Stent coating containing a charged silane coupling agent that regulates protein adsorption to confer antithrombotic and cell-adhesion properties.

The evolution of endovascular therapies, particularly in the field of intracranial aneurysm treatment, has been truly remarkable and is characterized by the development of various stents. However, ischemic complications related to thrombosis or downstream emboli pose a challenge for the broader clinical application of such stents. Despite advancements in surface modification technologies, an ideal coating that fulfills all the desired requirements, including anti-thrombogenicity and swift endothelialization, has not been available. To address these issues, we investigated a new coating comprising 3-aminopropyltriethoxysilane (APTES) with both anti-thrombogenic and cell-adhesion properties. We assessed the anti-thrombogenic property of the coating using an in vitro blood loop model by evaluating the platelet count and the level of the thrombin-antithrombin (TAT) complex, and investigating thrombus formation on the surface using scanning electron microscopy (SEM). We then assessed endothelial cell adhesion on the metal surfaces. In vitro blood tests revealed that, compared to a bare stent, the coating significantly inhibited platelet reduction and thrombus formation; more human serum albumin spontaneously adhered to the coated surface to block thrombogenic activation in the blood. Cell adhesion tests also indicated a significant increase in the number of cells adhering to the APTES-coated surfaces compared to the numbers adhering to either the bare stent or the stent coated with an anti-fouling phospholipid polymer. Finally, we performed an in vivo safety test by implanting coated stents into the internal thoracic arteries and ascending pharyngeal arteries of minipigs, and subsequently assessing the health status and vessel patency of the arteries by angiography over the course of 1 week. We found that there were no adverse effects on the pigs and the vascular lumens of their vessels were well maintained in the group with APTES-coated stents. Therefore, our new coating exhibited both high anti-thrombogenicity and cell-adhesion properties, which fulfill the requirements of an implantable stent.

Enhancement of the Electric-Force Response of Carbon Black/Silicone Rubber Composites by Silane Coupling Agents.

Flexible strain sensors have a wide range of applications in the field of health monitoring of seismic isolation bearings. However, the nonmonotonic response with shoulder peaks limits their application in practical engineering. Here we eliminate the shoulder peak phenomenon during the resistive-strain response by adjusting the dispersion of conductive nanofillers. In this paper, carbon black (CB)/methyl vinyl silicone rubber (VMQ) composites were modified by adding a silane coupling agent (KH550). The results show that the addition of KH550 eliminates the shoulder peak phenomenon in the resistive response signal of the composites. The reason for the disappearance of the shoulder peak phenomenon was explained, and at the same time, the mechanical properties of the composites were enhanced, the percolation threshold was reduced, and they had excellent strain-sensing properties. It also exhibited excellent stability and repeatability during 18,000 cycles of loading-unloading. The resistance-strain response mechanism was explained by the tunneling effect theoretical model analysis. It was shown that the sensor has a promising application in the health monitoring of seismic isolation bearings.

Enhancing the Delamination Efficiency of Polyimide-Copper Bilayers with UV/Heat-Activated Foamable Adhesive: Insights and Applications.

This study explores the adhesive properties of copolymers comprising glycidyl methacrylate (GMA) and 3-(trimethoxysilyl)propyl methacrylate (MPTMS), focusing on their suitability for adhesive applications. Peel resistance measurements revealed a substantial impact of the GMA/MPTMS ratio on adhesion capabilities, identifying an optimal ratio of 30/70 for copolymerization with tert-butyl acrylate (tBA) to improve foaming performance. tBA, a foaming monomer activated by a photoacid generator and heat, enhances the copolymerized adhesive's adhesion strength and foamability for postuse delamination. Chemical structure analysis through Nuclear magnetic resonance (NMR) and Fourier-transform infrared spectroscopy (FTIR) confirmed successful polymerization, while rheological properties indicated decreased complex viscosity and adhesive strength with an increasing tBA content. The deprotection of the t-butyl group facilitated foam formation, supported by morphology analysis. These findings provide insights into foamable adhesive development with potential applications in delamination processes and implications for further exploration in polymer adhesion.

