In situ TEM observation of void formation and migration in phase change memory devices with confined nanoscale Ge2Sb2Te5.

The reliability of Ge-Sb-Te phase-change memory (PCM) devices has been limited by failure due to void formation and this still remains one of the critical issues affecting their use in storage-class memory applications. To directly observe the void formation processes in real-time, we implemented in situ switching of PCM devices by applying set and reset voltage pulses to a Ge2Sb2Te5 (GST) cell inside a transmission electron microscope (TEM). The in situ TEM observations directly show that a void nucleates preferentially near the TiN bottom electrode in the GST cell, where the temperature is the highest. The nucleated void grows gradually until it reaches a certain size while migrating slowly toward the positively biased electrode. The fully grown void then continues migrating toward the positively biased electrode in subsequent set pulses. The observed polarity-dependent void migration can be explained by the field-induced redistribution of the constituent elements, especially by the electromigration of under-coordinated Te- ions which have vacancies around them. When the reset pulse with the same voltage polarity is applied, the voids exhibit a slight volume shrinkage but are not completely eliminated, resulting in a reset-stuck failure. The present in situ TEM observations revealing the nucleation, growth, and polarity-dependent migration of voids will contribute to the fundamental understanding of the failure by void formation in nanoscale GST-based PCM devices and help improving the design of reliable PCM devices.

Nanometer-Scale Phase Transformation Determines Threshold and Memory Switching Mechanism.

Creation of nanometer-scale conductive filaments in resistive switching devices makes them appealing for advanced electrical applications. While in situ electrical probing transmission electron microscopy promotes fundamental investigations of how the conductive filament comes into existence, it does not provide proof-of-principle observations for the filament growth. Here, using advanced microscopy techniques, electrical, 3D compositional, and structural information of the switching-induced conductive filament are described. It is found that during in situ probing microscopy of a Ag/TiO2 /Pt device showing both memory- and threshold-switching characteristics, a crystalline Ag-doped TiO2 forms at vacant sites on the device surface and acts as the conductive filament. More importantly, change in filament morphology varying with applied compliance currents determines the underlying switching mechanisms that govern either memory or threshold response. When focusing more on threshold switching features, it is demonstrated that the structural disappearance of the filament arises at the end of the constricted region and leads to the spontaneous phase transformation from crystalline conductive state into an initial amorphous insulator. Use of the proposed method enables a new pathway for observing nanosized features in a variety of devices at the atomic scale in three dimensions.

In situ TEM observation on the interface-type resistive switching by electrochemical redox reactions at a TiN/PCMO interface.

The interface-type resistive switching devices exhibiting bipolar and multi-level resistive switching have been considered as the key component for neuromorphic device applications. To directly observe the microscopic details of underlying electrochemical redox reactions occuring at a metal/oxide interface, we implemented in situ resistive switching of TiN/Pr0.7Ca0.3MnO3 (PCMO)/Pt junction devices in a transmission electron microscope (TEM). The in situ TEM observations directly show that an intermediate reaction layer (TiOxNy), growing and shrinking in the thickness range of a few nanometers at the TiN/PCMO interface in response to the applied voltage, mainly determines the device resistance by limiting the transport of charge carriers via the Poole-Frenkel conduction mechanism. A detailed analysis of in situ TEM observations demonstrates that electrochemical redox reactions at the TiN/PCMO interface are facilitated by the electric field driven drift of oxygen as well as Ti ions with a much stronger influence of the oxygen ions. As such, the reaction kinetics are governed by the electric field acting across the TiOxNy reaction layer. This layer defines the critical field for the onset of switching, which is measured to be of the order of 106 V cm-1, a typical value at which the ionic drift velocity starts increasing exponentially with the field according to the nonlinear ionic drift model. The present results indicate that understanding the nature of the electric field driven drift of ions in a nanoscale solid electrolyte is a key to the precise control of the resistive switching of metal/insulator/metal junction devices via voltage stimulations.

Solid-State Conversion Chemistry of Multicomponent Nanocrystals Cast in a Hollow Silica Nanosphere: Morphology-Controlled Syntheses of Hybrid Nanocrystals.

During thermal transformation of multicomponent nanocrystals in a silica nanosphere, FeAuPd alloy nanocrystals migrate outward and thereby leave a cavity in the silica matrix. Oxidation then converts these nanocrystals back into phase-segregated hybrid nanocrystals, AuPd@Fe3O4, with various morphologies. The FeAuPd-to-AuPd@Fe3O4 transformation was cast by the in situ generated hollow silica mold. Therefore, the morphological parameters of the transformed AuPd@Fe3O4 are defined by the degree of migration of the FeAuPd in the hollow silica nanoshell. This hollow silica-cast nanocrystal conversion was studied to develop a solid state protocol that can be used to produce a range of hybrid nanocrystals and that allows for systematic and sophisticated control of the resulting morphologies.