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1.
Materials (Basel) ; 17(13)2024 Jul 05.
Article in English | MEDLINE | ID: mdl-38998413

ABSTRACT

Ferrovalley materials are garnering significant interest for their potential roles in advancing information processing and enhancing data storage capabilities. This study utilizes first-principles calculations to determine that the Janus monolayer TiTeCl exhibits the properties of a ferrovalley semiconductor. This material demonstrates valley polarization with a notable valley splitting of 80 meV. Additionally, the Berry curvature has been computed across the first Brillouin zone of the monolayer TiTeCl. The research also highlights that topological phase transitions ranging from ferrovalley and half-valley metals to quantum anomalous Hall effect states can occur in monolayer TiTeCl under compressive strains ranging from -1% to 0%. Throughout these strain changes, monolayer TiTeCl maintains its ferromagnetic coupling. These characteristics make monolayer TiTeCl a promising candidate for the development of new valleytronic and topological devices.

2.
Small ; : e2404065, 2024 Jul 01.
Article in English | MEDLINE | ID: mdl-38949396

ABSTRACT

Fe3O4 is barely taken into account as an electrocatalyst for oxygen reduction reaction (ORR), an important reaction for metal-air batteries and fuel cells, due to its sluggish catalytic kinetics and poor electron conductivity. Herein, how strain engineering can be employed to regulate the local electronic structure of Fe3O4 for high ORR activity is reported. Compressively strained Fe3O4 shells with 2.0% shortened Fe─O bond are gained on the Fe/Fe4N cores as a result of lattice mismatch at the interface. A downshift of the d-band center occurs for compressed Fe3O4, leading to weakened chemisorption energy of oxygenated intermediates, and lower reaction overpotential. The compressed Fe3O4 exhibits greatly enhanced electrocatalytic ORR activity with a kinetic current density of 27 times higher than that of pristine one at 0.80 V (vs reversible hydrogen electrode), as well as potential application in zinc-air batteries. The findings provide a new strategy for tuning electronic structures and improving the catalytic activity of other metal catalysts.

3.
Materials (Basel) ; 17(5)2024 Mar 01.
Article in English | MEDLINE | ID: mdl-38473630

ABSTRACT

One of the main limitations to the use of fabric-reinforced cementitious matrix (FRCM) composites for the external confinement of masonry is the lack of accurate formulas for estimating the compressive strength and ultimate strain of confined members. With the aim of providing a contribution on the topic, the authors have been carrying out studies on the FRCM-confined masonry for some time and, in a recent study, they proposed some formulations for the prediction of compressive strength. In continuity to that work, an analytical study on the ultimate strain of FRCM-confined masonry is presented in this paper, and preliminary models were derived by considering a wide experimental database compiled from the technical literature. The accuracy of the found relationships was examined based on a comparison with the few formulas published in the literature or reported in international guidelines. To this purpose, it is worth highlighting that the current Italian Guidelines CNR-DT 215/2018 do not provide indications about the estimation of the ultimate strain of FRCM-confined masonry, and the study proposed here attempts to provide a contribution to the mentioned document.

4.
Small ; 20(22): e2310036, 2024 May.
Article in English | MEDLINE | ID: mdl-38126916

ABSTRACT

Strain effect in the structurally defective materials can contribute to the catalysis optimization. However, it is challenging to achieve the performance improvement by strain modulation with the help of geometrical structure because strain is spatially dependent. Here, a new class of compressively strained platinum-iridium-metal zigzag-like nanowires (PtIrM ZNWs, M = nickel (Ni), cobalt (Co), iron (Fe), zinc (Zn) and gallium (Ga)) is reported as the efficient alkaline hydrogen evolution reaction (HER) and hydrogen oxidation reaction (HOR) catalysts. Particularly, the optimized PtIrNi ZNWs with 3% compressive strain (cs-PtIrNi ZNWs) can achieve the highest HER/HOR performances among all the catalysts investigate. Their HOR mass and specific activities are 3.2/14.4 and 2.6/32.7 times larger than those of PtIrNi NWs and commercial Pt/C, respectively. Simultaneously, they can exhibit the superior stability and high CO resistance for HOR. Further, experimental and theoretical studies collectively reveal that the compressive strain in cs-PtIrNi ZNWs effectively weakens the adsorption of hydroxyl intermediate and modulates the electronic structure, resulting in the weakened hydrogen binding energy (HBE) and moderate hydroxide binding energy (OHBE), beneficial for the improvement of HOR performance. This work highlights the importance of strain tuning in enhancing Pt-based nanomaterials for hydrogen catalysis and beyond.