Exploring the Impact of Reinforcing Filler Systems on Devulcanizate Composites.

Composites revolutionize material performance, fostering innovation and efficiency in diverse sectors. Elastomer-based polymeric composites are crucial for applications requiring superior mechanical strength and durability. Widely applied in automotives, aerospace, construction, and consumer goods, they excel under extreme conditions. Composites based on recycled rubber, fortified with reinforcing fillers, represent a sustainable material innovation by repurposing discarded rubber. The integration of reinforcing agents enhances the strength and resilience of this composite, and the recycled polymeric matrix offers an eco-friendly alternative to virgin elastomers, reducing their environmental impact. Devulcanized rubber, with inherently lower mechanical properties than virgin rubber, requires enhancement of its quality for reuse in a circular economy: considerable amounts of recycled tire rubber can only be applied in new tires if the property profile comes close to the one of the virgin rubber. To achieve this, model passenger car tire and whole tire rubber granulates were transformed into elastomeric composites through optimized devulcanization and blending with additional fillers like carbon black and silica-silane. These fillers were chosen as they are commonly used in tire compounding, but they lose their reactivity during their service life and the devulcanization process. Incorporation of 20% (w/w) additional filler enhanced the strength of the devulcanizate composites by up to 15%. Additionally, increased silane concentration significantly further improved the tensile strength, Payne effect, and dispersion by enhancing the polymer-filler interaction through improved silanization. Higher silane concentrations reduced elongation at break and increased crosslink density, as it leads to a stable filler-polymer network. The optimal concentration of a silica-silane filler system for a devulcanizate was found to be 20% silica with 3% silane, showing the best property profile.

Ampholytic ion-exchange magnetic beads: a promising tool for selecting short fragments in circulating cell-free DNA analysis.

Objective: For liquid biopsy of cancer, the extraction of circulating cell-free DNA (cfDNA) from plasma is required. We evaluated the efficacy of use of magnetic submicron particles coated with abundant small zwitterions (MSP-ZEWBs) for extracting short fragments of cfDNA. Methods: We developed and optimized an MSP-ZEWB-based cfDNA extraction method using ampholytic ion-exchange materials and compared its results with those using a control kit. We measured the cfDNA concentration by quantitative polymerase-chain-reaction and using the Qubit method and analyzed cfDNA fragmentation patterns using a bioanalyzer. Results: The fragment size of cfDNA isolated from glycine hydrochloric acid at a pH of 2.2 exhibited a better alignment with the DNA marker. The highest DNA intensity was observed at the final concentration of 0.8% polyethylene glycol 8000. The intensity of cfDNA decreased significantly when isolated from plasma with DNA marker using MSP-ZEWBs with an adsorption buffer containing guanidine hydrochloride or isothiocyanoguanidine. All fragments were successfully extracted using MSP-ZEWBs from both plasma and phosphate-buffered saline. Notably, the intensity of short cfDNA fragments isolated using MSP-ZEWBs remained consistent for recovery of long DNA fragments. indicating a potential selective of small fragments. Conclusion: The extraction of plasma cfDNA with MSP-ZEWBs requires no protein denaturation, shows resistance to cells remaining in plasma, and demonstrates higher overall efficiency and better reproducibility than other extraction methods. Use of MSP-ZEWBs may greatly enhance liquid biopsy of cancers through the analysis of plasma cfDNA in clinical practice.

Bonding of Composite Cements Containing 10-MDP to Zirconia Ceramics Without Dedicated Ceramic Primer.

