ABSTRACT
We describe the ejection of bubbles from air-filled pits micromachined on a silicon surface when exposed to ultrasound at a frequency of approximately 200 kHz. As the pressure amplitude is increased the bubbles ejected from the micropits tend to be larger and they interact in complex ways. With more than one pit, there is a threshold pressure beyond which the bubbles follow a trajectory parallel to the substrate surface and converge at the center point of the pit array. We have determined the size distribution of bubbles ejected from one, two and three pits, for three different pressure amplitudes and correlated them with sonochemical OH· radical production. Experimental evidence of shock wave emission from the bubble clusters, deformed bubble shapes and jetting events that might lead to surface erosion are presented. We describe numerical simulations of sonochemical conversion using the empirical bubble size distributions, and compare the calculated values with experimental results.
ABSTRACT
We present an ultrasonic device with the ability to locally remove deposited layers from a glass slide in a controlled and rapid manner. The cleaning takes place as the result of cavitating bubbles near the deposited layers and not due to acoustic streaming. The bubbles are ejected from air-filled cavities micromachined in a silicon surface, which, when vibrated ultrasonically at a frequency of 200 kHz, generate a stream of bubbles that travel to the layer deposited on an opposing glass slide. Depending on the pressure amplitude, the bubble clouds ejected from the micropits attain different shapes as a result of complex bubble interaction forces, leading to distinct shapes of the cleaned areas. We have determined the removal rates for several inorganic and organic materials and obtained an improved efficiency in cleaning when compared to conventional cleaning equipment. We also provide values of the force the bubbles are able to exert on an atomic force microscope tip.
