On-chip Kerr parametric oscillation with integrated heating for enhanced frequency tuning and control.

Nonlinear microresonators can convert light from chip-integrated sources into new wavelengths within the visible and near-infrared spectrum. For most applications, such as the interrogation of quantum systems with specific transition wavelengths, tuning the frequency of converted light is critical. Nonetheless, demonstrations of wavelength conversion have mostly overlooked this metric. Here, we apply efficient integrated heaters to tune the idler frequency produced by the Kerr optical parametric oscillation in a silicon nitride microring across a continuous 1.5 terahertz range. Finally, we suppress idler frequency noise between DC and 5 kHz by several orders of magnitude using feedback to the heater drive.

Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield.

In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrades registration accuracy, severely limiting device performance and process yield. We introduce a methodology to solve this widespread but poorly understood problem. A new foundation of traceable localization enables rapid characterization of lithographic standards and comprehensive calibration of cryogenic microscopes, revealing and correcting latent systematic effects. Of particular concern, we discover that scale factor deviation and complex optical distortion couple to dominate registration errors. These novel results parameterize a process model for integrating quantum dots and bullseye resonators, predicting higher yield by orders of magnitude, depending on the Purcell factor threshold as a quantum performance metric. Our foundational methodology is a key enabler of the lab-to-fab transition of quantum information technologies and has broader implications to cryogenic and correlative microscopy.

Scalable and robust beam shaping using apodized fish-bone grating couplers.

Efficient power coupling between on-chip guided and free-space optical modes requires precision spatial mode matching with apodized grating couplers. Yet, grating apodizations are often limited by the minimum feature size of the fabrication approach. This is especially challenging when small feature sizes are required to fabricate gratings at short wavelengths or to achieve weakly scattered light for large-area gratings. Here, we demonstrate a fish-bone grating coupler for precision beam shaping and the generation of millimeter-scale beams at 461 nm wavelength. Our design decouples the minimum feature size from the minimum achievable optical scattering strength, allowing smooth turn-on and continuous control of the emission. Our approach is compatible with commercial foundry photolithography and has reduced sensitivity to both the resolution and the variability of the fabrication approach compared to subwavelength meta-gratings, which often require electron beam lithography.

Integrating planar photonics for multi-beam generation and atomic clock packaging on chip.

The commercialization of atomic technologies requires replacing laboratory-scale laser setups with compact and manufacturable optical platforms. Complex arrangements of free-space beams can be generated on chip through a combination of integrated photonics and metasurface optics. In this work, we combine these two technologies using flip-chip bonding and demonstrate an integrated optical architecture for realizing a compact strontium atomic clock. Our planar design includes twelve beams in two co-aligned magneto-optical traps. These beams are directed above the chip to intersect at a central location with diameters as large as 1 cm. Our design also includes two co-propagating beams at lattice and clock wavelengths. These beams emit collinearly and vertically to probe the center of the magneto-optical trap, where they will have diameters of ≈100 µm. With these devices we demonstrate that our integrated photonic platform is scalable to an arbitrary number of beams, each with different wavelengths, geometries, and polarizations.

Surface-Normal Free-Space Beam Projection via Slow-Light Standing-Wave Resonance Photonic Gratings.

On-chip grating couplers directly connect photonic circuits to free-space light. The commonly used photonic gratings have been specialized for small areas, specific intensity profiles, and nonvertical beam projection. This falls short of the precise and flexible wavefront control over large beam areas needed to empower emerging integrated miniaturized optical systems that leverage volumetric light-matter interactions, including trapping, cooling, and interrogation of atoms, bio- and chemi- sensing, and complex free-space interconnect. The large coupler size challenges general inverse design techniques, and solutions obtained by them are often difficult to physically understand and generalize. Here, by posing the problem to a carefully constrained computational inverse-design algorithm capable of large area structures, we discover a qualitatively new class of grating couplers. The numerically found solutions can be understood as coupling an incident photonic slab mode to a spatially extended slow-light (near-zero refractive index) region, backed by a reflector. The structure forms a spectrally broad standing wave resonance at the target wavelength, radiating vertically into free space. A reflectionless adiabatic transition critically couples the incident photonic mode to the resonance, and the numerically optimized lower cladding provides 70% overall theoretical conversion efficiency. We have experimentally validated an efficient surface normal collimated emission of ≈90 µm full width at half-maximum Gaussian at the thermally tunable operating wavelength of ≈780 nm. The variable-mesh-deformation inverse design approach scales to extra large photonic devices, while directly implementing the fabrication constraints. The deliberate choice of smooth parametrization resulted in a novel type of solution, which is both efficient and physically comprehensible.

