ABSTRACT
The development of a dual-mode thickness-shear quartz pressure sensor to meet the demanding performance requirements of oil-field applications is discussed. The objective was to develop a sensor with an operating pressure range of 0-103.42 MPa (0.15 000 lb/in(2)), a temperature range of -10 to +175 degrees C, a pressure calibration accuracy of 6894.8 Pa (1 lb/in(2)), and resolution of 68.95 Pa (0.01 lb/in(2)) with 1-s counter gate time. Doubly rotated cuts with piezoelectric coupling to both the C-modes of vibration were investigated. A theoretical study and general design considerations in the development of such sensors are described. Experimental results were obtained for two sensor designs: one uses a cylindrical design with the SBTC-cut, and the other, called SPA, is a special resonator design vibrating around 5 MHz without any activity dips. Pressure sensitivity of approximately 145 Hz/MPa (1 Hz/lb/in(2)) at 175 degrees C is obtained. Laboratory evaluation of the static and dynamic performances is discussed for the prototypes based on the SPA design.
ABSTRACT
The authors have demonstrated experimental verification of the stress compensation feature for the fast thickness shear mode of vibration of stress-compensated for B-mode and temperature-compensated for C-mode (SBTC)-cut quartz resonators. For the resonator design used in the cylindrical probe structure, the motional resistance for the B-mode of vibration was approximately 12% of that of the C-mode. The relatively large motional resistance for the C-mode of vibration of the SBTC-cut was found to be largely due to the lower piezoelectric coupling for the thickness excitation of this mode. In addition the proximity of the third overtone of the A-mode to the fifth overtone of the C-mode also contributed to the increase in the motional resistance. The authors have obtained experimental data on the temperature dependence of the planar stress coefficient and pressure dependence of the frequency-temperature characteristic for both the thickness-shear modes of the SBTC-cut. It is noted that such a doubly rotated cut can have applications in the design of either stable frequency sources or sensors for pressure and temperature measurements.
