Printed sub-100 nm polymer-derived ceramic structures.

We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.