Fourier Synthesis Dispersion Engineering of Photonic Crystal Microrings for Broadband Frequency Combs.

Dispersion engineering of microring resonators is crucial for optical frequency comb applications, to achieve targeted bandwidths and powers of individual comb teeth. However, conventional microrings only present two geometric degrees of freedom - width and thickness - which limits the degree to which dispersion can be controlled. We present a technique where we tune individual resonance frequencies for arbitrary dispersion tailoring. Using a photonic crystal microring resonator that induces coupling to both directions of propagation within the ring, we investigate an intuitive design based on Fourier synthesis. Here, the desired photonic crystal spatial profile is obtained through a Fourier relationship with the targeted modal frequency shifts, where each modal shift is determined based on the corresponding effective index modulation of the ring. Experimentally, we demonstrate several distinct dispersion profiles over dozens of modes in transverse magnetic polarization. In contrast, we find that the transverse electric polarization requires a more advanced model that accounts for the discontinuity of the field at the modulated interface. Finally, we present simulations showing arbitrary frequency comb spectral envelope tailoring using our Frequency synthesis approach.

Exceptional points in lossy media lead to deep polynomial wave penetration with spatially uniform power loss.

Waves entering a spatially uniform lossy medium typically undergo exponential intensity decay, arising from either the energy loss of the Beer-Lambert-Bouguer transmission law or the evanescent penetration during reflection. Recently, exceptional point singularities in non-Hermitian systems have been linked to unconventional wave propagation. Here, we theoretically propose and experimentally demonstrate exponential decay free wave propagation in a purely lossy medium. We observe up to 400-wave deep polynomial wave propagation accompanied by a uniformly distributed energy loss across a nanostructured photonic slab waveguide with exceptional points. We use coupled-mode theory and fully vectorial electromagnetic simulations to predict deep wave penetration manifesting spatially constant radiation losses through the entire structured waveguide region regardless of its length. The uncovered exponential decay free wave phenomenon is universal and holds true across all domains supporting physical waves, finding immediate applications for generating large, uniform and surface-normal free-space plane waves directly from dispersion-engineered photonic chip surfaces.

Impact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs.

Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the ratio of the gaseous precursors in LPCVD growth have a significant impact on material dispersion and hence the overall microresonator dispersion. In contrast to the many efforts focused on comparisons between Si-rich films and stoichiometric (Si3N4) films, here, we focus on films whose precursor gas ratios should nominally place them in the stoichiometric regime. We further show that microresonator geometric dispersion can be tuned to compensate for changes in the material dispersion.

Towards integrated photonic interposers for processing octave-spanning microresonator frequency combs.

Microcombs-optical frequency combs generated in microresonators-have advanced tremendously in the past decade, and are advantageous for applications in frequency metrology, navigation, spectroscopy, telecommunications, and microwave photonics. Crucially, microcombs promise fully integrated miniaturized optical systems with unprecedented reductions in cost, size, weight, and power. However, the use of bulk free-space and fiber-optic components to process microcombs has restricted form factors to the table-top. Taking microcomb-based optical frequency synthesis around 1550 nm as our target application, here, we address this challenge by proposing an integrated photonics interposer architecture to replace discrete components by collecting, routing, and interfacing octave-wide microcomb-based optical signals between photonic chiplets and heterogeneously integrated devices. Experimentally, we confirm the requisite performance of the individual passive elements of the proposed interposer-octave-wide dichroics, multimode interferometers, and tunable ring filters, and implement the octave-spanning spectral filtering of a microcomb, central to the interposer, using silicon nitride photonics. Moreover, we show that the thick silicon nitride needed for bright dissipative Kerr soliton generation can be integrated with the comparatively thin silicon nitride interposer layer through octave-bandwidth adiabatic evanescent coupling, indicating a path towards future system-level consolidation. Finally, we numerically confirm the feasibility of operating the proposed interposer synthesizer as a fully assembled system. Our interposer architecture addresses the immediate need for on-chip microcomb processing to successfully miniaturize microcomb systems and can be readily adapted to other metrology-grade applications based on optical atomic clocks and high-precision navigation and spectroscopy.

