Helium Ion-Assisted Wet Etching of Silicon Carbide with Extremely Low Roughness for High-Quality Nanofabrication.

Silicon carbide (SiC) is a promising material for a wide range of applications, including mechanical nano-resonators, quantum photonics, and non-linear photonics. However, its chemical inertness poses challenges for etching in terms of resolution and smoothness. Herein, a novel approach known as helium ion-bombardment-enhanced etching (HIBEE) is presented to achieve high-quality SiC etching. The HIBEE technique utilizes a focused helium ion beam with a typical ion energy of 30 keV to disrupt the crystal lattices of SiC, thus enabling wet etching using hydrofluoric acids and hydrogen peroxide. The etching mechanism is verified via simulations and characterization. The use of a sub-nanometer beam spot of focused helium ions ensures fabrication resolution, and the resulting etched surface exhibits an extremely low roughness of ≈0.9 nm. One of the advantages of the HIBEE technique is that it does not require resist spin-coating and development processes, thus enabling the production of nanostructures on irregular SiC surfaces, such as suspended structures and sidewalls. Additionally, the unique interaction volume of helium ions with substrates enables the one-step fabrication of suspended nanobeam structures directly from bulk substrates. The HIBEE technique is expected to facilitate and accelerate the prototyping of high-quality SiC devices.

Enhancement of silicon sub-bandgap photodetection by helium-ion implantation.

Silicon sub-bandgap photodetectors can detect light at the infrared telecommunication wavelengths but with relatively weak photo-response. In this work, we demonstrate the enhancement of sub-bandgap photodetection in silicon by helium-ion implantation, without affecting the transparency that is an important beneficial feature of this type of photodetectors. With an implantation dose of 1 × 1013 ions/cm2, the minimal detectable optical power can be improved from - 33.2 to - 63.1 dBm, or, by 29.9 dB, at the wavelength of 1550 nm, and the photo-response at the same optical power (- 10 dBm) can be enhanced by approximately 18.8 dB. Our work provides a method for strategically modifying the intrinsic trade-off between transparency and strong photo-responses of this type of photodetectors.

Versatile Approach of Silicon Nanofabrication without Resists: Helium Ion-Bombardment Enhanced Etching.

Herein, we report a helium ion-bombardment enhanced etching method for silicon nanofabrication without the use of resists; furthermore, we demonstrate its unique advantages for straightforward fabrication on irregular surfaces and prototyping nano-electro-mechanical system devices, such as self-enclosed Si nanofluidic channels and mechanical nano-resonators. This method employs focused helium ions to selectively irradiate single-crystal Si to disrupt the crystal lattice and transform it into an amorphous phase that can be etched at a rate 200 times higher than that of the non-irradiated Si. Due to the unique raindrop shape of the interaction volumes between helium ions and Si, buried Si nanofluidic channels can be constructed using only one dosing step, followed by one step of conventional chemical etching. Moreover, suspended Si nanobeams can be fabricated without an additional undercut step for release owing to the unique raindrop shape. In addition, we demonstrate nanofabrication directly on 3D micro/nano surfaces, such as an atomic force microscopic probe, which is challenging for conventional nanofabrication due to the requirement of photoresist spin coating. Finally, this approach can also be extended to assist in the etching of other materials that are difficult to etch, such as silicon carbide (SiC).

A wear-resistant silicon nano-spherical AFM probe for robust nanotribological studies.

Nanoscale wear can severely limit the performance of tips used in atomic force microscopy, especially in contact and lateral mode operations. Hence, we investigated the mechanical and tribological properties of a newly invented nano-spherical silicon tip produced via swelling of single-crystal silicon using helium ion dosing to ascertain its reliability for AFM operations. The nanoindentation test proved that the modulus of elasticity of the nano-spheres tends to increase with the diameter of the spheres at 0.5 mN contact force. However, at 10 mN higher contact force, the elastic modulus was stable at ∼160 GPa irrespective of the sphere diameter. The SEM images confirmed the durability of the tip after 10 000 cycles of sliding on a silicon wafer and quartz surfaces. There was no damage on the tip and the wear debris was suggested to be from the localized wear on the counter wafer surface. Also, the in situ AFM pull-off force test indicated that the geometry of the tip remained unaltered during the wear test. The Si/SiO2 tribology study showed a decrease in coefficient of friction as velocity and sliding cycles increased which was attributed to the tribochemical reactions occurring at the Si/SiO2 interfaces. These results indicate that the new nano-spherical AFM tip has advantages in nanoscale tribology measurement.

Directional imbalance of Bloch surface waves for ultrasensitive displacement metrology.