5.
Article in English | MEDLINE | ID: mdl-38044869

ABSTRACT

The diversity of body joints and the complexity of joint motions cause flexible strain sensors to undergo complex strains such as stretching, compression, bending, and extrusion, which results in sensors that do not recognize different strains, facing great challenges in detecting the true motion characteristics of joints. Here, the monitoring of body joints' real motion characteristics has been realized by the sensor that can output response signals with different resistance trends for different strains. The sensor prepared by the sacrificial template method is characterized by a multilayered interlaced tunnel architecture and carbon black embedded in the inner wall of the tunnel. Stretching, compressive, and bending strains result in increasing, decreasing, and increasing resistance, followed by a decrease in resistance of the sensor, respectively. The sensor can still output distinguishable response signals, even in the presence of complex strains induced by squeezing. Low strain detection limits (0.03%) and wide detection ranges (>600%) are achieved due to the localized strain enhancement caused by the unique structure. The sensor can detect the motion characteristics of different joints in flexion-extension, abduction-adduction, and internal-external rotation, which, in turn, can be used for real-time monitoring of complex joint motions involved in limb rehabilitation. In addition, the sensor recognizes the 26 letters of the alphabet represented by sign language gestures. The above studies demonstrate the potential application of our prepared sensors in flexible, wearable devices.

6.
Article in English | MEDLINE | ID: mdl-38033040

ABSTRACT

The absorption and emission of light in single-layer transition metal dichalcogenides are governed by the formation of excitonic quasiparticles. Strain provides a powerful technique to tune the optoelectronic properties of two-dimensional materials and thus to adjust their exciton energies. The effects of large compressive strain in the optical spectrum of two-dimensional (2D) semiconductors remain rather unexplored compared to those of tensile strain, mainly due to experimental constraints. Here, we induced large, uniform, biaxial compressive strain (∼1.2%) by cooling, down to 10 K, single-layer WS2, MoS2, WSe2, and MoSe2 deposited on polycarbonate substrates. We observed a significant strain-induced modulation of neutral exciton energies, with blue shifts up to 160 meV, larger than in any previous experiments. Our results indicate a remarkably efficient transfer of compressive strain, demonstrated by gauge factor values exceeding previous results and approaching theoretical expectations. At low temperatures, we investigated the effect of compressive strain on the resonances associated with the formation of charged excitons. In WS2, a notable reduction of gauge factors for charged compared to neutral excitons suggests an increase in their binding energy, which likely results from the effects of strain added to the influence of the polymeric substrate.

7.
Adv Mater ; 35(17): e2211257, 2023 Apr.
Article in English | MEDLINE | ID: mdl-36753745

ABSTRACT

Metal halide perovskites are promising as next-generation photovoltaic materials, but stability issues are still a huge obstacle to their commercialization. Here, the formation and evolution of cracks in perovskite films during thermal cycling, which affect their mechanical stability, are investigated. Compressive strain is employed to suppress cracks and delamination by in situ formed polymers with low elastic modulus during crystal growth. The resultant devices pass the thermal-cycling qualification (IEC61215:2016), retaining 95% of the initial power conversion efficiency (PCE) and compressive strain after 230 cycles. Meanwhile, the p-i-n devices deliver PCEs of 23.91% (0.0805 cm2 ) and 23.27% (1 cm2 ). The findings shed light on strain engineering with respect to their evolution, which enables mechanically stable perovskite solar cells.

8.
Nano Lett ; 23(3): 1085-1092, 2023 Feb 08.
Article in English | MEDLINE | ID: mdl-36649599

ABSTRACT

Curved ultrathin PtPd nanodendrites (CNDs) with long-range compressive strain and highly branched feature are first prepared by a functional surfactant-induced strategy. Precise synthesis realized the construction of both curved and flat PtPd nanodendrites (NDs) with the same atomic ratio, which contributed to exploration of the strain effect on electrocatalytic performance alone. Abundant evidence is provided to confirm that the long-range compressive strain in curved PtPd architectures can effectively tailor the local coordination environment of active sites, lower the position of the d-band center, weaken the adsorption energy of the intermediates (e.g., H* and CO*), and ultimately increase their intrinsic activity. The density functional theory (DFT) calculations further reveal that the introduction of compressive strain weakens the Gibbs free-energy of the intermediate (ΔGH*), which is favorable for accelerating the hydrogen evolution reaction (HER) kinetics. A similar enhanced electrocatalytic performance can also be found in the methanol oxidation reaction (MOR).