Meta-grating outcouplers for optimized beam shaping in the visible.

Accurate coupling between optical modes at the interface between photonic chips and free space is required for the development of many on-chip devices. This control is critical in quantum technologies where large-diameter beams with designed mode profiles are required. Yet, these designs are often difficult to achieve at shorter wavelengths where fabrication limits the resolution of designed devices. In this work we demonstrate optimized outcoupling of free-space beams at 461 nm using a meta-grating approach that achieves a 16 dB improvement in the apodized outcoupling strength. We design and fabricate devices, demonstrating accurate reproduction of beams with widths greater than 100 µm.

Tailoring Broadband Kerr Soliton Microcombs via Post-Fabrication Tuning of the Geometric Dispersion.

Geometric dispersion in integrated microresonators plays a major role in nonlinear optics applications, especially at short wavelengths, to compensate the natural material normal dispersion. Tailoring of geometric confinement allows for anomalous dispersion, which in particular enables the formation of microcombs which can be tuned into the dissipative Kerr soliton (DKS) regime. Due to processes like soliton-induced dispersive wave generation, broadband DKS combs are particularly sensitive to higher-order dispersion, which in turn is sensitive to the ring dimensions at the nanometer-level. For microrings exhibiting a rectangular cross section, the ring width and thickness are the two main control parameters to achieve the targeted dispersion. The former can be easily varied through parameter variation within the lithography mask, yet the latter is defined by the film thickness during growth of the starting material stack, and can show a significant variation (few percent of the total thickness) over a single wafer. In this letter, we demonstrate that controlled dry-etching allows for fine tuning of the device layer (silicon nitride) thickness at the wafer level, allowing multi-project wafers targeting different wavelength bands, and post-fabrication trimming in air-clad ring devices. We demonstrate that such dry etching does not significantly affect either the silicon nitride surface roughness or the optical quality of the devices, thereby enabling fine tuning of the dispersion and the spectral shape of the resulting DKS states.

Efficient photo-induced second harmonic generation in silicon nitride photonics.

Silicon photonics lacks a second-order nonlinear optical (χ(2)) response in general because the typical constituent materials are centro-symmetric and lack inversion symmetry, which prohibits χ(2) nonlinear processes such as second harmonic generation (SHG). Here, we realize record-high SHG efficiency in silicon photonics by combining a photo-induced effective χ(2) nonlinearity with resonant enhancement and perfect-phase matching. We show a conversion efficiency of (2,500 ± 100) %/W, which is 2 to 4 orders of magnitude larger than previous field-induced SHG works. In particular, our devices realize milliwatt-level SHG output powers with up to (22 ± 1) % power conversion efficiency. This demonstration is a major breakthrough in realizing efficient χ(2) processes in silicon photonics, and paves the way for further integration of self-referenced frequency combs and optical frequency references.

Automated on-axis direct laser writing of coupling elements for photonic chips.

