ABSTRACT
In this work, a simultaneous electrocoagulation/electrofiltration (EC/EF) treatment module was employed to treat nanosized TiO2-containing wastewater. Nanosized TiO2-containing wastewater was obtained and treated by a self-designed EC/EF treatment module. To evaluate the performance of this novel treatment module, the effects of electric field strength (EFS), transmembrane pressure (TMP), and crossflow velocity (CV) on permeate qualities were investigated. Permeate qualities of concern included pH, turbidity, conductivity, chemical oxygen demand (COD), and total organic carbon (TOC). A full factorial design of experiments was adopted in this work. First, by keeping TMP and CV constant the effects of EFS on permeate qualities were studied. In this set of testing, it was noticed that an application of electric field greatly increased the filtration rate, which was further influenced by the magnitude of EFS. In all cases, the filtration rate decreased as the treatment time elapsed due mainly to fouling of the membrane. Further tests were conducted to study the effects of TMP on permeate qualities by keeping EFS and CV constant. Finally, the effects of CV on permeate qualities were studied by keeping EFS and TMP constant. It was found that the optimal operating conditions would be electric field strength of 166.7 V/cm, transmembrane pressure of 1 kgf/cm2, and crossflow velocity of 0.22cm/s. Under such conditions, permeate would have the following qualities: (1) pH, 6.32; (2) turbidity, 2.41 NTU; (3) conductivity, 15.11 microS/cm; (4) COD, 100.0 mg/L; and (5) TOC, 512.6 mg/L.
Subject(s)
Electrochemistry/methods , Titanium/isolation & purification , Waste Disposal, Fluid/methods , Water Purification/methods , Carbon/isolation & purification , Electrocoagulation/methods , Filtration , Hydrogen-Ion Concentration , Membranes, Artificial , Nanostructures/chemistry , Organic Chemicals/isolation & purification , Organic Chemicals/metabolism , Oxygen/chemistry , Oxygen/isolation & purification , Oxygen/metabolism , Particle Size , Time FactorsABSTRACT
Chemical-mechanical polishing (CMP) is currently one of the main technologies used by wafer plants in the semiconductor industry. Normally, a large amount of de-ionized water should be used to wash out the abrasives adhered to the surface of wafers during the grinding process. Therefore, CMP wastewater not only has a great quantity but also contains very small size of suspended solids. Generally, these suspended solids would not settle. This phenomenon results in a low visibility of CMP wastewater. To solve this problem, a study on electrically enhanced crossflow microfiltration of CMP wastewater was conducted. Normally, the membrane of traditional dead-end filtration is easily blocked by the filter cake resulting in a small flux of filtrate. Therefore, the form of crossflow filtration (CFF) is used to reduce the blocking of the membrane. Furthermore, if CFF is accompanied by an external electric field, the negatively charged suspended solids in wastewater would move toward the positive electrode. Meanwhile, the flux of filtrate would increase. In this investigation, CMP wastewater was obtained from a wafer plant and characterized by various standard methods. Before testing, the CMP wastewater was pre-filtered using a 1.2 microm pore size filter. Then it was operated by a crossflow microfiltration (0.1 microm pore size) system under an appropriate crossflow velocity, filtration pressure, and electric potential. The filtrate was also characterized by various standard methods. Experimental results show that the filtrate has a turbidity of zero value. Thus, the filtrate could be reused for other purposes. However, the suspended solids of the CMP wastewater would be concentrated by this method. Therefore, the recovery of the suspended solids would be worth considering.
