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1.
Micromachines (Basel) ; 15(6)2024 Jun 18.
Article in English | MEDLINE | ID: mdl-38930771

ABSTRACT

Substrate materials for printed circuit boards must meet ever-increasing requirements to keep up with electronics technology development. Especially in the field of high-frequency applications such as radar and cellular broadcasting, low permittivity and the dielectric loss factor are key material parameters. In this work, the dielectric properties of a high-temperature, thermoplastic PEEK/PEI blend system are investigated at frequencies of 5 and 10 GHz under dried and ambient conditions. This material blend, modified with a suitable filler system, is capable of being used in the laser direct structuring (LDS) process. It is revealed that the degree of crystallinity of neat PEEK has a notable influence on the dielectric properties, as well as the PEEK phase structure in the blend system developed through annealing. This phenomenon can in turn be exploited to minimize permittivity values at 30 to 40 wt.-% PEI in the blend, even taking into account the water uptake present in thermoplastics. The dielectric loss follows a linear mixing rule over the blend range, which proved to be true also for PEEK/PEI LDS compounds.

2.
Micromachines (Basel) ; 14(6)2023 Jun 09.
Article in English | MEDLINE | ID: mdl-37374806

ABSTRACT

Microstructuring techniques, such as laser direct writing, enable the integration of microstructures into conventional polymer lens systems and may be used to generate advanced functionality. Hybrid polymer lenses combining multiple functions such as diffraction and refraction in a single component become possible. In this paper, a process chain to enable encapsulated and aligned optical systems with advanced functionality in a cost-efficient way is presented. Within a surface diameter of 30 mm, diffractive optical microstructures are integrated in an optical system based on two conventional polymer lenses. To ensure precise alignment between the lens surfaces and the microstructure, resist-coated ultra-precision-turned brass substrates are structured via laser direct writing, and the resulting master structures with a height of less than 0.002 mm are replicated into metallic nickel plates via electroforming. The functionality of the lens system is demonstrated through the production of a zero refractive element. This approach provides a cost-efficient and highly accurate method for producing complicated optical systems with integrated alignment and advanced functionality.

3.
Polymers (Basel) ; 15(5)2023 Mar 03.
Article in English | MEDLINE | ID: mdl-36904526

ABSTRACT

The demolding of plastic parts remains a challenging aspect of injection molding. Despite various experimental studies and known solutions to reduce demolding forces, there is still not a complete understanding of the effects that occur. For this reason, laboratory devices and in-process measurement injection molding tools have been developed to measure demolding forces. However, these tools are mostly used to measure either frictional forces or demolding forces for a specific part geometry. Tools that can be used to measure the adhesion components are still the exception. In this study, a novel injection molding tool based on the principle of measuring adhesion-induced tensile forces is presented. With this tool, the measurement of the demolding force is separated from the actual ejection step of the molded part. The functionality of the tool was verified by molding PET specimens at different mold temperatures, mold insert conditions and geometries. It was demonstrated that once a stable thermal state of the molding tool was achieved, the demolding force could be accurately measured with a comparatively low force variance. A built-in camera was found to be an efficient tool for monitoring the contact surface between the specimen and the mold insert. By comparing the adhesion forces of PET molded on polished uncoated, diamond-like carbon and chromium nitride (CrN) coated mold inserts, it was found that a CrN coating reduced the demolding force by 98.5% and could therefore be an efficient solution to significantly improve demolding by reducing adhesive bond strength under tensile loading.

4.
Micromachines (Basel) ; 14(2)2023 Jan 22.
Article in English | MEDLINE | ID: mdl-36837994

ABSTRACT

Hard coatings can be applied onto microstructured molds to influence wear, form filling and demolding behaviors in microinjection molding. As an alternative to this conventional manufacturing procedure, "direct processing" of physical-vapor-deposited (PVD) hard coatings was investigated in this study, by fabricating submicron features directly into the coatings for a subsequent replication via molding. Different diamondlike carbon (DLC) and chromium nitride (CrN) PVD coatings were investigated regarding their suitability for focused ion beam (FIB) milling and microinjection molding using microscope imaging and areal roughness measurements. Each coating type was deposited onto high-gloss polished mold inserts. A specific test pattern containing different submicron features was then FIB-milled into the coatings using varied FIB parameters. The milling results were found to be influenced by the coating morphology and grain microstructure. Using injection-compression molding, the submicron structures were molded onto polycarbonate (PC) and cyclic olefin polymer (COP). The molding results revealed contrasting molding performances for the studied coatings and polymers. For CrN and PC, a sufficient replication fidelity based on AFM measurements was achieved. In contrast, only an insufficient molding result could be obtained for the DLC. No abrasive wear or coating delamination could be found after molding.