Direct laser writing (DLW) has recently been used to create versatile micro-optic structures that facilitate photonic-chip coupling, like free-form lenses, free-form mirrors, and photonic wirebonds. However, at the edges of photonic chips, the top-down/off-axis printing orientation typically used limits the size and complexity of structures and the range of materials compatible with the DLW process. To avoid these issues, we develop a DLW method in which the photonic chip's optical input/output (IO) ports are co-linear with the axis of the lithography beam (on-axis printing). Alignment automation and port identification are enabled by a 1-dimensional barcode-like pattern that is fabricated within the chip's device layer and surrounds the IO waveguides to increase their visibility. We demonstrate passive alignment to these markers using standard machine vision techniques, and print single-element elliptical lenses along an array of 42 ports with a 100 % fabrication yield. These lenses improve fiber-to-chip misalignment tolerance relative to other fiber-based coupling techniques. The 1 dB excess loss diameter increases from ≈ 2.3 µm when using a lensed fiber to ≈ 9.9 µm when using the DLW printed micro-optic and a cleaved fiber. The insertion loss penalty introduced by moving to this misalignment-tolerant coupling approach is limited, with an additional loss (in comparison to the lensed fiber) as small as ≈1 dB and ≈2 dB on average. Going forward, on-axis printing can accommodate a variety of multi-element free-space and guided wave coupling elements, without requiring calibration of printing dose specific to the geometry of the 3D printed structure or to the materials comprising the photonic chip. It also enables novel methods for interconnection between chips. To that end, we fabricate a proof-of-concept 3D photonic wire bond between two vertically stacked photonic chips.

Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs: publisher's note.

This publisher's note contains corrections to Opt. Lett.44, 4737 (2019) OPLEDP0146-959210.1364/OL.44.004737.

A universal frequency engineering tool for microcavity nonlinear optics: multiple selective mode splitting of whispering-gallery resonances.

Whispering-gallery microcavities have been used to realize a variety of efficient parametric nonlinear optical processes through the enhanced light-matter interaction brought about by supporting multiple high quality factor and small modal volume resonances. Critical to such studies is the ability to control the relative frequencies of the cavity modes, so that frequency matching is achieved to satisfy energy conservation. Typically this is done by tailoring the resonator cross-section. Doing so modifies the frequencies of all of the cavity modes, that is, the global dispersion profile, which may be undesired, for example, in introducing competing nonlinear processes. Here, we demonstrate a frequency engineering tool, termed multiple selective mode splitting (MSMS), that is independent of the global dispersion and instead allows targeted and independent control of the frequencies of multiple cavity modes. In particular, we show controllable frequency shifts up to 0.8 nm, independent control of the splitting of up to five cavity modes with optical quality factors ≳ 105, and strongly suppressed frequency shifts for untargeted modes. The MSMS technique can be broadly applied to a wide variety of nonlinear optical processes across different material platforms, and can be used to both selectively enhance processes of interest and suppress competing unwanted processes.

On-chip optical parametric oscillation into the visible: generating red, orange, yellow, and green from a near-infrared pump.

The on-chip generation of coherent, single-frequency laser light that can be tuned across the visible spectrum would help enable a variety of applications in spectroscopy, metrology, and quantum science. Recently, third-order optical parametric oscillation (OPO) in a microresonator has shown great promise as an efficient and scalable approach towards this end. However, considering visible light generation, so far only red light at < 420 THz (near the edge of the visible band) has been reported. In this work, we overcome strong material dispersion at visible wavelengths and demonstrate on-chip OPO in a Si3N4 microresonator covering >130 THz of the visible spectrum, including red, orange, yellow, and green wavelengths. In particular, using an input pump laser that is scanned 5 THz in the near-infrared from 386 THz to 391 THz, the OPO output signal is tuned from the near-infrared at 395 THz to the visible at 528 THz, while the OPO output idler is tuned from the near-infrared at 378 THz to the infrared at 254 THz. The widest signal-idler separation of 274 THz is more than an octave in span and is the widest demonstrated for a nanophotonic OPO to date. More generally, our work shows how nonlinear nanophotonics can transform light from readily accessible compact near-infrared lasers to targeted visible wavelengths of interest.

Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs.

