Surface measuring coherence scanning interferometry beyond the specular reflection limit.

The capability of optical surface topography measurement methods for measurement of steep and tilted surfaces is investigated through modelling of a coherence scanning interferometer. Of particular interest is the effect on the interference signal and measured topography when tilting the object at angles larger than the numerical aperture slope limit (i.e. the specular reflection limit) of the instrument. Here we use theoretical modelling to predict the results across a range of tilt angles for a blazed diffraction grating. The theoretically predicted interference patterns and surface height measurements are then verified directly with experimental measurements. Results illustrate the capabilities, limitations and modelling methods for interferometers to measure beyond the specular reflection limit.

Scattering and three-dimensional imaging in surface topography measuring interference microscopy.

Surface topography measuring interference microscopy is a three-dimensional (3D) imaging technique that provides quantitative analysis of industrial and biomedical specimens. Many different instrument modalities and configurations exist, but they all share the same theoretical foundation. In this paper, we discuss a unified theoretical framework for 3D image (interferogram) formation in interference microscopy. We show how the scattered amplitude is linearly related to the surface topography according to the Born and the Kirchhoff approximations and highlight the main differences and similarities of each. With reference to the Ewald and McCutchen spheres, the relationship between the spatial frequencies that characterize the illuminating and scattered waves, and those that characterize the object, are defined and formulated as a 3D linear filtering process. It is shown that for the case of near planar surfaces, the 3D filtering process can be reduced to two dimensions under the small height approximation. However, the unified 3D framework provides significant additional insight into the scanning methods used in interference microscopy, effects such as interferometric defocus and ways to mitigate errors introduced by aberrations of the optical system. Furthermore, it is possible to include the nonlinear effects of multiple scattering into the generalized framework. Finally, we consider the inherent nonlinearities introduced when estimating surface topography from the recorded interferogram.

A new approach to vector scattering: the 3s boundary source method.

This paper describes a novel Boundary Source Method (BSM) applied to the vector calculation of electromagnetic fields from a surface defined by the interface between homogenous, isotropic media. In this way, the reflected and transmitted fields are represented as an expansion of the electric fields generated by a basis of orthogonal electric and magnetic dipole sources that are tangential to, and evenly distributed over the surface of interest. The dipole moments required to generate these fields are then calculated according to the extinction theorem of Ewald and Oseen applied at control points situated at either side of the boundary. It is shown that the sources are essentially vector-equivalent Huygens' wavelets applied at discrete points at the boundary and special attention is given to their placement and the corresponding placement of control points according to the Nyquist sampling criteria. The central result of this paper is that the extinction theorem should be applied at control points situated at a distance d = 3s (where s is the separation of the sources) and consequently we refer to the method as 3sBSM. The method is applied to reflection at a plane dielectric surface and a spherical dielectric sphere and good agreement is demonstrated in comparison with the Fresnel equations and Mie series expansion respectively (even at resonance). We conclude that 3sBSM provides an accurate solution to electromagnetic scattering from a bandlimited surface and efficiently avoids the singular surface integrals and special basis functions proposed by others.

Effects of defocus on the transfer function of coherence scanning interferometry.

Coherence scanning interferometry (CSI) offers three-dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This Letter extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI.

On tilt and curvature dependent errors and the calibration of coherence scanning interferometry.

Although coherence scanning interferometry (CSI) is capable of measuring surface topography with sub-nanometre precision, it is well known that the performance of measuring instruments depends strongly on the local tilt and curvature of the sample surface. Based on 3D linear systems theory, however, a recent analysis of fringe generation in CSI provides a method to characterize the performance of surface measuring instruments and offers considerable insight into the origins of these errors. Furthermore, from the measurement of a precision sphere, a process to calibrate and partially correct instruments has been proposed. This paper presents, for the first time, a critical look at the calibration and correction process. Computational techniques are used to investigate the effects of radius error and measurement noise introduced during the calibration process for the measurement of spherical and sinusoidal profiles. Care is taken to illustrate the residual tilt and curvature dependent errors in a manner that will allow users to estimate measurement uncertainty. It is shown that by calibrating the instrument correctly and using appropriate methods to extract phase from the resulting fringes (such as frequency domain analysis), CSI is capable of measuring the topography of surfaces with varying tilt with sub-nanometre accuracy.

Focus variation microscope: linear theory and surface tilt sensitivity.