5.
Sensors (Basel) ; 23(3)2023 Jan 18.
Article in English | MEDLINE | ID: mdl-36772146

ABSTRACT

Increasing demands for precision electronics require individual components such as resistors to be specified, as they can be the limiting factor within a circuit. To specify quality and long-term stability of resistors, noise measurements are a common method. This review briefly explains the theoretical background, introduces the noise index and provides an insight on how this index can be compared to other existing parameters. It then focuses on the different methods to measure excess noise in resistors. The respective advantages and disadvantages are pointed out in order to simplify the decision of which setup is suitable for a particular application. Each method is analyzed based on the integration of the device under test, components used, shielding considerations and signal processing. Furthermore, our results on the excess noise of resistors and resistor networks are presented using two different setups, one for very low noise measurements down to 20 µHz and one for broadband up to 100 kHz. The obtained data from these measurements are then compared to published data. Finally, first measurements on commercial strain gauges and inkjet-printed strain gauges are presented that show an additional 1/fα component compared to commercial resistors and resistor networks.

6.
Sensors (Basel) ; 22(21)2022 Oct 24.
Article in English | MEDLINE | ID: mdl-36365843

ABSTRACT

This paper describes the characterization of inkjet-printed resistive temperature sensors according to the international standard IEC 61928-2. The goal is to evaluate such sensors comprehensively, to identify important manufacturing processes, and to generate data for inkjet-printed temperature sensors according to the mentioned standard for the first time, which will enable future comparisons across different publications. Temperature sensors were printed with a silver nanoparticle ink on injection-molded parts. After printing, the sensors were sintered with different parameters to investigate their influences on the performance. Temperature sensors were characterized in a temperature range from 10 °C to 85 °C at 60% RH. It turned out that the highest tested sintering temperature of 200 °C, the longest dwell time of 24 h, and a coating with fluoropolymer resulted in the best sensor properties, which are a high temperature coefficient of resistance, low hysteresis, low non-repeatability, and low maximum error. The determined hysteresis, non-repeatability, and maximum error are below 1.4% of the full-scale output (FSO), and the temperature coefficient of resistance is 1.23-1.31 × 10-3 K-1. These results show that inkjet printing is a capable technology for the manufacturing of temperature sensors for applications up to 85 °C, such as lab-on-a-chip devices.

7.
Micromachines (Basel) ; 13(8)2022 Aug 01.
Article in English | MEDLINE | ID: mdl-36014161

ABSTRACT

The assembly of passive components on flexible electronics is essential for the functionalization of circuits. For this purpose, adhesive bonding technology by isotropic conductive adhesive (ICA) is increasingly used in addition to soldering processes. Nevertheless, a comparative study, especially for bending characterization, is not available. In this paper, soldering and conductive adhesive bonding of 0603 and 0402 components on flexible polyimide substrates is compared using the design of experiments methods (DoE), considering failure for shear strength and bending behavior. Various solder pastes and conductive adhesives are used. Process variation also includes curing and soldering profiles, respectively, amount of adhesive, and final surface metallization. Samples created with conductive adhesive H20E, a large amount of adhesive, and a faster curing profile could achieve the highest shear strength. In the bending characterization using adhesive bonding, samples on immersion silver surface finish withstood more cycles to failure than samples on bare copper surface. In comparison, the samples soldered to bare copper surface finish withstood more cycles to failure than the soldered samples on immersion silver surface finish.

8.
Micromachines (Basel) ; 13(7)2022 Jun 28.
Article in English | MEDLINE | ID: mdl-35888836

ABSTRACT

The use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investigates FIB/FEB technology as a tool for nanotip fabrication and quantum mechanical tunneling applications at a low tunneling voltage. Using a gas injection system (GIS), the Ga-FIB and FEB technology allows both additive and subtractive fabrication of arbitrary structures. Using energy dispersive X-ray spectroscopy (EDX), resistance measurement (RM), and scanning tunneling microscope (STM)/spectroscopy (STS) methods, the tunneling suitability of the utilized metal-organic material-platinum carbon (PtC) is investigated. Thus, to create electrode tips with radii down to 15 nm, a stable and reproducible process has to be developed. The metal-organic microstructure analysis shows suitable FIB parameters for the tunneling effect at high aperture currents (260 pA, 30 kV). These are required to ensure the suitability of the electrodes for the tunneling effect by an increased platinum content (EDX), a low resistivity (RM), and a small band gap (STM). The STM application allows the imaging of highly oriented pyrolytic graphite (HOPG) layers and demonstrates the tunneling suitability of PtC electrodes based on high FIB aperture currents and a low tunneling voltage.

