Fabrication and Characterization of Superconducting Resonators.

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Analysis and calibration techniques for superconducting resonators.

A method is proposed and experimentally explored for in-situ calibration of complex transmission data for superconducting microwave resonators. This cryogenic calibration method accounts for the instrumental transmission response between the vector network analyzer reference plane and the device calibration plane. Once calibrated, the observed resonator response is analyzed in detail by two approaches. The first, a phenomenological model based on physically realizable rational functions, enables the extraction of multiple resonance frequencies and widths for coupled resonators without explicit specification of the circuit network. In the second, an ABCD-matrix representation for the distributed transmission line circuit is used to model the observed response from the characteristic impedance and propagation constant. When used in conjunction with electromagnetic simulations, the kinetic inductance fraction can be determined with this method with an accuracy of 2%. Datasets for superconducting microstrip and coplanar-waveguide resonator devices were investigated and a recovery within 1% of the observed complex transmission amplitude was achieved with both analysis approaches. The experimental configuration used in microwave characterization of the devices and self-consistent constraints for the electromagnetic constitutive relations for parameter extraction are also presented.