RESUMO
The paper reports on a novel process flow to manufacture conductive organic electrodes from highly conductive doped PEDOT:PSS polymer films that can be patterned and display a good adhesion to oxidized Si wafers as well as to flexible substrates, such as Mylar. Among other results, it is shown that multiple depositions of PEDOT:PSS increase the electrical conductivity by more than two orders of magnitude without increasing the film thickness of PEDOT:PSS significantly. An exponential dependence between sheet resistance and the number of PEDOT:PSS coatings has been found. The electrical conductivity of PEDOT:PSS can be increased by another two orders of magnitude doping with Cu nanoparticles when coated on the surface of a soft-baked PEDOT:PSS film. It is found, however, that both kinds of conductivity enhancement are not additive. Adhesion of PEDOT:PSS to oxidized Si wafers and BoPET (Mylar) has been ensured by applying an oxygen plasma cleaning step before spin coating. The manufactured high-conductivity PEDOT:PSS film can be patterned using a sacrificial metal layer with subsequent etching of PEDOT:PSS in oxygen plasma, followed by the removal of the patterned segments of the sacrificial metal layer in an aqueous acid solution.
