Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching.

We demonstrate a structuring method for crystalline silicon using nanosecond laser internal irradiation followed by chemical etching. We show a dramatic dependence of the etch rate on the laser-writing speed. Enhanced isotropic etch rates of silicon by laser-induced internal damage were recently demonstrated with strong acids, but our results add the possibility to obtain reduced etch rates leading to different topographies. Material analyses indicate the possibility to efficiently produce high-aspect ratio channels, thanks to laser-induced porosities, as well as silicon micro-bumps due to highly stressed regions. This holds promises for fabricating microfluidic, photovoltaic, and micro-electromechanical systems.

Probing the local temperature by in situ electron microscopy on a heated Si(3)N(4) membrane.

We present a method allowing us to obtain localized heating that is compatible with high-temperature operation and real time scanning and transmission electron microscopy. Localized heating is induced by flowing current through tungsten nanowires deposited by focused ion-beam-induced deposition on a 50-nm-thick Si(3)N(4) membrane. Based on the heat transport between the nanowire and the substrate, we applied an analytical model to obtain the temperature profile as a function of electrical power. In this model, the key parameter is the thermal resistance between the nanowire and the substrate that we determined experimentally by measuring electrical power and local temperature. The local temperature is measured by observing the evaporation of gold nanoparticle by electron microscopy. These in situ heating and temperature-probing capabilities are used to study the crystallization of the Si(3)N(4) membrane and the growth of silicon nanowires.

Environmental electron microscopy (ETEM) for catalysts with a closed E-cell with carbon windows.

In a standard high-resolution electron microscope (Jeol 3010), an environmental sample holder designed by Jeol, has been used for in situ observations at the atomic scale of catalysts, during a chemical reaction. Experiments have been performed in H(2) and O(2) at a pressure up to 4 mbar at room temperature, and in the case of H(2), at various temperatures until 350 degrees C. For the first time, Au and Pd clusters supported on TiO(2) and amorphous carbon have been observed with a windows-cell environmental electron microscopy (ETEM) system, with the resolution of the (1 1 1) lattice fringes. Au clusters have been cleaned in H(2) and have got the equilibrium shape of the fcc crystals during annealing. The same Au particles can be observed during successive treatments under O(2) and H(2). For Pd clusters in situ exposed to O(2) , the adhesion has decreased.