Roadmap for Optical Metasurfaces.

Metasurfaces have recently risen to prominence in optical research, providing unique functionalities that can be used for imaging, beam forming, holography, polarimetry, and many more, while keeping device dimensions small. Despite the fact that a vast range of basic metasurface designs has already been thoroughly studied in the literature, the number of metasurface-related papers is still growing at a rapid pace, as metasurface research is now spreading to adjacent fields, including computational imaging, augmented and virtual reality, automotive, display, biosensing, nonlinear, quantum and topological optics, optical computing, and more. At the same time, the ability of metasurfaces to perform optical functions in much more compact optical systems has triggered strong and constantly growing interest from various industries that greatly benefit from the availability of miniaturized, highly functional, and efficient optical components that can be integrated in optoelectronic systems at low cost. This creates a truly unique opportunity for the field of metasurfaces to make both a scientific and an industrial impact. The goal of this Roadmap is to mark this "golden age" of metasurface research and define future directions to encourage scientists and engineers to drive research and development in the field of metasurfaces toward both scientific excellence and broad industrial adoption.

High-capacity free-space optical communications using wavelength- and mode-division-multiplexing in the mid-infrared region.

Due to its absorption properties in atmosphere, the mid-infrared (mid-IR) region has gained interest for its potential to provide high data capacity in free-space optical (FSO) communications. Here, we experimentally demonstrate wavelength-division-multiplexing (WDM) and mode-division-multiplexing (MDM) in a ~0.5 m mid-IR FSO link. We multiplex three ~3.4 µm wavelengths (3.396 µm, 3.397 µm, and 3.398 µm) on a single polarization, with each wavelength carrying two orbital-angular-momentum (OAM) beams. As each beam carries 50-Gbit/s quadrature-phase-shift-keying data, a total capacity of 300 Gbit/s is achieved. The WDM channels are generated and detected in the near-IR (C-band). They are converted to mid-IR and converted back to C-band through the difference frequency generation nonlinear processes. We estimate that the system penalties at a bit error rate near the forward error correction threshold include the following: (i) the wavelength conversions induce ~2 dB optical signal-to-noise ratio (OSNR) penalty, (ii) WDM induces ~1 dB OSNR penalty, and (iii) MDM induces ~0.5 dB OSNR penalty. These results show the potential of using multiplexing to achieve a ~30X increase in data capacity for a mid-IR FSO link.

Snapshot spectral imaging with parallel metasystems.

Spectral imagers divide scenes into quantitative and narrowband spectral channels. They have become important metrological tools in many areas of science, especially remote sensing. Here, we propose and experimentally demonstrate a snapshot spectral imager using a parallel optical processing paradigm based on arrays of metasystems. Our multi-aperture spectral imager weighs less than 20 mg and simultaneously acquires 20 image channels across the 795- to 980-nm spectral region. Each channel is formed by a metasurface-tuned filter and a metalens doublet. The doublets incorporate absorptive field stops, reducing cross-talk between image channels. We demonstrate our instrument's capabilities with both still images and video. Narrowband filtering, necessary for the device's operation, also mitigates chromatic aberration, a common problem in metasurface imagers. Similar instruments operating at visible wavelengths hold promise as compact, aberration-free color cameras. Parallel optical processing using metasystem arrays enables novel, compact instruments for scientific studies and consumer electronics.

Up- and Down-Conversion between Intra- and Intervalley Excitons in Waveguide Coupled Monolayer WSe2.

The presence of two spin-split valleys in monolayer (1L) transition metal dichalcogenide (TMD) semiconductors supports versatile exciton species classified by their spin and valley quantum numbers. While the spin-0 intravalley exciton, known as the "bright" exciton, is readily observable, other types of excitons, such as the spin-1 intravalley (spin-dark) and spin-0 intervalley (momentum-dark) excitons, are more difficult to access. Here we develop a waveguide coupled 1L tungsten diselenide (WSe2) device to probe these exciton species. In particular, TM coupling to the atomic layer's out-of-plane dipole moments enabled us to not only efficiently collect but also resonantly populate the spin-1 dark excitons, promising for developing devices with long valley lifetimes. Our work reveals several upconversion processes that bring out an intricate coupling network linking spin-0 and spin-1 intra- and intervalley excitons, demonstrating that intervalley scattering and spin-flip are very common processes in the atomic layer. These experimental results deepen our understanding of tungsten diselenide exciton physics and illustrate that planar photonic devices are capable of harnessing versatile exciton species in TMD semiconductors.