Octave-spanning frequency combs have been successfully demonstrated in Kerr nonlinear microresonators. These microcombs rely on both engineered dispersion, to enable generation of frequency components across the octave, and on engineered coupling, to efficiently extract the generated light into an access waveguide while maintaining a close to critically coupled pump. The latter is challenging, as the spatial overlap between the access waveguide and the ring modes decays with frequency. This leads to strong coupling variation across the octave, with poor extraction at short wavelengths. Here, we investigate how a waveguide wrapped around a portion of the resonator, in a pulley scheme, can improve the extraction of octave-spanning microcombs, in particular at short wavelengths. We use the coupled-mode theory to predict the performance of the pulley couplers and demonstrate good agreement with experimental measurements. Using an optimal pulley coupling design, we demonstrate a 20 dB improvement in extraction at short wavelengths compared to straight waveguide coupling.

Chip-integrated visible-telecom photon pair sources for quantum communication.

Photon pair sources are fundamental building blocks for quantum entanglement and quantum communication. Recent studies in silicon photonics have documented promising characteristics for photon pair sources within the telecommunications band, including sub-milliwatt optical pump power, high spectral brightness, and high photon purity. However, most quantum systems suitable for local operations, such as storage and computation, support optical transitions in the visible or short near-infrared bands. In comparison to telecommunications wavelengths, the significantly higher optical attenuation in silica at such wavelengths limits the length scale over which optical-fiber-based quantum communication between such local nodes can take place. One approach to connect such systems over fiber is through a photon pair source that can bridge the visible and telecom bands, but an appropriate source, which should produce narrow-band photon pairs with a high signal-to-noise ratio, has not yet been developed. Here, we demonstrate an on-chip visible-telecom photon pair source for the first time, using high quality factor silicon nitride microresonators to generate bright photon pairs with an unprecedented coincidence-to-accidental ratio (CAR) up to (3.8 ± 0.2) × 103. We further demonstrate dispersion engineering of the microresonators to enable the connection of different species of trapped atoms/ions, defect centers, and quantum dots to the telecommunications bands for future quantum communication systems.

Milliwatt-threshold visible-telecom optical parametric oscillation using silicon nanophotonics.

The on-chip creation of coherent light at visible wavelengths is crucial to field-level deployment of spectroscopy and metrology systems. Although on-chip lasers have been implemented in specific cases, a general solution that is not restricted by limitations of specific gain media has not been reported. Here, we propose creating visible light from an infrared pump by widely-separated optical parametric oscillation (OPO) using silicon nanophotonics. The OPO creates signal and idler light in the 700 nm and 1300 nm bands, respectively, with a 900 nm pump. It operates at a threshold power of (0.9 ± 0.1) mW, over 50× smaller than other widely-separated microcavity OPO works, which have only been reported in the infrared. This low threshold enables direct pumping without need of an intermediate optical amplifier. We further show how the device design can be modified to generate 780 nm and 1500 nm light with a similar power efficiency. Our nanophotonic OPO shows distinct advantages in power efficiency, operation stability, and device scalability, and is a major advance towards flexible on-chip generation of coherent visible light.

Metasurface-Integrated Photonic Platform for Versatile Free-Space Beam Projection with Polarization Control.

Densely integrated photonic circuits enable scalable, complex processing of optical signals, including modulation, multiplexing, wavelength conversion, and detection. Directly interfacing such integrated circuits to free-space optical modes will enable novel optical functions, such as chip-scale sensing, interchip free-space interconnect and cooling, trapping, and interrogation of atoms. However, doing this within the limits of planar batch fabrication requires new approaches for bridging the large mode scale mismatch. Here, by integrating a dielectric metasurface with an extreme photonic mode converter, we create a versatile nanophotonic platform for efficient coupling to arbitrary-defined free-space radiation of 780 nm wavelength with well-controlled spatially-dependent polarization, phase, and intensity. Without leaving the chip, the high index photonic mode is converted first to a ≈ 200 µm wide, precisely collimated, linearly-polarized Gaussian beam, which is then modified by a planar, integrated, low-loss metasurface. We demonstrate high numerical aperture, diffraction limited focusing to an ≈ 473 nm spot at an ≈ 75 µm working distance, and combine it with simultaneous conversion from linear to elliptical polarization. All device components are lithographically defined and can be batch fabricated, facilitating future chip-scale low-cost hybrid photonic systems for bio-sensing, nonlinear signal processing and atomic quantum sensing, frequency references and memory.