Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers.

Ultrasonic fluid bubble detection is important in industrial controls, aerospace systems and clinical medicine because it can prevent fatal mechanical failures and threats to life. However, current ultrasonic technologies for bubble detection are based on conventional bulk PZT-based transducers, which suffer from large size, high power consumption and poor integration with ICs and thus are unable to implement real-time and long-term monitoring in tight physical spaces, such as in extracorporeal membrane oxygenation (ECMO) systems and dialysis machines or hydraulic systems in aircraft. This work highlights the prospect of capacitive micromachined ultrasonic transducers (CMUTs) in the aforementioned application situations based on the mechanism of received voltage variation caused by bubble-induced acoustic energy attenuation. The corresponding theories are established and well validated using finite element simulations. The fluid bubbles inside a pipe with a diameter as small as 8 mm are successfully measured using our fabricated CMUT chips with a resonant frequency of 1.1 MHz. The received voltage variation increases significantly with increasing bubble radii in the range of 0.5-2.5 mm. Further studies show that other factors, such as bubble positions, flow velocities, fluid medium types, pipe thicknesses and diameters, have negligible effects on fluid bubble measurement, demonstrating the feasibility and robustness of the CMUT-based ultrasonic bubble detection technique.

Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams.

With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving pure axial deformation of the piezoresistive beam can greatly improve performance, but it requires the piezoresistive beam to be located in a specific position, which inevitably makes the design more complex and limits the performance improvement. Here, a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed, fabricated, and tested. By controlling synchronous displacements at both piezoresistive beam ends, the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious calculations. The measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity improvement. The pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method (FEM). The triaxial accelerometer was fabricated and tested. Results showing extremely high sensitivities (x axis: 2.43 mV/g/5 V; y axis: 2.44 mv/g/5 V; z axis: 2.41 mV/g/5 V (without amplification by signal conditioning circuit)) and high natural frequencies (x/y axes: 11.4 kHz; z-axis: 13.2 kHz) were obtained. The approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers.

All electrospun fabrics based piezoelectric tactile sensor.

Tactile sensors have been widely used in the areas of health monitoring and intelligent human-machine interface. Flexible tactile sensors based on nanofiber mats made by electrospinning can meet the requirements of comfortability and breathability for wearing the body very well. Here, we developed a flexible and self-powered tactile sensor that was sandwich assembled by electrospun organic electrodes and a piezoelectric layer. The metal-free organic electrodes of thermal plastic polyurethane (PU) nanofibers decorated with multi-walled carbon nanotubes were fabricated by electrospinning followed by ultrasonication treatment. The electrospun polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) mat was utilized as the piezoelectric layer, and it was found that the piezoelectric performance of PVDF-TrFE nanofiber mat added with barium titanate (BaTiO3) nanoparticles was enhanced about 187% than that of the pure PVDF-TrFE nanofiber mat. For practical application, the as-prepared piezoelectric tactile sensor exhibited an approximative linear relationship between the external force and the electrical output. Then the array of fabricated sensors was attached to the fingertips of a glove to grab a cup of water for tactile sensing, and the mass of water can be directly estimated according to the outputs of the sensor array. Attributed to the integrated merits of good flexibility, enhanced piezoelectric performance, light weight, and efficient gas permeability, the developed tactile sensor could be widely used as wearable devices for robot execution end or prosthesis for tactile feedback.

Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids.

A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters. However, the liquid operating environment poses a challenge to maintaining a fine sensing performance, particularly through electrical characterization. This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes. Multiple modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and self-sensing capabilities. The focus is on higher flexural resonances, which nonconventionally feature two-dimensional vibration modes. Modal analyses are conducted for the developed cantilever under flexural vibrations at different orders. Modeling explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the cantilever. This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results. Furthermore, the experiments on cantilever resonators are performed in various test liquids, demonstrating that higher-order flexural modes allow for the decoupled measurements of density and viscosity. The measurement differences achieve 0.39% in density and 3.50% in viscosity, and the frequency instability is below 0.05‰. On the basis of these results, design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing.