PURPOSE: To measure zirconia-to-zirconia microtensile bond strength (µTBS) using composite cements with and without primer. MATERIALS AND METHODS: Two Initial Zirconia UHT (GC) sticks (1.8x1.8x5.0 mm) were bonded using four cements with and without their respective manufacturer's primer/adhesive (G-CEM ONE [GOne] and G-Multi Primer, GC; Panavia V5 [Pv5]), and Panavia SA Cement Universal [PSAu], and Clearfil Ceramic Plus, Kuraray Noritake; RelyX Universal (RXu) and Scotchbond Universal Plus [SBUp], 3M Oral Care). Specimens were trimmed to an hour-glass shaped specimen whose isthmus is circular in cross-section. After 1-week water storage, the specimens were either tested immediately (1-week µTBS) or first subjected to 50,000 thermocycles (50kTC-aged µTBS). The fracture mode was categorized as either adhesive interfacial failure, cohesive failure in composite cement, or mixed failure, followed by SEM fracture analysis of selected specimens. Data were analyzed using linear mixed-effects statistics (α = 0.05; variables: composite cement, primer/adhesive application, aging). RESULTS: The statistical analysis revealed no significant differences with aging (p = 0.3662). No significant difference in µTBS with/without primer and aging was recorded for GOne and PSAu. A significantly higher µTBS was recorded for Pv5 and RXu when applied with their respective primer/adhesive. Comparing the four composite cements when they were applied in the manner that resulted in their best performance, a significant difference in 50kTC-aged µTBS was found for PSAu compared to Pv5 and RXu. A significant decrease in µTBS upon 50kTC aging was only recorded for RXu in combination with SBUp. CONCLUSION: Adequate bonding to zirconia requires the functional monomer 10-MDP either contained in the composite cement, in which case a separate 10-MDP primer is no longer needed, or in the separately applied primer/adhesive.

Effect of the surface coating of carbonyl iron particles on the dispersion stability of magnetorheological fluid.

The dispersion stability of carbonyl iron particle (CIP)-based magnetorheological fluid (MRF) is improved by CIP, which particle is etched with hydrochloric acid (HCl) to form porous structure with many hydroxyl groups and subsequently coated with silane coupling agents that have varying chain lengths. The microstructures, coating effect and magnetism of the CIPs were examined using the Scanning Electron Microscopy, Automatic Surface and Porosity Analyzer (BET), Fourier-Transform Infrared Spectroscopy, Thermogravimetric Analysis and Vibrating Sample Magnetometer. Furthermore, the rheological properties and dispersion stability of the MRFs were assessed using a Rotating Rheometer and Turbiscan-lab. The results revealed that the nanoporous structure appeared on the CIPs and the specific surface area increased remarkably after being etched by hydrochloric acid. Additionally, as the chain length of the silane coupling agent increases, the coated mass on the particles increases, the the density and the saturation magnetization of particles decreased, and the coated particles with different shell thicknesses were obtained; without a magnetic field, the viscosity of MRF prepared by coated particles increase slightly, due to the enhancement of special three-dimensional network structure; under a magnetic field, the viscosity of the MRF decreased distinctly; the sedimentation rate of MRF decreased from 58 to 3.5% after 100 days of sedimentation, and the migration distances of the MRFs were 22.4, 3.7, 2.4, and 0 mm, with particle sedimentation rates of 0.149, 0.019, 0.017, and 0 mm/h, respectively. The MRF with high dispersion stability was obtained, and the etching of CIP by HCl and the proper chain length of the coating of silane coupling agent were proved effective manners to improve the dispersion stability of MRF.

Effect of water glass treatment for zirconia and silane coupling on bond strength of resin cement.

