1.
Conf Proc IEEE Eng Med Biol Soc
; 2006: 3505-8, 2006.
Artigo
em Inglês
| MEDLINE
| ID: mdl-17946569
RESUMO
We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding.