Electromagnetic biaxial vector scanner using radial magnetic field.

We present an electromagnetic biaxial vector-graphic scanning micromirror. In contrast to conventional electromagnetic actuators using linear magnetic field, proposed device utilizes a radial magnetic field and uniquely designed current paths to enable the 2 degree-of-freedom scanning motion. As the radial field is generated by concentrically assembled magnets placed under the scanner die, large driving torque can be generated without the aid of hermetic packaging and relatively small device volume can be achieved. Mechanical half scan angle of 6.43° and 4.20° have been achieved at DC current of 250mA and 350mA for horizontal and vertical scans, respectively. Forced actuation along both scan axes has been realized by feedback control.

Electromagnetic biaxial microscanner with mechanical amplification at resonance.

We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.