Precise position sensing and nanoscale optical rulers are important in many applications in nanometrology, gravitational wave detection and quantum technologies. Several implementations of such nanoscale displacement sensors have been recently developed based on interferometers, nanoantennas, optical field singularities and optical skyrmions. Here, we propose a method for ultrasensitive displacement measurements based on the directional imbalance of the excitation of Bloch surface waves by an asymmetric double slit, which have low propagation loss and provide high detected intensity. The directionality of excitation changes dramatically with a sub-nanometric displacement of the illuminating Gaussian beam across the slit and can be used for displacement and refractive index metrology. We demonstrate a theoretical intensity ratio of the BSW excitation in opposite directions exceeding 890, which provides a displacement sensitivity of up to 2.888 nm-1 with a resolution below 0.5 nm over a 100 nm linearity range. Experimentally, a directional intensity ratio more than 90 has been achieved, with a displacement sensitivity of 0.122 nm-1 over a 300 nm linearity range, resulting in a resolution below 8 nm for a 600 nm illumination wavelength. The proposed facile configuration may have potential applications in nanometrology and super-resolution microscopy.

TaNAC35 acts as a negative regulator for leaf rust resistance in a compatible interaction between common wheat and Puccinia triticina.

NAC (NAM, AFAT1/2, and CUC2) transcription factors play important roles in plant growth and in resistance to abiotic and biotic stresses. Here, we show that the TaNAC35 gene negatively regulates leaf rust resistance in the wheat line Thatcher + Lr14b (TcLr14b) when challenged with a virulent isolate of Puccinia triticina (Pt). The TaNAC35 gene was cloned from this line, and blastp results showed that its open reading frame (ORF) was 96.16% identical to the NAC35-like sequence reported from Aegilops tauschii, and that it encoded a protein with 387 amino acids (aa) including a conserved NAM domain with 145 aa at the N-terminal alongside the transcriptional activation domain with 220 aa in the C-terminal. Yeast-one-hybrid analysis proved that the C-terminal of the TaNAC35 protein was responsible for transcriptional activation. A 250-bp fragment from the 3'-end of this target gene was introduced to a BSMV-VIGS vector and used to infect the wheat line Thatcher + Lr14b (TcLr14b). The BSMV-VIGS/TaNAC35-infected plant material showed enhanced resistance (infection type "1") to Pt pathotype THTT, which was fully virulent (infection type "4") on BSMV-VIGS only infected TcLr14b plants. Histological studies showed that inhibition of TaNAC35 reduced the formation of haustorial mother cells (HMC) and mycelial growth, implying that the TaNAC35 gene plays a negative role in the response of TcLr14b to Pt pathotype THTT. These results provide molecular insight into the interaction between Pt and its wheat host, and identify a potential target for engineering resistance in wheat to this damaging pathogen.

Magnetic nanoparticles coated with polyphenols for spatio-temporally controlled cancer photothermal/immunotherapy.

As the combination of photothermal therapy (PTT) with immunotherapy provides an effective strategy in cancer treatment, a magnetic nanoparticle delivery system was constructed to load indocyanine green (ICG) and immunostimulator R837 hydrochloride (R837) for spatio-temporally PTT/immunotherapy synergism in cancer. This delivery system is composed of Fe3O4 magnetic nanoparticles (MPs) as the core to load ICG and polyethylene glycol polyphenols (DPA-PEG) as the coating layer to load R837, which formed R837 loaded polyphenols coating ICG loaded magnetic nanoparticles (MIRDs). After intravenous injection, the formed MIRDs resulted in long circulation, magnetic resonance imaging (MRI) guides, and magnetic targeting. Once targeting to the tumor, the MIRDs with the near-infrared (NIR) irradiation caused tumor ablation and resulted in tumor-associated antigens releasing to induce the body's immunological response, which was markedly improved it to attack the tumors with the R837 releasing from the outer DPA-PEG. In this case, the synergism of the PTT and immunotherapy inhibited tumor growth, metastasis and recurrence, which resulted in potent anticancer therapeutic effects with few side effect.

Solution Processing for Lateral Transition-Metal Dichalcogenides Homojunction from Polymorphic Crystal.

Homojunctions comprised of transition-metal dichalcogenides (TMD) polymorphs are attractive building blocks for next-generation two-dimensional (2D) electronic circuitry. However, the synthesis of such homojunctions, which usually involves elaborate manipulation at the nanoscale, still remains a great challenge. Herein, we demonstrated a solution-processing strategy to successfully harvest lateral semiconductor-metal homojunctions with high yield. Specially, through precisely controlled lithiation process, precursors of polymorphic crystal arranged with 1T-2H domains were successfully achieved. A programmed exfoliation procedure was further employed to orderly laminate each phase in the polymorphic crystal, thus leading to 1T-2H TMD homojunction monolayers with sizes up to tens of micrometers. Moreover, the atomically sharp boundaries and superior band alignment improved the device on the basis of the semiconductor-metal homojunction with 50% decrease of electric field strength required in the derivation of state transition. We anticipate that solution processing based on programmed exfoliation would be a powerful tool to produce new configurations of 2D nanomaterials.

