Optimization design of two-stage amplification micro-drive system without additional motion based on particle swarm optimization algorithm.

With the increasing requirements of precision mechanical systems in electronic packaging, ultra-precision machining, biomedicine and other high-tech fields, it is necessary to study a precision two-stage amplification micro-drive system that can safely provide high precision and a large amplification ratio. In view of the disadvantages of the current two-stage amplification and micro-drive system, such as poor security, low motion accuracy and limited amplification ratio, an optimization design of a precise symmetrical two-stage amplification micro-drive system was completed in this study, and its related performance was studied. Based on the guiding principle of the flexure hinge, a two-stage amplification micro-drive mechanism with no parasitic motion or non-motion direction force was designed. In addition, the structure optimization design of the mechanism was completed using the particle swarm optimization algorithm, which increased the amplification ratio of the mechanism from 5 to 18 times. A precise symmetrical two-stage amplification system was designed using a piezoelectric ceramic actuator and two-stage amplification micro-drive mechanism as the micro-driver and actuator, respectively. The driving, strength, and motion performances of the system were subsequently studied. The results showed that the driving linearity of the system was high, the strength satisfied the design requirements, the motion amplification ratio was high and the motion accuracy was high (relative error was 5.31%). The research in this study can promote the optimization of micro-drive systems.

Design and Performance Research of a Precision Micro-Drive Reduction System without Additional Motion.

A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system's motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.

Research on Continuous Error Compensation of a Sub-Arc-Second Macro/Micro Dual-Drive Rotary System.

In this paper, a sub-arc-second macro/micro dual-drive rotary system is designed, and the continuous compensation of the system error and its experimental research are completed. First, the macro-drive system is driven by a direct-drive motor, and the micro-drive system uses a piezoelectric ceramic to drive the micro-drive rotary mechanism; the system uses a micro-drive system to compensate the motion error of the macro-drive system, and uses circular grating to feedback the displacement of the macro/micro total output turntable to form a macro/micro dual-drive closed-loop control system. Second, based on the establishment of the system error model, the design of the system's continuous error compensation scheme is completed. Finally, the positioning accuracy testing of the system, direct error compensation of the macro-drive, manual error compensation of the macro-drive, error compensation performance of the micro-drive part and macro/micro compensation of the system are carried out in the study. The results show that the repeated positioning error and the positioning error of the system are reduced by 78.8% and 95.2%, respectively, after macro/micro compensation. The correctness and effectiveness of the designed system design, error compensation and control method are verified through performance tests, and its positioning accuracy is verified to the sub-arc-second (0.1 arcsecond) level. The research in this paper has important reference value for the development of ultra-precision macro/micro dual-drive technology.

Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System.

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″-0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.