Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance.

Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found.

Experimental proof of emergent subharmonic attenuation zones in a nonlinear locally resonant metamaterial.

High-performance locally resonant metamaterials represent the next frontier in materials technology due to their extraordinary properties obtained through materials design, enabling a variety of potential applications. The most exceptional feature of locally resonant metamaterials is the subwavelength size of their unit cells, which allows to overcome the limits in wave focusing, imaging and sound/vibration isolation. To respond to the fast evolution of these artificial materials and the increasing need for advanced and exceptional properties, the emergence of a new mechanism for wave mitigation and control consisting in a nonlinear interaction between propagating and evanescent waves has recently been theoretically demonstrated. Here, we present the experimental proof of this phenomenon: the appearance of a subharmonic transmission attenuation zone due to energy exchange induced by autoparametric resonance. These results pave the path to a new generation of nonlinear locally resonant metamaterials.

Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators.

MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the development of MEMS resonators. Extensive investigations have addressed both the fabrication process (e.g., introducing heavy doping of the silicon) and the mechanical design (e.g., exploiting proper orientation of the device, slots, nonlinearities). In this work, starting from experimental data published in the literature, we show that a careful design can help reduce the thermal drift even when slots are inserted in the devices in order to decrease thermoelastic losses. A custom numerical code able to predict the dynamic behavior of MEMS resonators for different materials, orientations and doping levels is coupled with an evolutionary optimization algorithm and the possibility to find an optimal mechanical design is demonstrated on a tuning-fork resonator.

3D auxetic single material periodic structure with ultra-wide tunable bandgap.

The design and the combination of innovative metamaterials are attracting increasing interest in the scientific community because of their unique properties that go beyond the ones of natural materials. In particular, auxetic materials and phononic crystals are widely studied for their negative Poisson's ratio and their bandgap opening properties, respectively. In this work, auxeticity and phononic crystals bandgap properties are properly combined to obtain a single phase periodic structure with a tridimensional wide tunable bandgap. When an external tensile load is applied to the structure, the auxetic unit cells change their configurations by exploiting the negative Poisson's ratio and this results in the tuning, either hardening or softening, of the frequencies of the modes limiting the 3D bandgap. Moreover, the expansion of the unit cell in all the directions, due to the auxeticity property, guarantees a fully 3D bandgap tunability of the proposed structure. Numerical simulations and analytical models are proposed to prove the claimed properties. The first experimental evidence of the tunability of a wide 3D bandgap is then shown thanks to the fabrication of a prototype by means of additive manufacturing.

Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope.

Parametric amplification, resulting from intentionally varying a parameter in a resonator at twice its resonant frequency, has been successfully employed to increase the sensitivity of many micro- and nano-scale sensors. Here, we introduce the concept of self-induced parametric amplification, which arises naturally from nonlinear elastic coupling between the degenerate vibration modes in a micromechanical disk-resonator, and is not externally applied. The device functions as a gyroscope wherein angular rotation is detected from Coriolis coupling of elastic vibration energy from a driven vibration mode into a second degenerate sensing mode. While nonlinear elasticity in silicon resonators is extremely weak, in this high quality-factor device, ppm-level nonlinear elastic effects result in an order-of-magnitude increase in the observed sensitivity to Coriolis force relative to linear theory. Perfect degeneracy of the primary and secondary vibration modes is achieved through electrostatic frequency tuning, which also enables the phase and frequency of the parametric coupling to be varied, and we show that the resulting phase and frequency dependence of the amplification follow the theory of parametric resonance. We expect that this phenomenon will be useful for both fundamental studies of dynamic systems with low dissipation and for increasing signal-to-noise ratio in practical applications such as gyroscopes.