9.
Sensors (Basel) ; 22(14)2022 Jul 20.
Article in English | MEDLINE | ID: mdl-35891087

ABSTRACT

In micro-electro-mechanical systems (MEMS) testing high overall precision and reliability are essential. Due to the additional requirement of runtime efficiency, machine learning methods have been investigated in recent years. However, these methods are often associated with inherent challenges concerning uncertainty quantification and guarantees of reliability. The goal of this paper is therefore to present a new machine learning approach in MEMS testing based on Bayesian inference to determine whether the estimation is trustworthy. The overall predictive performance as well as the uncertainty quantification are evaluated with four methods: Bayesian neural network, mixture density network, probabilistic Bayesian neural network and BayesFlow. They are investigated under the variation in training set size, different additive noise levels, and an out-of-distribution condition, namely the variation in the damping factor of the MEMS device. Furthermore, epistemic and aleatoric uncertainties are evaluated and discussed to encourage thorough inspection of models before deployment striving for reliable and efficient parameter estimation during final module testing of MEMS devices. BayesFlow consistently outperformed the other methods in terms of the predictive performance. As the probabilistic Bayesian neural network enables the distinction between epistemic and aleatoric uncertainty, their share of the total uncertainty has been intensively studied.


Subject(s)
Micro-Electrical-Mechanical Systems , Bayes Theorem , Neural Networks, Computer , Reproducibility of Results , Uncertainty
10.
Sensors (Basel) ; 21(23)2021 Dec 01.
Article in English | MEDLINE | ID: mdl-34884034

ABSTRACT

In this paper, a fluidic capacitive inclination sensor is presented and compared to three types of silicon-based microelectromechanical system (MEMS) accelerometers. MEMS accelerometers are commonly used for tilt measurement. They can only be manufactured by large companies with clean-room technology due to the high requirements during assembly. In contrast, the fluidic sensor can be produced by small- and medium-sized enterprises (SMEs) as well, since only surface mount technologies (SMT) are required. Three different variants of the fluidic sensor were investigated. Two variants using stacked printed circuit boards (PCBs) and one variant with 3D-molded interconnect devices (MIDs) to form the sensor element are presented. Allan deviation, non-repeatability, hysteresis, and offset temperature stability were measured to compare the sensors. Within the fluidic sensors, the PCB variant with two sensor cavities performed best regarding all the measurement results except non-repeatability. Regarding bias stability, white noise, which was determined from the Allan deviation, and hysteresis, the fluidic sensors outperformed the MEMS-based sensors. The accelerometer Analog Devices ADXL355 offers slightly better results regarding offset temperature stability and non-repeatability. The MEMS sensors Bosch BMA280 and TDK InvenSense MPU6500 do not match the performance of fluidic sensors in any category. Their advantages are the favorable price and the smaller package. From the investigations, it can be concluded that the fluidic sensor is competitive in the targeted price range, especially for applications with extended requirements regarding bias stability, noise, and hysteresis.

11.
Sensors (Basel) ; 21(16)2021 Aug 18.
Article in English | MEDLINE | ID: mdl-34450995

ABSTRACT

Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal membrane, which is connected to a PCB and a digital capacitive readout. To optimize the performance, different methods for the joining process are studied. Transient liquid phase bonding (TLP bonding), reactive joining, silver sintering, and electric resistance welding are compared by measurements of the characteristic curves and long-term measurements at maximum pressure. A scanning electron microscope (SEM) with energy-dispersive X-ray spectroscopy (EDX) analysis was used to examine the quality of the joints. The evaluation of the characteristic curves shows the smallest measurement errors for TLP bonding and sintering. For welding and sintering, no statistically significant long-term drift was measured. In terms of equipment costs, reactive joining and sintering are most favorable. With low material costs and short process times, electric resistance welding offers ideal conditions for mass production.


