), and silver (Ag), sprayed as fine-grained powders dispersed in aqueous solvent. Suspensions were sprayed by means of high-velocity suspension spraying (HVSFS) employing a modified TopGun system. The aim was to prepare thin and dense metal coatings (10-70 µm) and to evaluate the process limits regarding the oxygen content of the coatings. In case of Cu and Ag, possible applications demand high purity with low oxidation of the coating to achieve for instance a high electrical conductivity or catalytic activity. For NiCr however, it was found that coatings with a fine dispersion of oxides can be usable for applications where a tunable resistivity is in demand. The paper describes the suspension preparation and presents results of spray experiments performed on metal substrates. Results are evaluated with respect to the phase composition and the achieved coating morphology. It turns out that the oxidation content and spray efficiency is strongly controlled by the oxygen fuel ratio and spray distance.
ABSTRACT
Intracortical microprobes allow the precise monitoring of electrical and chemical signaling and are widely used in neuroscience. Microelectromechanical system (MEMS) technologies have greatly enhanced the integration of multifunctional probes by facilitating the combination of multiple recording electrodes and drug delivery channels in a single probe. Depending on the neuroscientific application, various assembly strategies are required in addition to the microprobe fabrication itself. This paper summarizes recent advances in the fabrication and assembly of micromachined silicon probes for drug delivery achieved within the EU-funded research project NeuroProbes. The described fabrication process combines a two-wafer silicon bonding process with deep reactive ion etching, wafer grinding, and thin film patterning and offers a maximum in design flexibility. By applying this process, three general comb-like microprobe designs featuring up to four 8-mm-long shafts, cross sections from 150×200 to 250×250 µm², and different electrode and fluidic channel configurations are realized. Furthermore, we discuss the development and application of different probe assemblies for acute, semichronic, and chronic applications, including comb and array assemblies, floating microprobe arrays, as well as the complete drug delivery system NeuroMedicator for small animal research.