9.
ACS Appl Mater Interfaces ; 15(4): 5229-5241, 2023 Feb 01.
Article in English | MEDLINE | ID: mdl-36650084

ABSTRACT

A series of Co3O4 with different surface defective structures were prepared by the solvothermal method and tested for the activity of benzene oxidation. The characterizations revealed that the synthetic solvent had a dramatic effect on the composition of Co3O4 precursors as well as the physicochemical properties of Co3O4. Although all Co3O4 exhibited a cubic spinel structure, Co3O4 prepared with triethylene glycol (Co-TEG) had the highest compressive strain due to the nature of high viscosity of triethylene glycol. These in turn affected the surface chemical structure and the low-temperature redox properties. Co-TEG exhibited the best benzene oxidation activity and showed excellent stability and good water resistance. In situ diffuse reflectance infrared Fourier transform spectroscopy was used to study the oxidation process of benzene. It was found that Co-TEG with more defective structures had abundant surface adsorbed oxygen and active lattice oxygen, which promoted the conversion of benzene and the corresponding intermediates at low temperature.

10.
ACS Appl Mater Interfaces ; 14(51): 57362-57370, 2022 Dec 28.
Article in English | MEDLINE | ID: mdl-36516001

ABSTRACT

The nonradiative carrier recombination at the perovskite/carrier selective layer (CSL) interface was accounted for the inferior power conversion efficiency (PCE) of perovskite solar cells (PSCs), especially rigid all-inorganic perovskite (CsPbI3 and CsPbBr3). In this study, targeting the poor interface, we introduce SbX3 (X = Cl, Br, I) surface passivation at the CsPbBr3/carbon interface. Smoothed compressive strain, reduced defect density, and enhanced energy-level alignment were achieved simultaneously, facilitating carrier extraction at the selective interface. With the simple aqueous solution-based two-step process, the PCE of our SbI3 passivated carbon-based CsPbBr3 PSCs has increased from 7.81% (without passivation) to 9.69%, a ∼25% enhancement. Specifically, Voc (1.657 V) of the SbI3-passivated cells was much higher than that of the control ones (1.488 V), confirming the ameliorated interface. Finally, our unencapsulated SbI3 passivated devices maintain 90% of their initial PCEs while left in the air for 30 days with a relative humidity of 60%. To conclude, we present an interfacial carrier extraction-enhanced strategy for preparing high-performance and stable CsPbBr3-based PSCs.

11.
Polymers (Basel) ; 14(23)2022 Nov 28.
Article in English | MEDLINE | ID: mdl-36501569

ABSTRACT

Multi-structural polymer composites are widely used in the mechanical engineering, automotive, aviation and oil refining industries, as well as in the printing industry as a shock-absorbing deckle on the offset cylinders of printing machines. During offset printing, composites come into contact with inks and washing solutions, the components of which penetrate the material and cause the polymers to swell. This process degrades the print quality, and for this reason the study of its features is relevant. The prerequisites for this work are the study of the fundamental laws of diffusion and sorption of liquids by polymers with different micro- and macro-structures in different physical states and in different forms (e.g., films, sheets, fibers and fabrics). The combination of polymer materials in the composition of multi-structural fabric blankets makes it possible to obtain materials with unique mechanical properties and high resistance to liquid penetrating media and to use them in high-tech processes of multi-color printing with high resolution and color rendering. This article reports for the first time the kinetics and thermodynamics results obtained from the swelling of multi-structural polymeric blankets in solvents used in printing, and the effect of sorption of different polar liquids on the viscoelastic strain under compression during the operation of the damping systems of printing machines. Using mathematical models of activated liquid diffusion in polymers and deformation of a viscoelastic body, the swelling rate constants, solvent diffusion coefficients (the kinetic characteristics of the swelling process) and Flory−Huggins parameters (the thermodynamic characteristics of the interaction of the solvent with the composite) for composite−solvent systems with several chemical composition variants were determined. The elastic modulus and the viscosity coefficient of the composite under liquid saturation were calculated based on the experimental cyclic compression data. The range of change in the compression and restoration times of the polymeric blankets (0.09 s ÷ 0.78 s) was determined. It was shown that the composite swelled to a limited extent in all the studied liquids. All solvents used were thermodynamically poor (χ > 0.5). It has been established that rubber−fabric blankets coated with nitrile rubber are the least resistant to the action of dichloroethane, and that blankets with layers of polyolefins are not resistant to ethyl acetate. Water significantly affects the physicochemical properties of rubber−fabric blankets with a large proportion of cotton fabric layers. The data obtained can serve as a basis for optimizing the compositions of inks and cleaning solutions, as well as a theoretical basis for the thermodynamics of composite−solvent systems.

