Aberration budget analysis of EUV lithography from the imaging performance of a contact layer in a 5 nm technology node.

By analyzing the impact of aberration in an extreme ultraviolet lithography projector on the imaging indicators of the test patterns for a contact layer in a 5 nm technology node, this paper establishes a mathematical aberration model based on the back propagating neutral network. On the basis of an aberration model, a method for estimating the aberration budget is proposed, which can help reduce the difficulty of achieving imaging performance thresholds in actual production. The performance of the results given by this method is verified by using a rigorous simulation. The results show that the model is highly accurate in predicting an aberration distribution that meets the requirements through an inverse sensitivity analysis and can calculate the wavefront aberration margin based on imaging indicators.

Macrophage-targeting bioactive glass nanoparticles for the treatment of intracellular infection and subcutaneous abscess.

Staphylococcus aureus (S. aureus) can survive phagocytosis and gain shelter from macrophages in some cases, and the clinical treatment of the intracellular bacterium also encounters the difficulty of traditional antibiotics in entering mammalian cells. In this work, we use mannose-modified bioactive glass nanoparticles decorated with silver nanoparticles (BGNs-Man/Ag) to treat the S. aureus-induced intracellular infection of macrophages. The results showed that BGNs-Man/Ag could target macrophages, elevate the intracellular ROS levels and drive them toward the M1 phenotype, which was crucial to activate the cell autonomous defence in disposing the intracellular infection. Attractively, BGNs-Man/Ag exhibited higher intracellular bacterial killing efficiency than free vancomycin. For the in vivo treatment of subcutaneous abscess, BGNs-Man/Ag significantly increased the population of M1 macrophages at the early stages of the infection site, resulting in enhanced bactericidal activity and improved regeneration of skin tissues. In short, BGNs-Man/Ag can be a promising antibacterial material in treating the S. aureus-induced intracellular infection of macrophages and subcutaneous abscesses.

Bioinspired Electrocatalyst for Electrochemical Reduction of N2 to NH3 in Ambient Conditions.

Industrial ammonia production depends heavily on the traditional Haber-Bosch method at the expense of CO2 emissions and large energy consumptions. Artificial fixation of nitrogen to ammonia is therefore regarded as a promising path to yield ammonia in energy-saving conditions. However, a competent electrocatalyst is highly desired, owing to the extremely stable bond of N≡N. In this work, we report Fe2(MoO4)3 nanoparticles as a non-noble-metal electrocatalyst, inspired by nitrogenase enzymes for electrochemically converting nitrogen into ammonia, which achieves a Faradic efficiency of 9.1% and an excellent NH3 yield of 18.16 µg h-1 mg-1 cat in 0.1 M sodium sulfate at -0.6 V vs reversible hydrogen electrode. Also, it has a better ammonia yield rate of 20.09 µg h-1 mg-1 cat in 0.1 M hydrochloric acid. Moreover, this noble-metal-free catalyst exhibits a unique reaction process selectivity and stability compared with the other catalysts working in harsh conditions. The specific reaction processes are analyzed by density functional theoretical calculations to gain insights into the nitrogen reduction reaction (NRR) by this catalyst.