At-will chromatic dispersion by prescribing light trajectories with cascaded metasurfaces.

Chromatic dispersion spatially separates white light into colours, producing rainbows and similar effects. Detrimental to imaging but essential to spectroscopy, chromatic dispersion is the result of material properties in refractive optics and is considered an inherent characteristic of diffractive devices such as gratings and flat lenses. Here, we present a fundamental relation connecting an optical system's dispersion to the trajectories light takes through it and show that arbitrary control over dispersion may be achieved by prescribing specific trajectories, even in diffractive systems. Using cascaded metasurfaces (2D arrays of sub-micron scatterers) to direct light along predetermined trajectories, we present an achromatic twisted metalens and experimentally demonstrate beam deflectors with arbitrary dispersion. This new insight and design approach usher in a new class of optical systems with wide-ranging applications.

Increasing efficiency of high numerical aperture metasurfaces using the grating averaging technique.

One of the important advantages of optical metasurfaces over conventional diffractive optical elements is their capability to efficiently deflect light by large angles. However, metasurfaces are conventionally designed using approaches that are optimal for small deflection angles and their performance for designing high numerical aperture devices is not well quantified. Here we introduce and apply a technique for the estimation of the efficiency of high numerical aperture metasurfaces. The technique is based on a particular coherent averaging of diffraction coefficients of periodic blazed gratings and can be used to compare the performance of different metasurface designs in implementing high numerical aperture devices. Unlike optimization-based methods that rely on full-wave simulations and are only practicable in designing small metasurfaces, the gradient averaging technique allows for the design of arbitrarily large metasurfaces. Using this technique, we identify an unconventional metasurface design and experimentally demonstrate a metalens with a numerical aperture of 0.78 and a measured focusing efficiency of 77%. The grating averaging is a versatile technique applicable to many types of gradient metasurfaces, thus enabling highly efficient metasurface components and systems.

Compact folded metasurface spectrometer.

An optical design space that can highly benefit from the recent developments in metasurfaces is the folded optics architecture where light is confined between reflective surfaces, and the wavefront is controlled at the reflective interfaces. In this manuscript, we introduce the concept of folded metasurface optics by demonstrating a compact spectrometer made from a 1-mm-thick glass slab with a volume of 7 cubic millimeters. The spectrometer has a resolution of ~1.2 nm, resolving more than 80 spectral points from 760 to 860 nm. The device is composed of three reflective dielectric metasurfaces, all fabricated in a single lithographic step on one side of a substrate, which simultaneously acts as the propagation space for light. The folded metasystem design can be applied to many optical systems, such as optical signal processors, interferometers, hyperspectral imagers, and computational optical systems, significantly reducing their sizes and increasing their mechanical robustness and potential for integration.

Two-Photon Microscopy with a Double-Wavelength Metasurface Objective Lens.

Two-photon microscopy is a key imaging technique in life sciences due to its superior deep-tissue imaging capabilities. Light-weight and compact two-photon microscopes are of great interest because of their applications for in vivo deep brain imaging. Recently, dielectric metasurfaces have enabled a new category of small and lightweight optical elements, including objective lenses. Here we experimentally demonstrate two-photon microscopy using a double-wavelength metasurface lens. It is specifically designed to focus 820 and 605 nm light, corresponding to the excitation and emission wavelengths of the measured fluorophors, to the same focal distance. The captured two-photon images are qualitatively comparable to the ones taken by a conventional objective lens. Our metasurface lens can enable ultracompact two-photon microscopes with similar performance compared to current systems that are usually based on graded-index-lenses. In addition, further development of tunable metasurface lenses will enable fast axial scanning for volumetric imaging.

Wavefront shaping with disorder-engineered metasurfaces.