Subject(s)
Silver , Welding , Electric Impedance , Temperature
12.
Micromachines (Basel) ; 12(8)2021 Jul 21.
Article in English | MEDLINE | ID: mdl-34442478

ABSTRACT

This work presents an embedding process for ultrathin silicon chips in mechanically flexible solder mask resist and their electrical contacting by inkjet printing. Photosensitive solder mask resist is applied by conformal spray coating onto epoxy bonded ultrathin chips with a daisy chain layout. The contact pads are opened by photolithography using UV direct light exposure. Circular and rectangular openings of 90 µm and 130 µm diameter, respectively, edge length are realized. Commercial inks containing nanoparticular silver and gold are inkjet printed to form conductive tracks between daisy chain structures. Different numbers of ink layers are applied. The track resistances are characterized by needle probing. Silver ink shows low resistances only for multiple layers and 90 µm openings, while gold ink exhibits low resistances in the single-digit Ω-range for minimum two printed layers.

13.
ACS Med Chem Lett ; 12(7): 1137-1142, 2021 Jul 08.
Article in English | MEDLINE | ID: mdl-34267884

ABSTRACT

ERAP1 is a key aminopeptidase involved in peptide trimming before major histocompatibility complex (MHC) presentation. A single nucleotide polymorphism (SNP) in the ERAP1 gene can lead to impaired trimming activity and affect ERAP1 function. ERAP1 genetic variations have been linked to an increased susceptibility to cancer and autoimmune disease. Here, we report the discovery of novel ERAP1 inhibitors using a high throughput screening approach. Due to ERAP1 broad substrate specificity, the hit finding strategy included testing inhibitors with a range of biochemical assays. Based on the hit potency, selectivity, and in vitro absorption, distribution, metabolism, excretion, and toxicity, the benzofuran series was selected. Fifteen derivatives were designed and synthesized, the compound potency was improved to the nanomolar range, and the structure-activity relationship supported by modeling studies.

14.
Micromachines (Basel) ; 12(7)2021 Jun 22.
Article in English | MEDLINE | ID: mdl-34206197

ABSTRACT

The production of injection-molding prototypes, e.g., molded interconnect devices (MID) prototypes, can be costly and time-consuming due to the process-specific inability to replace durable steel tooling with quicker fabricated aluminum tooling. Instead, additively manufactured soft tooling is a solution for the production of small quantities and prototypes, but producing complex parts with, e.g., undercuts, is avoided due to the necessity of additional soft tooling components. The integration of automated soft slides into soft tooling has not yet been investigated and poses a challenge for the design and endurance of the tooling. The presented study covers the design and injection-molding trial of soft tooling with integrated automated slides for the production of a complex MID prototype. The design further addresses issues like the alignment of the mold components and the sealing of the complex parting plane. The soft tooling was additively manufactured via digital light processing from a silica-filled photopolymer, and 10 proper parts were injection-molded from a laser-direct structurable glass fiber-filled PET+PBT material before the first damage on the tooling occurred. Although improvements are suggested to enhance the soft tooling durability, the designed features worked as intended and are generally transferable to other part geometries.

15.
Sensors (Basel) ; 21(11)2021 May 30.
Article in English | MEDLINE | ID: mdl-34070885

ABSTRACT

Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develop smaller sensors. This paper presents the development and realization of a miniaturized accelerometer based on the tunneling effect, whereas its highly sensitive effect regarding the tunneling distance is used to detect small deflections in the range of sub-nm. The spring-mass-system is manufactured by a surface micro-machining foundry process. The area of the shown polysilicon (PolySi) sensor structures has a size smaller than 100 µm × 50 µm (L × W). The tunneling electrodes are placed and patterned by a focused ion beam (FIB) and gas injection system (GIS) with MeCpPtMe3 as a precursor. A dual-beam system enables maximum flexibility for post-processing of the spring-mass-system and patterning of sharp tips with radii in the range of a few nm and initial distances between the electrodes of about 30-300 nm. The use of metal-organic precursor material platinum carbon (PtC) limits the tunneling currents to about 150 pA due to the high inherent resistance. The measuring range is set to 20 g. The sensitivity of the sensor signal, which depends exponentially on the electrode distance due to the tunneling effect, ranges from 0.4 pA/g at 0 g in the sensor operational point up to 20.9 pA/g at 20 g. The acceleration-equivalent thermal noise amplitude is calculated to be 2.4-3.4 mg/Hz. Electrostatic actuators are used to lead the electrodes in distances where direct quantum tunneling occurs.

