RESUMO
Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO3/Pr0.7Ca0.3MnO3/SrRuO3 nanometer-sized trilayers from SrTiO3(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 µm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, µ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.PACS: 81.07.-b; 68.60.-p; 68.37.Lp; 81.16.Dn.
RESUMO
We investigate the relaxation of rectangular wrinkled thin films intrinsically containing an initial strain gradient. A preferential rolling direction, depending on wrinkle geometry and strain gradient, is theoretically predicted and experimentally verified. In contrast to typical rolled-up nanomembranes, which bend perpendicular to the longer edge of rectangular patterns, we find a regime where rolling parallel to the longer edge of the wrinkled film is favorable. A nonuniform radius of the rolled-up film is well reproduced by elasticity theory and simulations of the film relaxation using a finite element method.
