RESUMO
Langasite surface acoustic wave devices can be used to implement harsh-environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.
RESUMO
We report on the development of harsh-environment surface acoustic wave sensors for wired and wireless operation. Surface acoustic wave devices with an interdigitated transducer emitter and multiple reflectors were fabricated on langasite substrates. Both wired and wireless temperature sensing was demonstrated using radar-mode (pulse) detection. Temperature resolution of better than ±0.5°C was achieved between 200°C and 600°C. Oxygen sensing was achieved by depositing a layer of ZnO on the propagation path. Although the ZnO layer caused additional attenuation of the surface wave, oxygen sensing was accomplished at temperatures up to 700°C. The results indicate that langasite SAW devices are a potential solution for harsh-environment gas and temperature sensing.
RESUMO
High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect.
