Efficient broadband silicon-on-insulator grating coupler with low backreflection.

We design and fabricate an efficient broadband grating coupler on a 400 nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310 nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58 nm and -27 dB, respectively.

Integrated hybrid silicon triplexer.

We demonstrate an integrated triplexer on silicon with a compact size of 1mm by 3.5mm by utilizing a selective area wafer bonding technique. The wavelength demultiplexer on the triplexer chip successfully separates signals at wavelengths of 1310 nm, 1490 nm and 1550 nm with more than 10 dB extinction ratio. The measured 3 dB bandwidth of the integrated laser and photodetectors are 2 GHz and 16 GHz, respectively. Open eye diagrams are also measured for the integrated photodetector up to 12.5 GHz PRBS inputs.

Silicon-on-insulator eight-channel optical multiplexer based on a cascade of asymmetric Mach-Zehnder interferometers.

A monolithically integrated eight-channel optical multiplexer (Mux) with a 400 GHz channel spacing ~1550 nm is presented based on a silicon-on-insulator rib waveguide and an asymmetric Mach-Zehnder interferometer. All channels were optimized independently with integrated heaters. The fully tuned Mux shows an adjacent channel isolation of ~13 dB, an excess loss of ~2.6 dB, and a channel uniformity of ~1.5 dB over a 25 nm wavelength span. In addition, the phase tuning efficiency for different interlevel dielectric layer thicknesses and thermal crosstalk were investigated.