OBJECTIVE: To evaluate the ability of the water glass treatment to penetrate zirconia and improve the bond strength of resin cement. MATERIAL AND METHODS: Water glass was applied to zirconia specimens, which were then sintered. The specimens were divided into water-glass-treated and untreated zirconia (control) groups. The surface properties of the water-glass-treated specimens were evaluated using surface roughness and electron probe micro-analyser (EPMA) analysis. A resin cement was used to evaluate the tensile bond strength, with2 and without a silane-containing primer. After 24 h in water storage at 37 °C and thermal cycling, the bond strengths were statistically evaluated with t-test, and the fracture surfaces were observed using SEM. RESULTS: The water glass treatment slightly increased the surface roughness of the zirconia specimens, and the EPMA analysis detected the water glass penetration to be 50 µm below the zirconia surface. The application of primer improved the tensile bond strength in all groups. After 24 h, the water-glass-treated zirconia exhibited a tensile strength of 24.8 ± 5.5 MPa, which was significantly higher than that of the control zirconia (17.6 ± 3.5 MPa) (p < 0.05). After thermal cycling, the water-glass-treated zirconia showed significantly higher tensile strength than the control zirconia. The fracture surface morphology was mainly an adhesive pattern, whereas resin cement residue was occasionally detected on the water-glass-treated zirconia surfaces. CONCLUSION: The water glass treatment resulted in the formation of a stable silica phase on the zirconia surface. This process enabled silane coupling to the zirconia and improved the adhesion of the resin cement.

Lack of cytotoxic and genotoxic effects of mPEG-silane coated iron(III) oxide nanoparticles doped with magnesium despite cellular uptake in cancerous and noncancerous lung cells.

Cytotoxic and genotoxic effects of novel mPEG-silane coated iron(III) oxide nanoparticles doped with magnesium (Mg0.1-γ-Fe2O3(mPEG-silane)0.5) have been investigated on human adenocarcinomic alveolar basal epithelial (A549) and human normal bronchial epithelial (BEAS-2B) cells. In the studies several molecular and cellular targets addressing to cell membrane, cytoplasm organelles and nucleus components were served as toxicological endpoints. The as-synthesized nanoparticles were found to be stable in the cell culture media and were examined for different concentration and exposure times. No cytotoxicity of the tested nanoparticles was found although these nanoparticles slightly increased reactive oxygen species in both cell types studied. Mg0.1-γ-Fe2O3(mPEG-silane)0.5 nanoparticles did not produce any DNA strand breaks and oxidative DNA damages in A549 and BEAS-2B cells. Different concentration of Mg0.1-γ-Fe2O3(mPEG-silane)0.5 nanoparticles and different incubation time did not affect cell migration. The lung cancer cells' uptake of the nanoparticles was more effective than in normal lung cells. Altogether, the results evidence that mPEG-silane coated iron(III) oxide nanoparticles doped with magnesium do not elucidate any deleterious effects on human normal and cancerous lung cells despite cellular uptake of these nanoparticles. Therefore, it seems reasonable to conclude that these novel biocompatible nanoparticles are promising candidates for further development towards medical applications.

Effects of dentin bonding agents and silanization on bond strength between 3D printed resin and composite resin.

This study aimed to evaluate the effects of dentin bonding agents and silanization on the bond strength between 3D printed resin and composite resin and compare it with a conventional composite resin. 3D printed resin cylinders (PCB) and composite resin substrates (Z250) were prepared and divided into eight subgroups based on the bonding agents used (n=12). The shear bond strength was measured using a universal testing machine, and the failure modes were evaluated. The bond strength was found to vary significantly among the bonding agents and substrate types. Silane application did not significantly improve the bond strength. Among the bonding agents, the universal adhesives exhibited the highest bond strengths for both substrates. Compared to PCB, Z250 demonstrated stronger bonds and exhibited more cohesive failures. Further research is needed to optimize the surface treatments and resin formulations for enhanced bond strength and durability between 3D printed and composite resins.

The efficacy of Er,Cr:YSGG laser and contemporary universal adhesive systems on composite resin repair bond strength: an in vitro study.

