ABSTRACT
Phase-shifting method is widely used in fringe projection profilometry to obtain high-precision wrapped phase maps. The wrapped phase map needs to be converted to an absolute phase map to recover 3D information. The speckle pattern based phase unwrapping method requires only one additional auxiliary pattern, showing great potential for fast 3D measurements. In this paper, a speckle assisted four-steps phase-shifting method was proposed for 3D measurements. This method requires five structured light patterns to complete 3D measurements, including four-steps phase-shifting fringe patterns and a speckle pattern which is used to remove phase ambiguity. The main challenge of speckle based phase unwrapping method is to overcome the mismatch problem which often occurs in some very steep surfaces. In order to improve the speckle matching accuracy, an adaptive horizontal scaling method was proposed. A voting strategy based on phase-connected regions was proposed to reduce the computational overhead. The experiments demonstrate its superior performance, and an accuracy of 0.21 mm was achieved.
ABSTRACT
MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.
ABSTRACT
MEMS-based LiDAR (micro-electro-mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.
ABSTRACT
Structured light is an optical 3D surface measurement technique with the merits of high speed and high robustness. However, the huge size of traditional digital light processing (DLP) projectors limits its convenience in numerous applications. In this paper, a one-axis MEMS mirror is used as the structured light projector in 3D modeling systems, and has the advantages of small volume and low cost. Limited by the inability to project orthogonal patterns and projection distortion, it is difficult for the one-axis MEMS mirror based 3D modeling system to obtain high accuracy through existing calibration methods. This paper proposed a calibration method for structured light 3D modeling systems that can only project stripes in one direction with projection distortion. A curved surface equation called curved light surface model was proposed to replace the ideal plane equation as the mathematic model of the projected structured light stripes. Experiment results verified that this method can significantly reduce the effect of projection distortion and an accuracy of 0.11 mm was achieved when measuring a standard dumbbell-shaped object with 201.10 mm center-to-center distance.
ABSTRACT
A three-dimensional topography simulation of deep reactive ion etching (DRIE) is developed based on the narrow band level set method for surface evolution and Monte Carlo method for flux distribution. The advanced level set method is implemented to simulate the time-related movements of etched surface. In the meanwhile, accelerated by ray tracing algorithm, the Monte Carlo method incorporates all dominant physical and chemical mechanisms such as ion-enhanced etching, ballistic transport, ion scattering, and sidewall passivation. The modified models of charged particles and neutral particles are epitomized to determine the contributions of etching rate. The effects such as scalloping effect and lag effect are investigated in simulations and experiments. Besides, the quantitative analyses are conducted to measure the simulation error. Finally, this simulator will be served as an accurate prediction tool for some MEMS fabrications.