16.
Micromachines (Basel) ; 12(4)2021 Apr 17.
Article in English | MEDLINE | ID: mdl-33920745

ABSTRACT

In order to economize injection molded prototypes, additive manufacturing of, e.g., curable plastics based tools, can be employed, which is known as soft tooling. However, one disadvantage of such tools is that the variothermal process, which is needed to produce polymeric parts with small features, can lead to a shorter lifespan of the tooling due to its thermally impaired material properties. Here, a novel concept is proposed, which allows to locally heat the mold cavity via induction to circumvent the thermal impairment of the tooling material. The developed fabrication process consists of additive manufacturing of the tooling, PVD coating the mold cavity with an adhesion promoting layer and a seed layer, electroplating of a ferromagnetic metal layer, and finally patterning the metal layer via laser ablation to enhance the quality and efficiency of the energy transfer as well as the longevity by geometric measures. This process chain is investigated on 2D test specimens to find suitable fabrication parameters, backed by adhesion tests as well as environmental and induction tests. The results of these investigations serve as proof of concept and form the base for the investigation of such induction layers in actual soft tooling cavities.

17.
Micromachines (Basel) ; 12(1)2021 Jan 13.
Article in English | MEDLINE | ID: mdl-33451151

ABSTRACT

Flexible electronics is a rapidly growing technology for a multitude of applications. Wearables and flexible displays are some application examples. Various technologies and processes are used to produce flexible electronics. An important aspect to be considered when developing these systems is their reliability, especially with regard to repeated bending. In this paper, the frequently used methods for investigating the bending reliability of flexible electronics are presented. This is done to provide an overview of the types of tests that can be performed to investigate the bending reliability. Furthermore, it is shown which devices are developed and optimized to gain more knowledge about the behavior of flexible systems under bending. Both static and dynamic bending test methods are presented.

18.
Micromachines (Basel) ; 11(7)2020 Jun 30.
Article in English | MEDLINE | ID: mdl-32629981

ABSTRACT

This paper presents a feasibility study of an automated pick-and-place process for ultrathin chips on a standard automatic assembly machine. So far, scientific research about automated assembly of ultrathin chips, with thicknesses less than 50 µm, is missing, but is necessary for cost-effective, high-quantity production of system-in-foil for applications in narrow spaces or flexible smart health systems applied in biomedical applications. Novel pick-and-place tools for ultrathin chip handling were fabricated and a process for chip detachment from thermal release foil was developed. On this basis, an adhesive bonding process for ultrathin chips with 30 µm thickness was developed and transferred to an automatic assembly machine. Multiple ultrathin chips aligned to each other were automatically placed and transferred onto glass and polyimide foil with a relative placement accuracy of ±25 µm.

19.
Sensors (Basel) ; 20(5)2020 Feb 29.
Article in English | MEDLINE | ID: mdl-32121410

ABSTRACT

Inkjet technology as a maskless, direct-writing technology offers the potential for structured deposition of functional materials for the realization of electrodes for, e.g., sensing applications. In this work, electrodes were realized by inkjet-printing of commercial nanoparticle gold ink on planar substrates and, for the first time, onto the 2.5D surfaces of a 0.5 mm-deep microfluidic chamber produced in cyclic olefin copolymer (COC). The challenges of a poor wetting behavior and a low process temperature of the COC used were solved by a pretreatment with oxygen plasma and the combination of thermal (130 °C for 1 h) and photonic (955 mJ/cm²) steps for sintering. By performing the photonic curing, the resistance could be reduced by about 50% to 22.7 µΩ cm. The printed gold structures were mechanically stable (optimal cross-cut value) and porous (roughness factors between 8.6 and 24.4 for 3 and 9 inkjet-printed layers, respectively). Thiolated DNA probes were immobilized throughout the porous structure without the necessity of a surface activation step. Hybridization of labeled DNA probes resulted in specific signals comparable to signals on commercial screen-printed electrodes and could be reproduced after regeneration. The process described may facilitate the integration of electrodes in 2.5D lab-on-a-chip systems.


Subject(s)
DNA/chemistry , Gold/chemistry , Metal Nanoparticles/chemistry , Polymers/chemistry , Silver/chemistry , Lab-On-A-Chip Devices , Temperature
20.
Opt Lett ; 45(5): 1184-1187, 2020 Mar 01.
Article in English | MEDLINE | ID: mdl-32108801

ABSTRACT

We demonstrate mass production compatible fabrication of polymer-based micro Fresnel lenses by injection compression molding. The extremely robust titanium-molding tool is structured with high precision by focused ion beam milling. In order to achieve optimal shape accuracy in the titanium we use an iterative design optimization. The inverse Fresnel lens structured into the titanium is transferred to polymers by injection compression molding, enabling rapid mass replication. We show that the optical performance of the molded diffractive Fresnel lenses is in good agreement with simulations, rendering our approach suitable for applications that require compact and high-quality optical elements in large numbers.

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