Tracking sub-nanometer thermal structural changes with speckle interferometry.

Based on our results of the James Webb Space Telescope (JWST) center-of-curvature tests where we were able to measure dynamic amplitudes of Zernike terms to the order of a few picometers, we have applied the same approach to determine if it is possible to measure the accuracy of higher-order Zernike terms as a function of time rather than frequency, i.e., static measurements in place of measuring the amplitude of frequency components. We have applied this approach to data taken for the JWST backplane structure test article (BSTA) in 2006 and find that we can measure effects at the sub-nanometer level, as small as 50 pm for Zernike terms over 30. We conclude that these results show it will be possible to use these techniques to ensure that the optics and support structure for large space telescopes can meet the necessary stability requirements for detecting spectral signatures of life on Earth-like extra-solar planets.

Sub-picometer dynamic measurements of a diffuse surface.

Future space observatory missions are forecasting the need for sensing and controlling wavefront error and system alignment stability to picometer scale. Picometer stability performance demands precision knowledge of the mirror and metering structure materials to the same degree. A high-speed electronic speckle pattern interferometer was designed and built to demonstrate measurements of both static and dynamic responses of picometer amplitudes in materials of diffuse surface subjected to very low energy disturbances. This paper describes the details of a test to impart a dynamic disturbance of picometer scale and measure the response of a composite material. The results of the test are also reported and show conclusively that sub-picometer scale effects can be accurately measured in an open test environment outside a vacuum chamber.

Offset of coherent envelope position due to phase change on reflection.

Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10-40 nm for metallic surfaces.

Fringe modulation skewing effect in white-light vertical scanning interferometry.

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

Improved vertical-scanning interferometry.

We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.

Effect of retroreflection on a Fizeau phase-shifting interferometer.

Phase errors in a Fizeau phase-shifting interferometer caused by multiple-reflected beams from a retroreflective optics, such as a corner cube and a right-angle prism, are studied. Single- and double-pass configurations are presented, and their measurement results are compared. An attenuator is not needed in a double-pass configuration because light is reflected by the retroreflective optics twice and the reference surface once and hence the intensities match. It is more accurate to test a corner cube or a right-angle prism in a double-pass configuration than in a single-pass configuration. Simulations and experimental results are presented.

Absolute testing of flats by using even and odd functions.

We describe a modified three-flat method. In a Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even, and odd-odd functions. The even-odd and the odd-even functions of each flat are obtained first, and then the even-even function is calculated. All three functions are exact. The odd-odd function is difficult to obtain. In theory, this function can be solved by rotating the flat 90°, 45°, 22.5°, etc. The components of the Fourier series of this odd-odd function are derived and extracted from each rotation of the flat. A flat is approximated by the sum of the first three functions and the known components of the odd-odd function. In the experiments, the flats are oriented in six configurations by rotating the flats 180°, 90°, and 45° with respect to one another, and six measurements are performed. The exact profiles along every 45° diameter are obtained, and the profile in the area between two adjacent diameters of these diameters is also obtained with some approximation. The theoretical derivation, experiment results, and error analysis are presented.

Testing an optical window of a small wedge angle: effect of multiple reflections.

Multiple reflections between two surfaces of a window introduce a fixed pattern error in optical measurements. One way to remove these spurious reflections is to use a reasonably large wedge so that the interference fringes formed by the two surfaces are too dense for the detector to resolve. However, this method does not work if the wedge angle is small, e.g., several arcseconds. By tilting both the window and the return mirror properly, it is possible to remove the effect of multiple reflections of a window. Theory and experimental results are presented.

Testing spherical surfaces: a fast, quasi-absolute technique.

A technique for measuring the quality of spherical surfaces that provides a quasi-absolute result is presented. It requires only two measurement positions rather than the traditional method of absolute sphere measurement that requires three measurement positions. A measurement is taken with a mirror at the focus of the interferometer diverger lens and is subtracted from a measurement of the sphere tested at its center of curvature. This test assumes that the test sphere does not contain any aberrations with odd symmetry so that these aberrations can be subtracted to provide a fast, quasi-absolute measurement. We describe the new technique and compare measurement results from testing a lambda/12 peak-to-valley sphere (numerical aperture = 0.4) by using a phase-measuring Fizeau interferometer with results from the three-position absolute sphere measurement technique. The repeatability of this measurement technique is +/-0.01 waves peak to valley.

Absolute measurement of surface roughness.

In an interferometer which uses a reference surface, the measured surface heights correspond to the difference between the test and reference surfaces. To accurately determine the rms roughness of supersmooth surfaces, the effects of the reference surface roughness need to be removed. One technique for doing this involves averaging a number of uncorrelated measurements of a mirror to generate a reference surface profile which can then be subtracted from subsequent measurements so that they do not contain errors due to the reference surface. The other technique provides an accurate rms roughness of the surface by taking two uncorrelated measurements of the surface. These two techniques for measurement of supersmooth surfaces are described in detail, and results of the measurement of a 0.7-A rms roughness mirror are presented. The expected error in the rms roughness measurement of a supersmooth mirror due to instrument noise is 0.02 A.

Effect of spurious reflection on phase shift interferometry.

The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared.

Effect of piezoelectric transducer nonlinearity on phase shift interferometry.

If the nonlinearity of the motion of a piezoelectric transducer (PZT) can be described as a quadratic function, the integrated intensity of one frame in phase shift interferometry can be calculated using the Fresnel integral. For a PZT with smaller nonlinearity, the rms phase error is almost linearly proportional to the quadratic coefficient The effects of PZT nonlinearity on the three- and the four-bucket algorithms are compared.