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50-W average-power, 480-fs KrF excimer laser with gated gain amplification.
Nabekawa, Y; Yashitomi, D; Sekikawa, T; Watanabe, S.
Opt Lett ; 26(11): 807-9, 2001 Jun 01.
Article in English | MEDLINE | ID: mdl-18040457

ABSTRACT

We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.

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