Recently, wavefront shaping with disordered media has demonstrated optical manipulation capabilities beyond those of conventional optics, including extended volume, aberration-free focusing and subwavelength focusing. However, translating these capabilities to useful applications has remained challenging as the input-output characteristics of the disordered media (P variables) need to be exhaustively determined via O(P) measurements. Here, we propose a paradigm shift where the disorder is specifically designed so its exact input-output characteristics are known a priori and can be used with only a few alignment steps. We implement this concept with a disorder-engineered metasurface, which exhibits additional unique features for wavefront shaping such as a large optical memory effect range in combination with a wide angular scattering range, excellent stability, and a tailorable angular scattering profile. Using this designed metasurface with wavefront shaping, we demonstrate high numerical aperture (NA > 0.5) focusing and fluorescence imaging with an estimated ~2.2×108 addressable points in an ~8 mm field of view.

MEMS-tunable dielectric metasurface lens.

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-µm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 µm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Orbital angular momentum beams generated by passive dielectric phase masks and their performance in a communication link.

We demonstrate the generation of orbital angular momentum (OAM) beams using high-efficient polarization-insensitive phase masks. The OAM beams generated by the phase masks are characterized in terms of their tolerance to misalignment (lateral displacement or tilt) between the incident beam and phase mask. For certain scenarios, our results show that (a) when the tilt angle is within the range of -20 to +20 deg, the crosstalk among modes is less than -15 dB; and (b) lateral displacement of 0.3 mm could cause a large amount of power leaked to adjacent modes. Finally, OAM beams generated by the phase masks are demonstrated over a two-channel OAM-multiplexing link, each channel carrying a 40 Gbit/s data stream. An optical signal-to-noise-ratio (OSNR) penalty of ∼1 dB is measured without crosstalk at the bit error rate (BER) of 3.8×10-3. With crosstalk, an OSNR penalty of <1.5 dB is observed at the same BER.

Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass.

Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possible photonic applications. In this work, we report the fabrication of single crystal gallium phosphide thin films on transparent glass substrates via transfer bonding. GaP thin films on Si (001) and (112) grown by MOCVD are bonded to glass, and then the growth substrate is removed with a XeF2 vapor etch. The resulting GaP films have surface roughnesses below 1 nm RMS and exhibit room temperature band edge photoluminescence. Magnesium doping yielded p-type films with a carrier density of 1.6 × 1017 cm-3 that exhibited mobilities as high as 16 cm2V-1s-1. Due to their unique optical properties, these films hold much promise for use in advanced optical devices.

Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies.

We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80 nm-thick poly silicon film on a 115 nm-thick SiO2 spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and have an almost insensitive response over a ± 20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.

Fundamental limits of ultrathin metasurfaces.

We present a set of universal relations which relate the local transmission, reflection, and polarization conversion coefficients of a general class of non-magnetic passive ultrathin metasurfaces. We show that these relations are a result of equal forward and backward scattering by single layer ultrathin metasurfaces, and they lead to confinement of the transmission, reflection, and polarization conversion coefficients to limited regions of the complex plane. Using these relations, we investigate the effect of the presence of a substrate, and show that the maximum polarization conversion efficiency for a transmissive metasurface decreases as the refractive index contrast between the substrate and cladding layer increases. Furthermore, we demonstrate that a single layer reflective metasurface can achieve full 2π phase shift coverage without altering the polarization if it is illuminated from the higher refractive index material. We also discuss two approaches for achieving asymmetric scattering from metasurfaces, and realizing metasurfaces which overcome the performance limitations of single layer ultrathin metasurfaces.

Coupling erbium dopants in yttrium orthosilicate to silicon photonic resonators and waveguides.

A scalable platform for on-chip optical quantum networks will rely on standard top-down nanofabrication techniques and solid-state emitters with long coherence times. We present a new hybrid platform that integrates amorphous silicon photonic waveguides and microresonators fabricated on top of a yttrium orthosilicate substrate doped with erbium ions. The quality factor of one such resonator was measured to exceed 100,000 and the ensemble cooperativity was measured to be 0.54. The resonator-coupled ions exhibited spontaneous emission rate enhancement and increased coupling to the input field, as required for further development of on-chip quantum light-matter interfaces.

Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations.

