Quasi-phase matched second-harmonic generation through thermal poling in femtosecond laser-written glass waveguides.

Quasi-phase matched second-harmonic generation at 532 nm is demonstrated in a channel waveguide that is written in bulk fused silica using a femtosecond laser. The second-order nonlinear grating is fabricated using uniform thermal poling followed by periodic erasure inside an e-beam deposition system caused, by what we believe to be, x-rays. A SHG conversion efficiency of 2 x10(-5) %/W-cm(2) was obtained for a 1 cm long device, corresponding to an effective nonlinear coefficient of 0.0075 pm/V.

Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching.

We present a study of the sidewall surface quality inside microchannels fabricated in fused silica glass by femtosecond laser pulses and chemical etching. Multiple combinations of laser exposure and etching solution parameters were examined. Results of scanning electron microscopy, atomic force microscopy, and optical reflection analyses of the surfaces are presented. The results obtained demonstrate the feasibility of optical quality surface fabrication, which in turn demonstrates the feasibility of fabricating complex integrated devices containing microfluidic channels and optical waveguides in the glass substrates.

Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling.

An integrated electro-optic waveguide modulator is demonstrated in bulk fused silica. A Mach-Zehnder interferometer waveguide structure is fabricated by direct writing with a femtosecond laser followed by thermal poling. A 20 degrees electro-optic phase shift is achieved at an operating wavelength of 1.55 microm with an applied voltage of 400 V and an interaction length of 25.6 mm, which correspond to an estimated effective electro-optic coefficient of 0.17 pm/V for the TE-polarized mode.

Microfluidic sorting system based on optical waveguide integration and diode laser bar trapping.

Effective methods for manipulating, isolating and sorting cells and particles are essential for the development of microfluidic-based life science research and diagnostic platforms. We demonstrate an integrated optical platform for cell and particle sorting in microfluidic structures. Fluorescent-dyed particles are excited using an integrated optical waveguide network within micro-channels. A diode-bar optical trapping scheme guides the particles across the waveguide/micro-channel structures and selectively sorts particles based upon their fluorescent signature. This integrated detection and separation approach streamlines microfluidic cell sorting and minimizes the optical and feedback complexity commonly associated with extant platforms.

Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses.

Femtosecond laser pulses used in a regime below the ablation threshold have two noticeable effects on Fused Silica (a-SiO2): they locally increase the material refractive index and modify its HF etching selectivity. The nature of the structural changes induced by femtosecond laser pulses in fused silica is not fully understood. In this paper, we report on nanoindentation and birefringence measurements on fused silica exposed to low-energy femtosecond laser pulses. Our findings further back the hypothesis of localized densification effect even at low energy regime.

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching.

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).