ABSTRACT
The factors affecting the energetic neutral current, the low energy electron current, and the positive ion current emerging from a four-anode-rods ion source have been studied using argon gas. The neutral and electron current were measured using a simple, new technique. It was found that the energetic neutral current and the electron current depend on the positive ion current and the gas pressure. The ratio of the neutral and electron current to the positive ion current increases by increasing the gas pressure. Also it was found that at a pressure equal to 9 × 10(-4) mmHg, the ratio of the neutral to the positive ion current reaches 2.34 while the ratio of the electron current to the positive ion current reaches 1.7.
ABSTRACT
In this work, an improved form of a saddle field ion source has been designed and constructed. It consists of four anode rods made from copper and two copper cathode discs. The two cathode discs are placed symmetrically on both sides of the four anode rods. The electrical discharge and output ion beam characteristics were measured at different pressures using argon gas. The optimum distance between each two anode rods was determined. Also the optimum distance between the four anode rods and any cathode disc was obtained. It was found that the optimum distance between each two anode rods equal to 6 mm, while the optimum distance between the four anode rods and any cathode disc equal to 16 mm, where a stable discharge current and maximum output ion beam current can be obtained. The effect of negative extraction voltage applied to both the extractor electrode and Faraday cup on the output ion beam current was studied. The sputter yield of copper and aluminum targets using argon ions of different energies was determined.
