A Flexible 8-in-1 Microsensor Embedded in Proton Battery Stack for Real-Time Microscopic Measurements.

According to the latest literature, it is difficult to measure the multiple important physical parameters inside a proton battery stack accurately and simultaneously. The present bottleneck is external or single measurements, and the multiple important physical parameters (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated, and have a significant impact on the performance, life, and safety of the proton battery stack. Therefore, this study used micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and a micro clamping pressure sensor, which were integrated into the 6-in-1 microsensor developed by this research team. In order to improve the output and operability of microsensors, an incremental mask was redesigned to integrate the back end of the microsensor in combination with a flexible printed circuit. Consequently, a flexible 8-in-1 (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) microsensor was developed and embedded in a proton battery stack for real-time microscopic measurement. Multiple micro-electro-mechanical systems technologies were used many times in the process of developing the flexible 8-in-1 microsensor in this study, including physical vapor deposition (PVD), lithography, lift-off, and wet etching. The substrate was a 50 µm-thick polyimide (PI) film, characterized by good tensile strength, high temperature resistance, and chemical resistance. The microsensor electrode used Au as the main electrode and Ti as the adhesion layer.

An Internal Real-Time Microscopic Diagnosis of a Proton Battery Stack during Charging and Discharging.

The proton battery has facilitated a new research direction for technologies related to fuel cells and energy storage. Our R&D team has developed a prototype of a proton battery stack, but there are still problems to be solved, such as leakage and unstable power generation. Moreover, it is unlikely that the multiple important physical parameters inside the proton battery stack can be measured accurately and simultaneously. At present, external or single measurements represent the bottleneck, yet the multiple important physical parameters (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated and have a significant impact on the performance, life, and safety of the proton battery stack. This research uses micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and integrates the six-in-one microsensor that our R&D team previously developed in order to improve sensor output and facilitate overall operation by redesigning the incremental mask and having this co-operate with a flexible board for sensor back-end integration, completing the development of a flexible seven-in-one (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) microsensor.

Real-Time Monitoring of HT-PEMFC.

During the electrochemical reaction of a high temperature proton exchange membrane fuel cell (HT-PEMFC), (in this paper HT-PEMFC means operating in the range of 120 to 200 °C) the inhomogeneity of temperature, flow rate, and pressure in the interior is likely to cause the reduction of ion conductivity or thermal stability weight loss of proton exchange membrane materials, and it is additionally likely to cause uneven fuel distribution, thereby affecting the working performance and service life of the HT-PEMFC. This study used micro-electro-mechanical systems (MEMS) technology to develop a flexible three-in-one microsensor which is resistant to high temperature electrochemical environments; we selected appropriate materials and process parameters to protect the microsensor from failure or damage under long-term tests. The proposed method can monitor the local temperature, flow rate, and pressure distribution in HT-PEMFC in real time.

Low-Temperature Flexible Micro Hydrogen Sensor Embedded in a Proton Battery for Real-Time Microscopic Diagnosis.

The proton battery is a very novel emerging research area with practicability. The proton battery has charging and discharging functions. It not only electrolyzes water: the electrolyzed protons can be stored but also released, which are combined with oxygen to generate electricity, and the hydrogen is not required; the hydrogen ions will be released from the battery. According to the latest document, the multiple important physical parameters (e.g., hydrogen, voltage, current, temperature, humidity, and flow) inside the proton battery are unlikely to be obtained accurately and the multiple important physical parameters mutually influence the data; they have critical effects on the performance, life, and health status of the proton battery. At present, the proton battery is measured only from the outside to indirectly diagnose the health status of battery; the actual situation inside the proton battery cannot be obtained instantly and accurately. This study uses micro-electro-mechanical systems (MEMS) technology to develop a low-temperature micro hydrogen sensor, which is used for monitoring the internal condition of the proton battery and judging whether or not there is hydrogen leakage, so as to enhance the safety.

Flexible 6-in-1 Microsensor for Real-Time Microscopic Monitoring of Proton Battery.

According to the comparison between a proton battery and a proton exchange membrane fuel cell (PEMFC), the PEMFC requires oxygen and hydrogen for generating electricity, so a hydrogen tank is required, leading to larger volume of PEMFC. The proton battery can store hydrogen in the carbon layer, combined with the oxygen in the air to form water to generate electricity; thus, the battery cost and the space for a hydrogen tank can be reduced a lot, and it is used more extensively. As the proton battery is a new research area, multiple important physical quantities inside the proton battery should be further understood and monitored so as to enhance the performance of battery. The proton battery has the potential for practical applications, as well as water electrolysis, proton storage and discharge functions, and it can be produced without expensive metals. Therefore, in this study, we use micro-electro-mechanical systems (MEMS) technology to develop a diagnostic tool for the proton battery based on the developed microhydrogen sensor, integrated with the voltage, current, temperature, humidity and flow microsensors developed by this laboratory to complete a flexible integrated 6-in-1 microsensor, which is embedded in the proton battery to measure internal important physical parameters simultaneously so that the reaction condition in the proton battery can be mastered more accurately. In addition, the interaction of physical quantities of the proton battery are discussed so as to enhance the proton battery's performance.