Optical metasurfaces are two-dimensional arrays of nano-scatterers that modify optical wavefronts at subwavelength spatial resolution. They are poised to revolutionize optics by enabling complex low-cost systems where multiple metasurfaces are lithographically stacked and integrated with electronics. For imaging applications, metasurface stacks can perform sophisticated image corrections and can be directly integrated with image sensors. Here we demonstrate this concept with a miniature flat camera integrating a monolithic metasurface lens doublet corrected for monochromatic aberrations, and an image sensor. The doublet lens, which acts as a fisheye photographic objective, has a small f-number of 0.9, an angle-of-view larger than 60° × 60°, and operates at 850 nm wavelength with 70% focusing efficiency. The camera exhibits nearly diffraction-limited image quality, which indicates the potential of this technology in the development of optical systems for microscopy, photography, and computer vision.

Orbital Angular Momentum-based Space Division Multiplexing for High-capacity Underwater Optical Communications.

To increase system capacity of underwater optical communications, we employ the spatial domain to simultaneously transmit multiple orthogonal spatial beams, each carrying an independent data channel. In this paper, we show up to a 40-Gbit/s link by multiplexing and transmitting four green orbital angular momentum (OAM) beams through a single aperture. Moreover, we investigate the degrading effects of scattering/turbidity, water current, and thermal gradient-induced turbulence, and we find that thermal gradients cause the most distortions and turbidity causes the most loss. We show systems results using two different data generation techniques, one at 1064 nm for 10-Gbit/s/beam and one at 520 nm for 1-Gbit/s/beam; we use both techniques since present data-modulation technologies are faster for infrared (IR) than for green. For the 40-Gbit/s link, data is modulated in the IR, and OAM imprinting is performed in the green using a specially-designed metasurface phase mask. For the 4-Gbit/s link, a green laser diode is directly modulated. Finally, we show that inter-channel crosstalk induced by thermal gradients can be mitigated using multi-channel equalisation processing.

Multiwavelength metasurfaces through spatial multiplexing.

Metasurfaces are two-dimensional arrangements of optical scatterers rationally arranged to control optical wavefronts. Despite the significant advances made in wavefront engineering through metasurfaces, most of these devices are designed for and operate at a single wavelength. Here we show that spatial multiplexing schemes can be applied to increase the number of operation wavelengths. We use a high contrast dielectric transmittarray platform with amorphous silicon nano-posts to demonstrate polarization insensitive metasurface lenses with a numerical aperture of 0.46, that focus light at 915 and 1550 nm to the same focal distance. We investigate two different methods, one based on large scale segmentation and one on meta-atom interleaving, and compare their performances. An important feature of this method is its simple generalization to adding more wavelengths or new functionalities to a device. Therefore, it provides a relatively straightforward method for achieving multi-functional and multiwavelength metasurface devices.

High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms.

Metasurfaces are ultrathin optical structures that manipulate optical wavefronts. Most metasurface devices which deflect light are designed for operation at a single wavelength, and their function changes as the wavelength is varied. Here we propose and demonstrate a double-wavelength metasurface based on polarization dependent dielectric meta-atoms that control the phases of two orthogonal polarizations independently. Using this platform, we design lenses that focus light at 915 and 780 nm with perpendicular linear polarizations to the same focal distance. Lenses with numerical apertures up to 0.7 and efficiencies from 65% to above 90% are demonstrated. In addition to the high efficiency and numerical aperture, an important feature of this technique is that the two operation wavelengths can be chosen to be arbitrarily close. These characteristics make these lenses especially attractive for fluorescence microscopy applications.

Removing Orientation-Induced Localization Biases in Single-Molecule Microscopy Using a Broadband Metasurface Mask.

Nanoscale localization of single molecules is a crucial function in several advanced microscopy techniques, including single-molecule tracking and wide-field super-resolution imaging 1. To date, a central consideration of such techniques is how to optimize the precision of molecular localization. However, as these methods continue to push toward the nanometre size scale, an increasingly important concern is the localization accuracy. In particular, single fluorescent molecules emit with an anisotropic radiation pattern of an oscillating electric dipole, which can cause significant localization biases using common estimators 2-5. Here we present the theory and experimental demonstration of a solution to this problem based on azimuthal filtering in the Fourier plane of the microscope. We do so using a high efficiency dielectric metasurface polarization/phase device composed of nanoposts with sub-wavelength spacing 6. The method is demonstrated both on fluorophores embedded in a polymer matrix, and in dL5 protein complexes that bind Malachite green 7, 8.