ABSTRACT
Dielectric waveguides are capable of confining and guiding terahertz waves along sub-wavelength sized structures. A small feature size allows for a denser integration of different photonic components such as modulators, beam-splitters, wavelength (de)multiplexers and more. The integration of components on a small scale requires bending of the waveguides. In this paper we demonstrate a very short silicon 90°-bend, based on total internal reflection on an elliptically curved outer facet and a rounding of the inner corner joining two waveguides, with an average loss of 0.14 dB per bend in the 600-750 GHz range.
ABSTRACT
A design and multiphysical model is presented for an on-chip gas sensor that transduces terahertz gas absorption through sound generation into a mechanical motion that can be read out externally. The signal is triply enhanced by designing a structure that functions simultaneously as an optical, an acoustical and a mechanical resonator. The structure is made in high-resistivity silicon and can be fabricated using CMOS and MEMS fabrication technologies. The sensor is a purely passive element, so an external THz source and read-out are required. The chip has a footprint of 3â mm2. A detection limit of 234 ppb of methanol for a source power of 1 mW and an integration time of 1â ms is predicted.