The aim of this study is to investigate the repair bond strength of composite resin following three different surface treatments (bur-grinding, silanization, and Er,Cr:YSGG laser irradiation) using various universal adhesives. A total of 160 resin composite specimens, produced in cylindrical form (6 × 2 mm) with a nanohybrid composite resin within metal molds, were subjected to 5000 cycles of aging in a thermocycler. The aged samples were categorized into four groups based on surface treatments: control, bur, silane, and Er,Cr:YSGG laser. Following surface treatments, the specimens underwent repair using the same resin composite and four different adhesive systems: Tokuyama Universal Bond (TUB), Prime Bond Universal (PBU), Gluma Bond Universal (GBU), and Clearfil SE Bond (CSB). Subsequently, the specimens were subjected to shear forces, and statistical analysis was performed using two-way ANOVA and Tukey tests (p < 0.05). The failure modes were examined using a stereomicroscope, and the surface topography of the roughened resin composite was assessed through scanning electron microscopy (SEM). Results indicated that silane + GBU exhibited the highest shear bond strength (SBS) (15.61 MPa) while control + TUB showed the lowest SBS (7.63 MPa). Silane demonstrated significantly higher SBS values (p ≤ 0.05), with no significant difference observed between bur and laser methods (p = 0.998). It is recommended to include an additional silanization step before applying universal adhesive, as it effectively enhances the bond strength of the repaired composite.

Core-Shell Rubber Nanoparticle-Modified CFRP/Steel Ambient-Cured Adhesive Joints: Curing Kinetics and Mechanical Behavior.

Externally bonded wet-layup carbon fiber-reinforced polymer (CFRP) strengthening systems are extensively used in concrete structures but have not found widespread use in deficient steel structures. To address the challenges of the adhesive bonding of wet-layup CFRP to steel substrates, this study investigated the effect of core-shell rubber (CSR) nanoparticles on the curing kinetics, glass transition temperature (Tg) and mechanical properties of ambient-cured epoxy/CSR blends. The effects of silane coupling agent and CSR on the adhesive bond properties of CFRP/steel joints were also investigated. The results indicate that CSR nanoparticles have a mild catalytic effect on the curing kinetics of epoxy under ambient conditions. The effect of CSR on the Tg of epoxy was negligible. Epoxy adhesives modified with 5 to 20%wt. of CSR nanoparticles were characterized with improved ductility over brittle neat epoxy; however, the addition of CSR nanoparticles reduced tensile strength and modulus of the adhesives. An up to 250% increase in the single-lap shear strength of CFRP/steel joints was accomplished in CSR-modified joints over neat epoxy adhesive joints.

The Role of Surface Treatment and Coupling Agents for Adhesion between Stainless Steel (SUS) and Polyamide (PA) of Heterojunction Bilayer Composites.

The growing demand for lightweight and durable materials in industries, such as the automotive, aerospace, and electronics industries, has spurred the development of heterojunction bilayer composites, combining the structural integrity of metals with the versatility of polymers. This study addresses the critical interface between stainless steel (SUS) and polyamide 66 (PA66), focusing on the pivotal role of surface treatments and various silane coupling agents in enhancing the adhesion strength of heterojunction SUS/PA66 bilayer composites. Through systematic surface modifications-highlighted by scanning electron microscopy, atomic force microscopy, and contact angle analyses-the study assessed the impact of increasing the surface area, roughness, and energy of SUS. X-ray photoelectron spectroscopy evaluations confirmed the strategic selection of specific silane coupling agents. Although some coupling agents barely influenced the mechanics, notably, aminopropyl triethoxysilane (A1S) and 3-glycidyl oxypropyl trimethoxysilane (ES) significantly enhanced the mechanical properties of the heterojunction bilayer composites, evidenced by the improved lap shear strength, elongation at break, and toughness. These advancements were attributed to the interfacial interactions at the metal-polymer interface. This research underscored the significance of targeted surface treatment and the judicious selection of coupling agents in optimizing the interfacial adhesion and overall performance of metal-polymer composites, offering valuable insights for the fabrication of materials where reduced weight and enhanced durability are paramount.

Insight into CMC-PVA-fHNTs Nanocomposite Hydrogel as an Advance Carrier for Cefadroxil Monohydrate: Fabrication and Characterization/Angiogenic Potential Analysis.

