A Review on Micro/Nanoforming to Fabricate 3D Metallic Structures.

With the rapid development of micro-electromechanical systems (MEMS), micro/nanoscale fabrication of 3D metallic structures with complex structures and multifunctions is becoming more and more important due to the recent trend of product miniaturization. As a promising micromanufacturing approach based on plastic deformation, micro/nanoforming shows the attractive advantages of high productivity, low cost, near-net-shape, and excellent mechanical properties, compared with other non-silicon-based micromanufacturing technologies. However, micro/nanoforming is far less established due to the so-called size effects in terms of materials models, process laws, tooling design, etc. The understanding of basic issues on micro/nanoforming is not yet mature, and it is currently a topic of rigorous investigation. Here, a systematic review on the micro/nanoforming processes of 3D structures with multifunctional properties is presented, wherein also a critical examination of the interplay between relevant length scales and size effects affecting the structural integrity of micro/mesoscale metallic systems is also provided. Finally, the challenges of micro/nanoscale fabrication are proposed, including the development trends of new micro/nanoforming processes, multiple field coupling effects, and theoretical modeling at the trans-scale.

Investigation of Electrically-Assisted Rolling Process of Corrugated Surface Microstructure with T2 Copper Foil.

Electrically-assisted (EA) forming is a low-cost and high-efficiency method to enhance the formability of materials. In the study, EAF tensile tests are carried out to study the properties of T2 copper foil in an annealed state, and the effect of the electric current on the forming quality of corrugated foils is further studied in the EA rolling forming process. The result shows that the current reduces the flow stress and the fracture strain, which is different from the result of rolled samples. The joule heating effect on mechanical properties is significant in EA tension, and the softening effect of the surface layer can be observed at tensile strength, due to the grain size effect. Moreover, the current can weaken the grain size effect. In the rolling forming process, the influence of different electrical parameters on the forming height is remarkable, especially for the rolled T2 copper. The appropriate electrical parameters can improve the forming height, while keeping a small thickness thinning. Nevertheless, the high current density will lead to local rupture. This study proves that the current can improve the forming quality of the corrugated foils and is a promising surface texture forming process.