Non-Contact Thermometer for Improved Air Temperature Measurements.

A compact thermometer for air temperature based on the measurement of the speed of sound was developed at INRIM. This paper focuses on the comparison of this instrument with platinum resistance thermometers in a climatic chamber over a temperature range (-30 ÷ +55) °C, relative humidity (10 ÷ 90)%rh, and irradiation (>1 kW/m2) values similar to those of surface atmospheric conditions. Overall uncertainty values of 0.2 °C over the range from -30 °C to +30 °C, and from 0.6 °C to +55 °C, were found. Moreover, the instrument proved to be immune to irradiation errors and free from the need for temperature calibration.

Improved Acoustic Thermometry for Long-Distance Temperature Measurements.

Accurate measurements of long distances (in the order of tens of meters or more) are necessary in manufacturing processes of large structures, as, for example, in the aerospace industry. In the most demanding applications, the goal is to achieve a relative accuracy of 10-7 in the measurement of distances (e.g., 1 µm over 10 m). This goal can be obtained with laser interferometers whose accuracy is based on knowledge of the speed of light, which, in turn, depends on the temperature of air. A thermometer based on the measurement of the speed of sound in air has been realized at INRIM. Its purpose is the measurement of the air temperature along the measurement path of the interferometer with an accuracy of 0.1 °C at distances up to 11 m. The paper describes the principle and the experimental setup of the acoustic thermometer and demonstrates its performance by comparison with calibrated reference platinum resistance thermometers. Furthermore, we demonstrate the potentiality of the method to measure the vertical temperature gradient, which is the main error source in triangulation measurements when using laser trackers.

Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range.

High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. In most demanding applications, the actual performance of these instruments needs to be characterized. The best angular measurement instruments available today do not sufficient resolution and/or bandwidth to satisfy these needs. At the Istituto Nazionale di Ricerca Metrologica, INRIM a device was designed and built aiming at characterizing precision 2D angular actuators with a resolution surpassing the best devices on the market. The device is based on a multi reflection scheme that allows multiplying the deflection angle by a factor of 70. The ultimate resolution of the device is 2 prad/√Hz over a measurement range of 36 µrad with a measurement band >10 kHz. The present work describes the working principle, the practical realization, and a case study on a top-level commercial angular actuator (Nano-MTA2 produced by Mad City Labs).

Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology.

An absolute encoder based on vision system nanoGPS OxyO was developed by HORIBA France. This encoder provides three types of position information, namely, two inplane co-ordinates and inplane angular orientation. This paper focuses on the characterization of its angular performance. To this aim, the nanoGPS OxyO system was compared with the national angle standard of the National Metrology Institute of Italy (INRIM) that had evaluated accuracy of about 0.1 µrad. The effect of image size and illumination conditions on angular measurements was studied. Precision better than 10 µrad and accuracy better than 63 µrad over 2π rotation were demonstrated. Moreover, the application of nanoGPS OxyO to the characterization of rotation bearing is presented. Small deviations from pure rotational behavior were evidenced that would have not been possible using laser interferometers. As a consequence of its accuracy and versatility, the nanoGPS OxyO encoder is expected to be useful for laboratory experiments and quality-control tasks.

Angle amplification for nanoradian measurements.

A method to amplify the rotation angle of a mirror, based on multiple reflections between two quasi-parallel mirrors, is presented. The method allows rotations of fractions of nanoradians to be measured with a simple setup. The working principle, the experimental setup, and the results are presented.