Controlled drug delivery is a key strategy aimed at reducing both the frequency of therapeutic dosages and potential systemic side effects, particularly in the case of high drug concentrations. The nanocomposite hydrogel systems presented in this study were synthesized by combining carboxymethyl cellulose, polyvinyl alcohol, and (3-aminopropyl)triethoxysilane-functionalized halloysite nanotubes (fHNTs). This hydrogel system is a potential candidate for the controlled release of cefadroxil monohydrate. These hydrogels are analyzed by Fourier transform infrared spectroscopy, scanning electron microscopy, thermogravimetric analysis, and rheological measurements. Additionally, swelling properties, porosity, hydrophilicity, drug release, and in vitro and in vivo analyses were also evaluated. The observed trends in swelling and drug release demonstrated that the outcomes are dependent on the presence of fHNTs in the hydrogel matrix. Notably, fHNTs-loaded hydrogels displayed sustained drug release patterns. This innovative approach eliminates the need for traditional encapsulation and presents promising and translatable strategies for achieving more effective drug release.

Organocatalyzed Hydroacylation of Enones by Photosensitization of Acyl Silanes.

A mild protocol for hydroacylation of enones through photosensitization of acyl silanes with thioxanthone under blue light (455 nm) irradiation is reported. A Brønsted acid is used as a cocatalyst in the reaction. The versatility of the method is demonstrated through inter- and intramolecular hydroacylation reaction. The hydroacylation product is applied for synthesizing an anti-HCV agent. Mechanistic insights are also provided through control experiments.

Effect of the difference water amounts and hydrolysis times of silane coupling agent on the shear bond strength between lithium disilicate glass ceramic and composite resin.

This study was to evaluate the effect of different water amounts and hydrolysis times of silane coupling agent on shear bond strength between lithium disilicate glass ceramic (LDS) and composite resin. Fourteen groups (n=7) of different water amounts (90, 50 and 10%v/v) and hydrolysis times (5, 19, 75 and 300 s) of experimental silane coupling agent that were prepared for silanization, non-silanization and commercial silane coupling agent (CSC) groups. Two-way analysis of variance (ANOVA) revealed no interaction between water amounts and hydrolysis times of ESC on shear bond strength between LDS and composite resin. One-way ANOVA exhibited the highest shear bond strength and the highest mean percentage in mixed failure mode in the 50%v/v group. Molecular analysis of 13C and 29Si indicated that nuclear magnetic resonance spectra of M2 and M3 hydrolysis species were found in 50%v/v group. The presenting of M2 and M3 which was predominant factor contributing to the highest shear bond strength.

Synthesis and Characterization of Durable Antifog Silane-Pyrrolidone Thin Coatings onto Polymeric Films.

The fogging of transparent surfaces-condensation of water vapor in the air to a small liquid surface at specific environmental conditions-scatters incident light, creating a blurry vision. Fogging presents a significant challenge in various industries, adversely affecting numerous applications including plastic packaging, agricultural films, and various optical devices. Superhydrophobic or superhydrophilic coatings are the main strategies used to induce antifogging to minimize light scattering. Here, an innovative approach is introduced to mitigate fogging by modifying the surface properties of polymeric films, focusing on corona-treated polyethylene as a model. Coatings were prepared in two successive steps: the addition of radical co-polymerization of methacryloxypropyltriethoxysilane and N-vinylpyrrolidone followed by the step-growth Stöber polymerization of the formed silane monomer. The polymeric dispersion was spread on oxidized films via a Mayer rod and dried. Scanning and force microscopy, FIB, XPS, and UV-vis spectroscopy revealed a thin coating composed of cross-linked siloxane (Si-O-Si) covalently bonded to surface hydroxyls exposing pyrrolidone groups. Contact angle measurements, hot-fog examination, and durability tests indicated a durable antifogging activity.

Amine-functionalized porous silica production via ex- and in-situ method using silicate precursors as a selective adsorbent for CO2 capture applications.