12.
ACS Appl Mater Interfaces ; 14(43): 48917-48925, 2022 Nov 02.
Article in English | MEDLINE | ID: mdl-36281808

ABSTRACT

Low-energy switching of ferroelectrics has been intensively studied for energy-efficient nanoelectronics. Mechanical force is considered as a low-energy consumption technique for switching the polarization of ferroelectric films due to the flexoelectric effect. Reduced threshold force is always desirable for the considerations of energy saving, easy domain manipulation, and sample surface protection. In this work, the mechanical switching behaviors of BaTiO3/SrRuO3 epitaxial heterostructure grown on Nb:SrTiO3 (001) substrate are reported. Domain switching is found to be induced by an extremely low tip force of 320 nN (estimated pressure ∼0.09 GPa), which is the lowest value ever reported. This low mechanical threshold is attributed to the small compressive strain, the low oxygen vacancy concentration in BaTiO3 film, and the high conductivity of the SrRuO3 electrode. The flexoelectricity under both perpendicular mechanical load (point measurement) and sliding load (scanning measurement) are investigated. The sliding mode shows a much stronger flexoelectric field for its strong trailing field. The mechanical written domains show several advantages in comparison with the electrically written ones: low charge injection, low energy consumption, high density, and improved stability. The ultralow-pressure switching in this work presents opportunities for next-generation low-energy and high-density memory electronics.

13.
ACS Nano ; 16(9): 14632-14643, 2022 Sep 27.
Article in English | MEDLINE | ID: mdl-36107149

ABSTRACT

Modifying the crystal structure and corresponding functional properties of complex oxides by regulating their oxygen content has promising applications in energy conversion and chemical looping, where controlling oxygen migration plays an important role. Therefore, finding an efficacious and feasible method to facilitate oxygen migration has become a critical requirement for practical applications. Here, we report a compressive-strain-facilitated oxygen migration with reversible topotactic phase transformation (RTPT) in La0.5Sr0.5CoOx films based on all-solid-state electrolyte gating modulation. With the lattice strain changing from tensile to compressive strain, significant reductions in modulation duration (∼72%) and threshold voltage (∼70%) for the RTPT were observed, indicating great promotion of RTPT by compressive strain. Density functional theory calculations verify that such compressive-strain-facilitated efficient RTPT comes from significant reduction of the oxygen migration barrier in compressive-strained films. Further, ac-STEM, EELS, and sXAS investigations reveal that varying strain from tensile to compressive enhances the Co 3d band filling, thereby suppressing the Co-O hybrid bond in oxygen vacancy channels, elucidating the micro-origin of such compressive-strain-facilitated oxygen migration. Our work suggests that controlling electronic orbital occupation of Co ions in oxygen vacancy channels may help facilitate oxygen migration, providing valuable insights and practical guidance for achieving highly efficient oxygen-migration-related chemical looping and energy conversion with complex oxides.

14.
Materials (Basel) ; 15(18)2022 Sep 17.
Article in English | MEDLINE | ID: mdl-36143778

ABSTRACT

Since glass fiber-reinforced polymer (GFRP) bars have a lower modulus than steel bars, the design of GFRP-reinforced concrete (GFRP-RC) is often governed by the serviceability limit state (deflection and cracking) rather than the ultimate state. A new design method has been proposed in this paper for GFRP-RC beams based on the flexure crack width. The state when the maximum flexure crack width in the tensile zone reaches the limit of 0.5 mm specified by ACI 440.1R-15 was used as the design limit state. The concrete compressive strain at the extreme compression fiber of concrete under the design limit state was obtained by four-point bending tests of eight full-scale GFRP-RC beams and finite element analysis. Based on the concrete compressive strain under the design limit state and cross-sectional analysis, a design method for calculating the longitudinal reinforcement ratio of GFRP-RC beams under the design limit state is proposed. This design method is proven to be feasible by the experimental and the finite element results. In addition, the flexural capacity coefficient was discussed to investigate the safety reserve of the design method.