Strain distribution characteristics of sensing fiber and influence on sensitivity of a fiber-optic disk accelerometer.

In a fiber-optic disk accelerometer, the strain distribution of sensing fiber is crucial for the improvement of sensitivity. The distribution characteristics of axial and radial strain in the sensing fiber are analyzed by the finite-element method, and the influence of strain distribution on the sensitivity of accelerometer is studied. Sensors with different outer radii of sensing fiber coils are designed and manufactured, and their performance is tested. The resonant frequencies are greater than 200 Hz, and the sensitivity increases as the outer radius of the sensing fiber coil increases. The dynamic range of the sensor with maximum sensitivity is 145.8 dB@100 Hz, and the transverse cross talk is 32.5 dB. Among the sensing fiber strain calculation methods we tested to predict the value of sensitivity, using the strain of sensing fiber directly obtained by the finite-element analysis method shows the smallest error with experimental results (within 7%). It is concluded that in the optical fiber strain disk, the absolute values of axial strain and radial strain of sensing fiber decrease with the increase of disk radius, while the signs of axial strain and radial strain of the ipsilateral sensing fiber are opposite and remain unchanged. The sensitivity can be further improved by optimizing the inner and outer radius of the sensing fiber coils, which is very important for the research and design of high-sensitivity fiber-optic accelerometers.

All-fiber phase modulator and switch based on local surface plasmon resonance effect of the gold nanoparticles embedded in gel membrane.

All-fiber modulators and switches have drawn great interest in the photonics domain, and they are applied in viable photonic and optoelectronic devices. In this work, with the assistance of an agarose membrane, aspherical gold nanoparticles are embedded on the surface of the microfiber treated with the piranha solution. An all-fiber Mach-Zehnder interferometer was used to realize a low-cost, low-loss, and conveniently prepared all-fiber phase modulator. By taking advantage of the local surface plasmon resonance effect of gold nanoparticles embedded in the agarose membrane, under the excitation of near-infrared region light, the gold nanoparticles were excited to change the effective refractive index of one arm of the Mach-Zehnder interferometer. A maximum phase shift of ∼6π at 1550 nm was obtained from the device. In addition, an all-optical switch was achieved with a rising edge time of 47 ms and falling edge time of 14 ms. The proposed all-fiber modulator and switch based on the local surface plasmon resonance effect of gold nanoparticles embedded in agarose membrane will provide great potential in all-optical fiber systems.

Generation and scanning of Airy beams array by combining multiphase patterns.

The method of superimposing multiple phase patterns to generate and deflect multi Airy beams is proposed in this paper. A Dammann grating and an optimized splitting grating are superimposed, respectively, with an Airy cubic phase pattern to generate an array of 4×4 equal-space Airy beams. By adding a deflection grating to the superimposed phase patterns, the transverse self-accelerated Airy beams array can be deflected arbitrarily in two-dimensional plane. The impacts of superimposed phase patterns on the transverse acceleration and size of main lobe of Airy beams in array are discussed in this paper. Meanwhile, the accuracy of the steering method and the impact of the phase modulation depth on the size of the Airy beams are introduced.

Arbitrary scanning of the Airy beams using additional phase grating with cubic phase mask.

To controllably deflect the Airy beam in a wide range dynamic, the method of combining the classical Airy cubic phase with a diffraction blazed grating phase was adopted in this paper. By dynamically adjusting the grating parameters, the transverse self-accelerating Airy beam allows arbitrary deflection, and the deflected position can be controlled precisely. The mathematical model of the Airy beam optical field distributions generated by the combined phase patterns were proposed to explain the feasibility. Its correctness was ultimately demonstrated by the experimental results. It is significant to use this method for the Airy beam deflection control in high-precision closed-loop aiming systems.