A comparison of the amine-modified silica particle's characteristics via ex- and in-situ routes and their application as a CO2 gas adsorbent is reported. Modifying silica particles via ex-situ involves two separate steps: forming porous silica particles with sodium lauryl sulfate (SLS) as a template and impregnation using ultrasound assistance. In contrast to ex-situ modification, in-situ modification of silica particles is carried out in one step by mixing directly between the silica source and the modifying agent. Controlling the characteristics of modified silica particles via in-situ is carried out by adding an SLS template removed simultaneously with particle formation to increase the surface area and porosity. Increasing the SLS template concentration shows a linear relationship between increasing particle surface area and amine loading. However, two different modification routes exert a direct influence on aminopropyl distribution. Silanization via in-situ which involves a simultaneous condensation reaction produces a higher amine loading reaching 1.2845 mmol/g of silica than via ex-situ which is only 0.9610 mmol/g of silica. The amount of aminopropyl that can be grafted on the silica surface shows a linear relationship to the quantity of CO2 gas adsorption capacity. Amine-modified silica particles obtained the highest adsorption capability via the in-situ route with an SLS 3 CMC template of 2.32 mmol/g silica at an operating pressure of 6 bar.

How the repair bonding strength of hybrid ceramic CAD/CAM blocks is influenced by the use of surface treatments and universal adhesives.

We examined how different methods of surface treatment and different universal adhesives with or without extra silane affected the repair bonding strength of hybrid ceramic CAD/CAM restorations. Cerasmart specimens (n=320) were subjected to thermocycling and assigned to the following surface pretreatment protocols: control, diamond bur (DB), hydrofluoric acid (HF), and tribochemical silica coating (TSC). Half the specimens received a coating of silane, followed by application of the universal adhesives Futurabond M+ (FMU), Tokuyama Universal Bond (TUB), Single Bond Universal (SBU), or Clearfil Universal Bond Quick (CUQ) (n=10). A hybrid composite resin was used to simulate repair; then the specimens underwent further thermocycling. Shear bond strength (SBS) was determined and modes of failure were examined. The TSC-CUQ silane (-) group showed the highest SBS values. The best repairs were obtained when the surface was treated with TSC, with the exception of the DB-TUB silane (-) group. TUB increased SBS more than the other adhesives. Additional silane decreased SBS in the HF-TUB and TSC-CUQ groups, while increasing it in the TSC-TUB and DB-FMU groups (p<0.05).

Plasma enhanced atomic layer deposition of silicon nitride using magnetized very high frequency plasma.

To obtain high-quality SiNxfilms applicable to an extensive range of processes, such as gate spacers in fin field-effect transistors (FinFETs), the self-aligned quadruple patterning process, etc, a study of plasma with higher plasma density and lower plasma damage is crucial in addition to study on novel precursors for SiNxplasma-enhanced atomic layer deposition (PEALD) processes. In this study, a novel magnetized PEALD process was developed for depositing high-quality SiNxfilms using di(isopropylamino)silane (DIPAS) and magnetized N2plasma at a low substrate temperature of 200 °C. The properties of the deposited SiNxfilms were analyzed and compared with those obtained by the PEALD process using a non-magnetized N2plasma source under the same conditions. The PEALD SiNxfilm, produced using an external magnetic field (ranging from 0 to 100 G) during the plasma exposure step, exhibited a higher growth rate (∼1 Å/cycle) due to the increased plasma density. Additionally, it showed lower surface roughness, higher film density, and enhanced wet etch resistance compared to films deposited using the PEALD process with non-magnetized plasmas. This improvement can be attributed to the higher ion flux and lower ion energy of the magnetized plasma. The electrical characteristics, such as interface trap density and breakdown voltage, were also enhanced when the magnetized plasma was used for the PEALD process. Furthermore, when SiNxfilms were deposited on high-aspect-ratio (30:1) trench patterns using the magnetized PEALD process, an improved step coverage of over 98% was achieved, in contrast to the conformality of SiNxdeposited using non-magnetized plasma. This enhancement is possibly a result of deeper radical penetration enabled by the magnetized plasma.