Femtosecond laser nanostructuring on a 4H-SiC surface by tailoring the induced self-assembled nanogratings.

Ultrafast laser micromachining of crystalline silicon carbide (SiC) has great perspectives in aerospace industry and integrated circuit technique. In this report, we present a study of femtosecond laser nanostructuring on the surface of an n-type 4H-SiC single crystal. Except for uniform nanogratings, new types of large-area periodic structures including nanoparticle array and nanoparticle-nanograting hybrid structures were induced on the surface of 4H-SiC by scanning irradiation. The effects of pulse energy, scan speed, and the polarization direction on the morphology and periodicity of nanogratings were systematically explored. The proper parameter window for nanograting formation in pulse energy-scan speed landscape is depicted. Both the uniformity and the periodicity of the induced nanogratings are polarization dependent. A planar light attenuator for linear polarized light was demonstrated by aligning the nanogratings. The transition between different large-area periodic structures is achieved by simultaneous control of pulse energy and scan interval using a cross scan strategy. These results are expected to open up an avenue to create and manipulate periodic nanostructures on SiC crystals for photonic applications.

Polarization-dependent microstructural evolution induced by a femtosecond laser in an aluminosilicate glass.

Manipulation of femtosecond laser induced microstructures in glass by tuning the laser polarization has great potential in optics. Here we report two different polarization-dependent microstructures and their evolution with pulse repetition rate in an aluminosilicate glass induced by femtosecond laser irradiation. A V-shaped crack oriented parallel to the laser polarization plane is induced at the bottom of modified regions by pulses operated at 200 kHz, 1030 nm, and 300 fs. Further increasing the pulse repetition rate to 500 kHz leads to the formation of a dumbbell-shaped structure, which is elongated perpendicularly to the laser polarization, at the top of the modified region. The size of the coloration area and the dumbbell-shaped structure can be controlled by tuning the pulse duration. Further investigation indicates that higher numerical apertures are in favor of the presence of the polarization effects in femtosecond laser irradiation. The possible mechanism responsible for the formation of the two microstructures is discussed. These results could be helpful for understanding of ultrafast laser interaction with glass.