1.
J Synchrotron Radiat
; 31(Pt 4): 655-669, 2024 Jul 01.
Artigo
em Inglês
| MEDLINE
| ID: mdl-38771776
RESUMO
Synchrotron light sources require X-ray optics with extremely demanding accuracy for the surface profile, with less than 100â nrad slope errors and sub-nanometre height errors. Such errors are challenging to achieve for aspheres using traditional polishing methods. However, post-polishing error correction can be performed using techniques such as ion beam figuring (IBF) to improve optics to the desired quality. This work presents a brief overview of the history of IBF, introduces some of the challenges for obtaining such demanding figure errors, and highlights the work done at several in-house IBF facilities at synchrotron light sources worldwide to obtain state-of-the-art optical quality.