ABSTRACT
We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.
ABSTRACT
Computational manufacturing experiments are used to detect the types of optical coatings that are showing the presence of a strong error self-compensation effect in the coating production with direct broad band monitoring. It is shown that predictions made on the basis of these experiments coincide with the predictions of the previously developed rigorous mathematical approach to the investigation of the error self-compensation effect.
ABSTRACT
The main theoretical results related to the investigation of the error self-compensation mechanism associated with direct broad band monitoring of optical coating production are presented. The presented results are illustrated using the production of Brewster angle polarizer where this effect is especially strong. Specific properties of the design merit function required for the presence of the error self-compensation effect are discussed and the mechanism of thickness errors correlation by the direct broad band monitoring is described. It is also discussed how one can check whether a strong error self-compensation effect may be expected for a given coating design and specific parameters of the monitoring procedure that will be used for coating production.