15.
Nanomaterials (Basel) ; 12(16)2022 Aug 15.
Article in English | MEDLINE | ID: mdl-36014664

ABSTRACT

Past work has focused on the thermal properties of microscale/nanoscale suspended/supported graphene. However, for the thermal design of graphene-based devices, the thermal properties of giant-scale (~mm) graphene, which reflects the effect of grains, must also be investigated and are critical. In this work, the thermal conductivity variation with temperature of giant-scale chemical vapor decomposition (CVD) graphene supported by poly(methyl methacrylate) (PMMA) is characterized using the differential transient electrothermal technique (diff-TET). Compared to the commonly used optothermal Raman technique, diff-TET employs joule heating as the heating source, a situation under which the temperature difference between optical phonons and acoustic phonons is eased. The thermal conductivity of single-layer graphene (SLG) supported by PMMA was measured as 743 ± 167 W/(m·K) and 287 ± 63 W/(m·K) at 296 K and 125 K, respectively. As temperature decreased from 296 K to 275 K, the thermal conductivity of graphene was decreased by 36.5%, which can be partly explained by compressive strain buildup in graphene due to the thermal expansion mismatch.

16.
ACS Appl Mater Interfaces ; 14(35): 39996-40004, 2022 Sep 07.
Article in English | MEDLINE | ID: mdl-36008374

ABSTRACT

Control of strain in perovskite crystals has been considered as an effective strategy to ensure the phase stability of perovskite films where a compressive strain is particularly preferred over a tensile strain due to a lowered Gibbs free energy by the unit cell contraction effect. Here we adapt the strategy of strain control into perovskite solar cells in which the compressive strain is applied by utilizing a thermal expansion difference between the perovskite film and an adjacent layer. Poly(4-butylphenyldiphenylamine), with a higher thermal expansion coefficient compared to that of perovskite, is employed as a substrate for perovskite crystal growth at 100 °C, followed by cooling to room temperature. The applied compressive strain at the interface, as a result of a greater contraction of the polymer compared to the perovskite film, is confirmed by grazing incidence X-ray diffraction showing a red peak shift with increasing secondary angle. The compressive strain-induced perovskite film shows relatively constant absorbance spectra as a function of time. In the meantime, the absorbance spectra of a film without strain control exhibit a gradual decay with developing an Urbach tail. Importantly, the effect of strain engineering is remarkably prominent in the long-term photovoltaic performance. The photocurrent drops by 41% over 911 h without controlling strain, which is significantly improved by employing compressive strain, showing only a 6% drop in photocurrent from a shelf-stability test without encapsulation. It is also noted that an S-shaped kink appears in the current-voltage curves since 579-h-long storage for the device without strain control, leading to unreliable and overestimated fill factor and conversion efficiency. On the other hand, a 16% increase in fill factor with a stable performance is derived over 911 h from the compressive strain-induced device.

17.
Front Chem ; 10: 951870, 2022.
Article in English | MEDLINE | ID: mdl-35873045

ABSTRACT

Monolayer blue phosphorene (BlueP) systems were investigated under biaxial strain range from -10% to +10%. All these systems exhibit excellent stability, accompanying changes in the electronic and optical properties. BlueP becomes metallic at -10% strain and transforms into a direct semiconductor at 10% strain while maintaining indirect semiconductor behaviors at -8% to +8% strain. The bandgap of BlueP decreases linearly with strain, and tensile strain exhibits a more moderate bandgap modulation than compressive strain. The real part of the dielectric function of BlueP is enhanced under compressive strain, while the optical absorption in the visible and the infrared light regions increases significantly under tensile strain. The maximum absorption coefficient of 0.52 ×105/cm occurs at 530 nm with the 10% strain. Our analysis indicates that the semiconductor-metal transition and the indirect-direct bandgap transition are the competition results of the energy states near the Fermi level under a massive strain. The potent compressive strain leads the p y orbitals of the conduction band to move downward and pass through the Fermi level at the K point. The robust tensile strain guides the energy states at the Γ point to approach the Fermi level and become the band edges. Our results suggest that the energy storage capacity of BlueP can be significantly improved by compressive strain, while the visible light photocatalytic performance is enhanced by tensile strains of less than 8%. Our works provide a reference for the practical applications of BlueP in photocatalyst, photovoltaic cells, and electronic devices.

