Tunable liquid lens for three-photon excitation microscopy.

We demonstrate a novel electrowetting liquid combination using a room temperature ionic liquid (RTIL) and a nonpolar liquid, 1-phenyl-1-cyclohexene (PCH) suitable for focus-tunable 3-photon microscopy. We show that both liquids have over 90% transmission at 1300 nm over a 1.1 mm pathlength and an index of refraction contrast of 0.123. A lens using these liquids can be tuned from a contact angle of 133 to 48° with applied voltages of 0 and 60 V, respectively. Finally, a three-photon imaging system including an RTIL electrowetting lens was used to image a mouse brain slice. Axial scans taken with an electrowetting lens show excellent agreement with images acquired using a mechanically scanned objective.

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array: erratum.

The authors present an erratum to update the Acknowledgements section in their published article, ["Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array," Opt. Express31, 30550 (2023)10.1364/OE.497992].

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array.

We demonstrate a two-dimensional, individually tunable electrowetting microlens array fabricated using standard microfabrication techniques. Each lens in our array has a large range of focal tunability from -1.7 mm to -∞ in the diverging regime, which we verify experimentally from 0 to 75 V for a device coated in Parylene C. Additionally, each lens can be actuated to within 1% of their steady-state value within 1.5 ms. To justify the use of our device in a phase-sensitive optical system, we measure the wavefront of a beam passing through the center of a single lens in our device over the actuation range and show that these devices have a surface quality comparable to static microlens arrays. The large range of tunability, fast response time, and excellent surface quality of these devices open the door to potential applications in compact optical imaging systems, transmissive wavefront shaping, and beam steering.

Axisymmetrical resonance modes in an electrowetting optical lens.

Electrowetting-based adaptive optics are of great interest for applications ranging from confocal microscopy to LIDAR, but the impact of low-frequency mechanical vibration on these devices remains to be studied. We present a simple theoretical model for predicting the resonance modes induced on the liquid interface in conjunction with a numerical simulation. We experimentally confirm the resonance frequencies by contact angle modulation. They are found to be in excellent agreement with the roots of the zero-order Bessel functions of the first kind. Next, we experimentally verify that external axial vibration of an electrowetting lens filled with density mismatched liquids (Δρ = 250 kg/m3) will exhibit observable Bessel modes on the liquid-liquid interface. An electrowetting lens filled with density matched liquids (Δρ = 4 kg/m3) is robust to external axial vibration and is shown to be useful in mitigating the effect of vibrations in an optical system.

Adaptive aberration correction using an electrowetting array.

We demonstrate a method that permits wavefront aberration correction using an array of electrowetting prisms. A fixed high fill factor microlens array followed by a lower fill factor adaptive electrowetting prism array is used to correct wavefront aberration. The design and simulation of such aberration correction mechanism is described. Our results show significant improvement to the Strehl ratio by using our aberration correction scheme which results in diffraction limited performance. Compactness and effectiveness of our design can be implemented in many applications that require aberration correction, such as microscopy and consumer electronics.

On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators.

We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 µm due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 µmol/mL. We then reduce this detection limit to 0.25 µmol/mL using the enhancement produced by a chalcogenide ring resonator.

Fabrication and characterization of high quality GeSbSe reflowed and etched ring resonators.

We demonstrate the fabrication of high Q Ge28Sb12Se60 ring resonators in an all chalcogenide platform through electron-beam lithography, lift-off and thermal reflow. We achieve a Q factor of (3.9 ± 0.2) × 105 in the reflowed ring resonators and (2.5 ± 0.2) × 105 in the reactive ion etched ring resonators at 1550 nm. We measure the line roughness of these devices to estimate the scattering loss. We determine the material and scattering losses of the waveguide and find an additional 1.1 dB/cm excess loss from surface absorption. We fabricate Ge23Sb7S70 waveguides with 0.6 dB/cm of losses and show that Ge23Sb7S70 waveguides do not experience the same kind of excess loss when fabricated under the same conditions. This indicates the excess loss is related to the chemical composition of Ge28Sb12Se60 compound.

Spectrally tunable liquid resonator based on electrowetting.

We present a tunable on-chip liquid resonator in conjunction with a tapered fiber coupling scheme. The resonator consists of a glycerol droplet submerged within an immiscible liquid bath, which mitigates the effects of environmental fluctuations. The platform is fabricated using standard semiconductor techniques, which enable the future integration of photonic components for an on-chip liquid resonator device. The liquid resonator maintains its high Q-factor on chip (105) due to surface tension forming an atomically smooth liquid-liquid interface. Higher Q-factor resonance modes experienced linewidth broadening due to the random excitation of thermal capillary vibrations. Spectral tuning is demonstrated using the electrowetting effect, increasing the surface's wettability and an expansion in the droplet diameter. A maximum spectral tuning of 1.44 nm ± 5 pm is observed by applying 35 V. The tuning range is twice the free spectral range (FSR) of 0.679 nm measured at a pumping wavelength range of 770-775 nm. A 2D axisymmetric finite-element simulation shows resonance modes in good agreement with experimentally measured spectra and with predicted tuning speeds of 20 nm/s.

