Nanoscale chemical templating of Si nanowires seeded with Al.

We describe a new approach for achieving controlled spatial placement of VLS-grown nanowires that uses an oxygen-reactive seed material and an oxygen-containing mask. Oxygen-reactive seed materials are of great interest for electronic applications, yet they cannot be patterned using the approaches developed for noble metal seed materials such as Au. This new process, nanoscale chemical templating, takes advantage of the reactivity of the blanket seed layer by depositing it over a patterned oxide that reacts with the seed material to prevent nanowire growth in undesired locations. Here we demonstrate this technique using Al as the seed material and SiO2 as the mask, and we propose that this methodology will be applicable to other reactive metals that are of interest for nanowire growth. The method has other advantages over conventional patterning approaches for certain applications including reducing patterning steps, flexibility in lithographic techniques, and high growth yields. We demonstrate its application with standard and microsphere lithography. We show a high growth yield and fidelity, with no NWs between openings and a majority of openings occupied by a single vertical nanowire, and discuss the dependence of yield on parameters.

Contactless measurement of surface dominated recombination in gold- and aluminum-catalyzed silicon vapor-liquid-solid wires.

Carrier lifetimes of Si micro/nanowires grown by the vapor-liquid-solid method are measured using an extension of the classic contactless photoconductivity decay method. The samples measured consist of a thin aggregated film of oxide passivated wires on a fused silica carrier. Au catalyzed wires in the 392-730 nm diameter range are studied. Recombination in these wires is controlled by the surface or near surface effects, not bulk Au impurities. The lifetimes of Au- and Al-catalyzed wires of comparable diameter are measured. The Al wires are found to have slightly longer lifetimes than those grown with Au at a comparable diameter. Across all samples, the lifetimes measured range was from 0.2 to 1.0 ns. The surface controlled nature of the recombination measured implies larger diameter wires will offer better performance in devices that rely on minority carrier transport.

Growth system, structure, and doping of aluminum-seeded epitaxial silicon nanowires.

We have examined the formation of silicon nanowires grown by self-assembly from Si substrates with thin aluminum films. Postgrowth and in situ investigations using various Al deposition and annealing conditions suggest that nanowire growth takes place with a supercooled liquid droplet (i.e., the vapor-liquid-solid system), even though the growth temperatures are below the bulk Al/Si eutectic temperature. Wire morphology as a function of processing conditions is also described. It is shown that when Al environmental exposure is prevented before wire growth a wide process window for wire formation can be achieved. Under optimum growth conditions, it is possible to produce excellent crystal quality nanowires with rapid growth rates, high surface densities, low diameter dispersion, and controlled tapering. Photoelectron spectroscopy measurements indicate that the use of Al leads to active doping levels that depend on the growth temperature in as-grown nanowires and increase when annealed. We suggest that these structural and electronic properties will be relevant to photovoltaic and other applications, where the more common use of Au is believed to be detrimental to performance.

Transients in the formation of nanowire heterostructures.

We present results on the effect of seed particle reconfiguration on the growth of short InAs and InP nanowire segments. The reconfiguration originates in two different steady state alloy compositions of the Au/In seed particle during growth of InAs and InP. From compositional analysis of the seed particle, the In content in the seed particle is determined to be 34 and 44% during InAs and InP growth, respectively. When switching between growing InAs and InP, transient effects dominate during the time period of seed particle reconfiguration. We developed a model that quantitatively explains the effect and with the added understanding we are now able to grow short period (<10 nm) nanowire superlattices.

Epitaxial integration of nanowires in microsystems by local micrometer-scale vapor-phase epitaxy.

Free-standing epitaxially grown nanowires provide a controlled growth system and an optimal interface to the underlying substrate for advanced optical, electrical, and mechanical nanowire device connections. Nanowires can be grown by vapor-phase epitaxy (VPE) methods such as chemical vapor deposition (CVD) or metal organic VPE (MOVPE). However, VPE of semiconducting nanowires is not compatible with several microfabrication processes due to the high synthesis temperatures and issues such as cross-contamination interfering with the intended microsystem or the VPE process. By selectively heating a small microfabricated heater, growth of nanowires can be achieved locally without heating the entire microsystem, thereby reducing the compatibility problems. The first demonstration of epitaxial growth of silicon nanowires by this method is presented and shows that the microsystem can be used for rapid optimization of VPE conditions. The important issue of the cross-contamination of other parts of the microsystem caused by the local growth of nanowires is also investigated by growth of GaN near previously grown silicon nanowires. The design of the cantilever heaters makes it possible to study the grown nanowires with a transmission electron microscope without sample preparation.

Structural properties of <111>B -oriented III-V nanowires.

Controlled growth of nanowires is an important, emerging research field with many applications in, for example, electronics, photonics, and life sciences. Nanowires of zinc blende crystal structure, grown in the <111>B direction, which is the favoured direction of growth, usually have a large number of twin-plane defects. Such defects limit the performance of optoelectronic nanowire-based devices. To investigate this defect formation, we examine GaP nanowires grown by metal-organic vapour-phase epitaxy. We show that the nanowire segments between the twin planes are of octahedral shape and are terminated by {111} facets, resulting in a microfaceting of the nanowires. We discuss these findings in a nucleation context, where we present an idea on how the twin planes form. This investigation contributes to the understanding of defect formation in nanowires. One future prospect of such knowledge is to determine strategies on how to control the crystallinity of nanowires.

Automated, controlled deposition of nanoparticles on polyelectrolyte-coated silicon from chemomechanically patterned droplet arrays.

This paper describes three advances in lab on a chip technology. First, it is shown that chemomechanical surface patterning can be performed using a commercially available liquid handler that has undergone only minor modifications. These capabilities are demonstrated by making and then characterizing smaller hydrophobic corrals, made with a diamond tip, than have previously been reported. Hydrophobic corrals are small enclosures on a surface that are ringed by hydrophobic lines. They hold droplets of high surface tension solutions. They allow a surface to be subdivided into individually addressable elements, thus providing a platform for conducting many simultaneous surface experiments with small (down to ca. 1 microL) liquid volumes. An important consequence of this work is that it makes chemomechanical surface patterning, which is a valuable and straightforward method for surface modification, much more accessible to the technical community. Second, it is shown that an entire array of hydrophobic corrals can be simultaneously coated with polyelectrolyte multilayers, but that the hydrophobic corrals still retain the ability to hold liquids after this deposition. The robotic arm of the liquid handler is again employed to manufacture this ultrathin film. Finally, as a demonstration of the capability of this technology to create complex patterned arrays on surfaces from solution for biological or nanostructured materials applications, and again employing the liquid handler, polyelectrolyte-coated hydrophobic corrals are individually addressed and loaded with a solution containing gold nanoparticles for independently specified times. The density and morphology of deposited nanoparticle monolayers were studied by scanning electron microscopy. The deposition of gold nanoparticles onto a chip occurred at a constant rate (0.5% min(-1)) over the range of times studied.