Bloch surface waves confined in one dimension with a single polymeric nanofibre.

Polymeric fibres with small radii (such as ≤125 nm) are delicate to handle and should be laid down on a solid substrate to obtain practical devices. However, placing these nanofibres on commonly used glass substrates prevents them from guiding light. In this study, we numerically and experimentally demonstrate that when the nanofibre is placed on a suitable dielectric multilayer, it supports a guided mode, a Bloch surface wave (BSW) confined in one dimension. The physical origin of this new mode is discussed in comparison with the typical two-dimensional BSW mode. Polymeric nanofibres are easily fabricated to contain fluorophores, which make the dielectric nanofibre and multilayer configuration suitable for developing a large range of new nanometric scale devices, such as processor-memory interconnections, devices with sensitivity to target analytes, incident polarization and multi-colour BSW modes.

Out-of-Focal Plane Imaging by Leakage Radiation Microscopy.

Leakage radiation microscopy (LRM) is used to investigate the optical properties of surfaces. The front-focal plane (FFP) image with LRM reveals structural features on the surfaces. Back-focal plane (BFP) image with LRM reveals the angular distribution of the radiation. Herein we experimentally demonstrate that the out-of-focal plane (OFP) images present a link between the FFP and BFP images and provide optical information that cannot be resolved by either FFP or BFP images. The OFP image provides a linkage between the spatial location of the emission and the angular distribution from the same location, and thus information about the film's discontinuity, nonuniformity or variable thickness can be uncovered. The use of OFP imaging will extend the scope and applications of the LRM and coupled emission imaging which are powerful tools in nanophotonics and high throughput fluorescence screening.

Far-field radially polarized focal spot from plasmonic spiral structure combined with central aperture antenna.

Manipulation of a vector micro-beam with an optical antenna has significant potentials for nano-optical technology applications including bio-optics, optical fabrication, and quantum information processing. We have designed and demonstrated a central aperture antenna within an Archimedean spiral that extracts the bonding plasmonic field from a surface to produce a new vector focal spot in far-field. The properties of this vector focal field are revealed by confocal microscopy and theoretical simulations. The pattern, polarization and phase of the focal field are determined by the incident light and by the chirality of the Archimedean spiral. For incident light with right-handed circular polarization, the left-handed spiral (one-order chirality) outputs a micro-radially polarized focal field. Our results reveal the relationship between the near-field and far-field distributions of the plasmonic spiral structure, and the structure has the potential to lead to advances in diverse applications such as plasmonic lenses, near-field angular momentum detection, and optical tweezers.

Selectable Surface and Bulk Fluorescence Imaging with Plasmon-Coupled Waveguides.

In this letter, we propose a new method for selective imaging of surface bound probes or simultaneous imaging of surface bound plus fluorescence from dye molecules in bulk water solution. The principle of this method relies on use of two optical modes with different mode distributions, filed decay lengths and polarization states that are sustaining in a plasmon waveguide. The two modes with different decay lengths couple with dye molecules of different regions, at different distances from the PCW-water interface. The emission from two different regions occur as two coupled emission rings with different polarizations and emitting angles in the back focal plane (BFP) images. By using an electric-driven liquid crystal in BFP imaging, we selectively imaged surface or surface plus bulk fluorescence. Accordingly two coupled emissions can be switched ON or OFF independently, that are for either surface or bulk fluorescence imaging. Our work provides a new method for fluorescence imaging or sensing just by using a planar multilayer film, which may be a useful for fluorescence-based techniques in chemistry, materials science, molecular biology, and medicine.

Tunable plasmonic coupling between silver nano-cubes and silver nano-hole arrays.

A quasi-three-dimensional (quasi-3D) system composed of Ag nano-cubes and Ag nano-hole arrays was fabricated through a low cost chemical process. The coupling of localized surface plasmons (LSPs) in the cube-hole array system has been investigated through surface-enhanced Raman scattering (SERS) from Rhodamine 6G (R6G) molecules. A SERS enhancement factor as large as 1.1 × 10(8) can be achieved due to this plasmonic coupling effect, and is highly sensitive to geometrical parameters, such as cube-hole array distance, hole diameter, inter-hole spacing and Ag film thickness.