Third-harmonic generation enhancement in an ITO nanoparticle-coated microresonator.

We report a ∼3-fold enhancement of third-harmonic generation (THG) conversion efficiency using indium tin oxide (ITO) nanoparticles on the surface of an ultra-high-Q silica microsphere. This is one of the largest microcavity-based THG enhancements reported. Phase-matching and spatial mode overlap are explored numerically to determine the microsphere radius (∼29 µm) and resonant mode numbers that maximize THG. Furthermore, the ITO nanoparticles are uniformly bonded to the cavity surface by drop-casting, eliminating the need for complex fabrication. The significant improvement in THG conversion efficiency establishes functionalized ITO microcavities as a promising tool for broadband frequency conversion, nonlinear enhancement, and applications in integrated photonics.

High extinction ratio, low insertion loss, optical switch based on an electrowetting prism.

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100-300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

Calibration and characteristics of an electrowetting laser scanner.

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption (µW). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a 5 × 5 grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 µm (0.117°) to 10 µm (0.027°).

Enhancement of third-order nonlinearity of thermally evaporated GeSbSe waveguides through annealing.

Chalcogenides are a promising platform for infrared nonlinear optics but are susceptible to structural changes during fabrication that affect their linear and nonlinear optical properties. We analyze the structure and optical properties of thermally evaporated and annealed chalcogenide films. Thermally evaporated Ge28Sb12Se60 has an increased selenium content, bandgap, and concentration of heteropolar bonds. The concentration of heteropolar bonds can be reduced by annealing above the glass transition temperature, resulting in improved optical nonlinearity. We demonstrate a 4-fold enhancement of third-order nonlinearity in Ge28Sb12Se60 chalcogenide waveguides by thermal annealing and a decrease in propagation loss from 2.5 dB/cm to 1 dB/cm as an added benefit.

Lidar system with nonmechanical electrowetting-based wide-angle beam steering.

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Liquid Combination with High Refractive Index Contrast and Fast Scanning Speeds for Electrowetting Adaptive Optics.

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

Numerical analysis of wavefront aberration correction using multielectrode electrowetting-based devices.

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.

Enhanced Response Time of Electrowetting Lenses with Shaped Input Voltage Functions.

Adaptive optical lenses based on the electrowetting principle are being rapidly implemented in many applications, such as microscopy, remote sensing, displays, and optical communication. To characterize the response of these electrowetting lenses, the dependence upon direct current (DC) driving voltage functions was investigated in a low-viscosity liquid system. Cylindrical lenses with inner diameters of 2.45 and 3.95 mm were used to characterize the dynamic behavior of the liquids under DC voltage electrowetting actuation. With the increase of the rise time of the input exponential driving voltage, the originally underdamped system response can be damped, enabling a smooth response from the lens. We experimentally determined the optimal rise times for the fastest response from the lenses. We have also performed numerical simulations of the lens actuation with input exponential driving voltage to understand the variation in the dynamics of the liquid-liquid interface with various input rise times. We further enhanced the response time of the devices by shaping the input voltage function with multiple exponential rise times. For the 3.95 mm inner diameter lens, we achieved a response time improvement of 29% when compared to the fastest response obtained using single-exponential driving voltage. The technique shows great promise for applications that require fast response times.

Two-photon laser scanning microscopy with electrowetting-based prism scanning.

Laser scanners are an integral part of high resolution biomedical imaging systems such as confocal or 2-photon excitation (2PE) microscopes. In this work, we demonstrate the utility of electrowetting on dielectric (EWOD) prisms as a lateral laser-scanning element integrated in a conventional 2PE microscope. To the best of our knowledge, this is the first such demonstration for EWOD prisms. EWOD devices provide a transmissive, low power consuming, and compact alternative to conventional adaptive optics, and hence this technology has tremendous potential. We demonstrate 2PE microscope imaging of cultured mouse hippocampal neurons with a FOV of 130 × 130 µm2 using EWOD prism scanning. In addition, we show simulations of the optical system with the EWOD prism, to evaluate the effect of propagating a Gaussian beam through the EWOD prism on the imaging quality. Based on the simulation results a beam size of 0.91 mm full width half max was chosen to conduct the imaging experiments, resulting in a numerical aperture of 0.17 of the imaging system.

Wide-angle nonmechanical beam steering using liquid lenses.

Nonmechanical beam steering is a rapidly growing branch of adaptive optics with applications such as light detection and ranging, imaging, optical communications, and atomic physics. Here, we present an innovative technique for one- and two-dimensional beam steering using multiple tunable liquid lenses. We use an approach in which one lens controls the spot divergence, and one to two decentered lenses act as prisms and steer the beam. Continuous 1D beam steering was demonstrated, achieving steering angles of ±39° using two tunable liquid lenses. The beam scanning angle was further enhanced to ±75° using a fisheye lens. By adding a third tunable liquid lens, we achieved 2D beam steering of ±75°. In this approach, the divergence of the scanning beam is controlled at all steering angles.