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Opt Express
; 16(15): 11289-93, 2008 Jul 21.
Article
in English
| MEDLINE
| ID: mdl-18648447
ABSTRACT
Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mum.