ABSTRACT
The experimental procedure for obtaining the point spread function (PSF) of a focusing beam generated using an X-ray multilayer zone plate (MZP) with a narrow annular aperture has been developed. It was possible to reconstruct the PSF by applying the tomographic process to the measured dataset consisting of line spread functions (LSFs) in every radial direction on the focal plane. The LSFs were measured by a knife-edge scanning method of detecting scattered intensity. In the experimental work, quasi-monochromatic undulator radiation with a first harmonic energy of 20â keV was directly focused without a monochromator by the MZP, and the PSF was measured using this procedure. As a result, a near diffraction-limited focused beam size of 46â nm full width at half-maximum was obtained.
ABSTRACT
A new method is proposed for nanoscale hard x-ray measurements. This method uses a reflection on a heavy-metal wire that functions as a single slit with a nanoscale aperture for a parallel x-ray beam. This "nanoslit" can be used to perform high-spatial-resolution measurements of the intensity distribution of a wavefront that diverges from an aperture. In experiments, Fresnel fringes generated by a rectangular aperture were measured using a 300-microm-diameter platinum wire as the nanoslit. In these experiments, the finest fringes with a period of 26 nm could be successfully resolved.
ABSTRACT
An X-ray microbeam with a small angular divergence and a narrow energy bandwidth has been produced at BL24XU at SPring-8. The beam size was measured to be 3.1 microm and 1.6 microm in the horizontal and vertical directions, respectively, and the horizontal angular divergence was 4.0 arcsec. Using this microbeam the crystallinity estimation of thin layers on silicon-on-insulator (SOI) wafers is demonstrated. In reciprocal-space maps the lattice tilt variations were 80 arcsec and more than 220 arcsec in the SOI layers on bonded and SIMOX wafers, respectively. In equi-tilt maps, the typical equi-tilt areas of the SOI layers were 7 microm and 4 microm in size on the bonded and SIMOX wafers, respectively.
Subject(s)
Silicon/chemistry , Synchrotrons , X-Ray Diffraction/instrumentation , X-Ray Diffraction/methods , Biophysical Phenomena , Biophysics , Crystallization , Evaluation Studies as Topic , Scattering, Radiation , X-RaysABSTRACT
An imaging transmission hard X-ray microscope has been constructed at beamline BL24XU of SPring-8. It makes use of a phase zone plate made of tantalum with a diameter of 1 mm and an outer-most zone width of 50 nm, aiming at a wide field of view and a high spatial resolution. The performance test was carried out at a photon energy of 10 keV. A field of view as wide as approximately 200 microm in diameter was achieved. The spatial resolution was measured to be 220 nm by analyzing a knife-edge image. Further, a line-and-space pattern as fine as 100 nm could be imaged. By placing a phase plate made of gold in the back focal plane of the zone plate, phase-contrast microscopy using Zernike's method was also carried out. The feasibility of phase-contrast microscopy for observing transparent samples was successfully demonstrated by imaging small polystyrene particles.
