ABSTRACT
Coherence scanning interferometry is established as a powerful noncontact, three-dimensional, metrology technique used to determine accurate surface roughness and topography measurements with subnanometer precision. The helical complex field (HCF) function is a topographically defined helix modulated by the electrical field reflectance, originally developed for the measurement of thin films. An approach to extend the capability of the HCF function to determine the spectral refractive index of a substrate or absorbing film has recently been proposed. In this paper, we confirm this new capability, demonstrating it on surfaces of silicon, gold, and a gold/palladium alloy using silica and zirconia oxide thin films. These refractive index dispersion measurements show good agreement with those obtained by spectroscopic ellipsometry.
ABSTRACT
Improved methods of processing in-line holograms are presented for both phase and absorption modes, and the physical characteristics of the subsequent reconstructed images are compared. This comparison leads to the conclusion that the phase hologram may have advantages which have been hitherto unrecognized.