18.
J Biomech Eng ; 144(11)2022 11 01.
Article in English | MEDLINE | ID: mdl-35789377

ABSTRACT

Due to lack of full vascularization, the meniscus relies on diffusion through the extracellular matrix to deliver small (e.g., nutrients) and large (e.g., proteins) to resident cells. Under normal physiological conditions, the meniscus undergoes up to 20% compressive strains. While previous studies characterized solute diffusivity in the uncompressed meniscus, to date, little is known about the diffusive transport under physiological strain levels. This information is crucial to fully understand the pathophysiology of the meniscus. The objective of this study was to investigate strain-dependent diffusive properties of the meniscus fibrocartilage. Tissue samples were harvested from the central portion of porcine medial menisci and tested via fluorescence recovery after photobleaching to measure diffusivity of fluorescein (332 Da) and 40 K Da dextran (D40K) under 0%, 10%, and 20% compressive strain. Specifically, average diffusion coefficient and anisotropic ratio, defined as the ratio of the diffusion coefficient in the direction of the tissue collagen fibers to that orthogonal, were determined. For all the experimental conditions investigated, fluorescein diffusivity was statistically faster than that of D40K. Also, for both molecules, diffusion coefficients significantly decreased, up to ∼45%, as the strain increased. In contrast, the anisotropic ratios of both molecules were similar and not affected by the strain applied to the tissue. This suggests that compressive strains used in this study did not alter the diffusive pathways in the meniscus. Our findings provide new knowledge on the transport properties of the meniscus fibrocartilage that can be leveraged to further understand tissue pathophysiology and approaches to tissue restoration.


Subject(s)
Meniscus , Animals , Anisotropy , Diffusion , Fibrocartilage/metabolism , Fluoresceins/metabolism , Swine
19.
Materials (Basel) ; 15(10)2022 May 18.
Article in English | MEDLINE | ID: mdl-35629618

ABSTRACT

In this manuscript, a novel dual-step selective epitaxy growth (SEG) of Ge was proposed to significantly decrease the defect density and to create fully strained relaxed Ge on a Si substrate. With the single-step SEG of Ge, the threading defect density (TDD) was successfully decreased from 2.9 × 107 cm-2 in a globally grown Ge layer to 3.2 × 105 cm-2 for a single-step SEG and to 2.84 × 105 cm-2 for the dual-step SEG of the Ge layer. This means that by introducing a single SEG step, the defect density could be reduced by two orders of magnitude, but this reduction could be further decreased by only 11.3% by introducing the second SEG step. The final root mean square (RMS) of the surface roughness was 0.64 nm. The strain has also been modulated along the cross-section of the sample. Tensile strain appears in the first global Ge layer, compressive strain in the single-step Ge layer and fully strain relaxation in the dual-step Ge layer. The material characterization was locally performed at different points by high resolution transmission electron microscopy, while it was globally performed by high resolution X-ray diffraction and photoluminescence.

20.
Nanomaterials (Basel) ; 12(9)2022 Apr 19.
Article in English | MEDLINE | ID: mdl-35564112

ABSTRACT

In this manuscript, the integration of a strained Ge channel with Si-based FinFETs was investigated. The main focus was the preparation of high-aspect-ratio (AR) fin structures, appropriate etching topography and the growth of germanium (Ge) as a channel material with a highly compressive strain. Two etching methods, the wet etching and in situ HCl dry etching methods, were studied to achieve a better etching topography. In addition, the selective epitaxial growth of Ge material was performed on a patterned substrate using reduced pressure chemical vapor deposition. The results show that a V-shaped structure formed at the bottom of the dummy Si-fins using the wet etching method, which is beneficial to the suppression of dislocations. In addition, compressive strain was introduced to the Ge channel after the Ge selective epitaxial growth, which benefits the pMOS transport characteristics. The pattern dependency of the Ge growth over the patterned wafer was measured, and the solutions for uniform epitaxy are discussed.

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