ABSTRACT
This work presents the design, modeling, simulation, and characterization of a metal bent-beam photo-thermal micro-actuator. The mechanism of actuation is based on the thermal expansion of the micro-actuator which is irradiated by a laser, achieving noncontact control of the power supply. Models for micro-actuators were established and finite-element simulations were carried out to investigate the effects of various parameters on actuation properties. It is found that the thermal expansion coefficient, thermal conductivity, and the geometry size largely affected actuation behavior whereas heat capacity, density, and Young's modulus did not. Experiments demonstrated the dynamic properties of a Ni micro-actuator fabricated via LIGA technology with 1100/30/100 µm (long/wide/thick) arms. The tip displacement of the micro-actuator could achieve up to 42 µm driven by a laser beam (1064 nm wavelength, 1.2 W power, and a driving frequency of 1 HZ). It is found that the tip displacement decreases with increasing laser driving frequency. For 8 Hz driving frequency, 17 µm (peak-valley value) can be still reached, which is large enough for the application as micro-electro-mechanical systems. Metal photo-thermal micro actuators have advantages such as large displacement, simple structure, and large temperature tolerance, and therefore they will be promising in the fields of micro/nanotechnology.
ABSTRACT
The changes in the microstructure of ZnO nanowire were studied after exposure to different radiation doses of energetic x-rays. Detailed structural, composition and optical analyses were carried out. It was found that the surface composition changed and defects were formed in the irradiated ZnO nanowires. The structural change of ZnO nanowires after thermal treatment was also studied and similar defects were observed. It is proposed that phonon-induced localized heating is the main reason for the observed changes in microstructure. Finally, the field emission properties of ZnO nanowires before and after x-ray radiation were studied. It was found that the increase of work function and change in morphology induced by the irradiation were the reasons for the observed change in field emission properties.
ABSTRACT
We introduce a method combining cesium chloride self-assembly and inductively coupled plasma to fabricate nanopillars with uniform coverage over an entire 4 inch prepatterned silicon wafer. This method can produce pillars with average diameters ranging from 50 nm to 1.5 µm, aspect ratios up to 13 and coverage ratios above 35%. Cesium chloride self-assembly utilizes the deliquescence of salt, with advantages of excellent tunability, high aspect ratio and potential for micro/nano mixed structures, which makes this technology promising in the areas of MEMS, solar cells, batteries, light emitting diodes, etc.