In a recent publication [3rd International Conference on Surface Metrology, Annecy, France, 2012, p. 1] it was shown that surface roughness measurements made using a focus variation microscope (FVM) are influenced by surface tilt. The effect appears to be most significant when the surface has microscale roughness (Ra≈50 nm) that is sufficient to provide a diffusely scattered signal that is comparable in magnitude to the specular component. This paper explores, from first principles, image formation using the focus variation method. With the assumption of incoherent scattering, it is shown that the process is linear and the 3D point spread characteristics and transfer characteristics of the instrument are well defined. It is argued that for the case of microscale roughness and through the objective illumination, the assumption of incoherence cannot be justified and more rigorous analysis is required. Using a foil model of surface scattering, the images that are recorded by a FVM have been calculated. It is shown that for the case of through-the-objective illumination at small tilt angles, the signal quality is degraded in a systematic manner. This is attributed to the mixing of specular and diffusely reflected components and leads to an asymmetry in the k-space representation of the output signals. It is shown that by using extra-aperture illumination or tilt angles greater than the acceptance angle of aperture (such that the specular component is lost), the incoherent assumption can be justified once again. The work highlights the importance of using ring-light illumination and/or polarizing optics, which are often available as options on commercial instruments, as a means to mitigate or prevent these effects.

Model-based defect detection on structured surfaces having optically unresolved features.

In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics.

When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequency domain. For an ideal, aberration-free instrument, these characteristics are defined uniquely by the numerical aperture of the objective lens and the bandwidth of the illumination source. In practice, however, physical imperfections such as those in lens aberrations, reference focus, and source alignment mean that the instrument performance is not ideal. Currently, these imperfections often go unnoticed as the instrument performance is typically only verified using rectilinear artifacts such as step heights and lateral grids. If an object of varying slope is measured, however, significant errors are often observed as the surface gradient increases. In this paper, a new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced. The silica microsphere was used to compute the point-spread and TF characteristics of the instrument, and the effect of these characteristics on instrument performance is discussed. Finally, a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.

Coherence scanning interferometry: linear theory of surface measurement.

The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the imaging system is defined in terms of the point spread function in the space domain or equivalently by the transfer function in the spatial frequency domain. The derivation of these characteristics usually involves making the Born approximation, which is strictly only applicable to weakly scattering objects; however, for the case of surface scattering, the system is linear if multiple scattering is assumed to be negligible and the Kirchhoff approximation is assumed. A difference between the filter characteristics derived in each case is found. However this paper discusses these differences and explains the equivalence of the two approaches when applied to a weakly scattering object.

Determination of overlap in lidar systems.

The overlap profile, also known as crossover function or geometric form factor, is often a source of uncertainty for lidar measurements. This paper describes a method for measuring the overlap by presenting the lidar with a virtual cloud through the use of an imaging system. Results show good agreement with horizontal hard target lidar measurements and with geometric overlap calculated for the ideal aberration-free case.

Synthetic aperture interferometry: error analysis.

Synthetic aperture interferometry (SAI) is a novel way of testing aspherics and has a potential for in-process measurement of aspherics [Appl. Opt. 42, 701 (2003)]. A method to measure steep aspherics using the SAI technique has been previously reported [Appl. Opt. 47, 1705 (2008)]. Here we investigate the computation of surface form using the SAI technique in different configurations and discuss the computational errors. A two-pass measurement strategy is proposed to reduce the computational errors, and a detailed investigation is carried out to determine the effect of alignment errors on the measurement process.

Particle image identification and correlation analysis in microscopic holographic particle image velocimetry.

This paper discusses the different analysis methods used in holographic particle image velocimetry to measure particle displacement and compares their relative performance. A digital holographic microscope is described and is used to record the light scattered by particles deposited on cover slides that are displaced between exposures. In this way, particle position and displacement are controlled and a numerical data set is generated. Data extraction using nearest neighbor analysis and correlation of either the reconstructed complex amplitude or intensity fields is then investigated.

Measurement of steep aspheric surfaces using an anamorphic probe.

Synthetic aperture interferometry has been previously proposed as a possible in-process method to measure aspheric form (R. Tomlinson, Appl. Opt.42, 701, 2003.). Preliminary demonstration utilized a scanning probe consisting of a pair of bare single mode fibers to perform source and receive functions. It was found that this probe did not have sufficient numerical aperture (NA) to measure steep surfaces and that simply increasing the NA decreases the light gathering efficiency substantially. In this paper, we introduce supplementary optics to increase the NA, and the light gathering efficiency has been increased by adopting an anamorphic design. A spherical test optic of known form is measured to demonstrate the capability of the new probe design.

Rotationally invariant pattern recognition by use of linear and nonlinear cascaded filters.

We discuss the merits of using single-layer (linear and nonlinear) and multiple-layer (nonlinear) filters for rotationally invariant and noise-tolerant pattern recognition. The capability of each approach is considered with reference to a two-class, rotation-invariant, character recognition problem. The minimum average correlation energy (MACE) filter is a linear filter that is generally accepted to be optimal for detecting signals that are free from noise. Here it is found that an optimized MACE filter cannot differentiate between the characters E and F in a rotation-invariant manner. We have found, however, that this task is possible when a single optimized linear filter is used to achieve the required response when a nonlinear threshold function is included after the filter. We show that this structure can be cascaded to form a multiple-layer, cascaded filter and that the capability of such a system is enhanced by its increased noise tolerance in the character recognition problem. Finally, we show the capability of a two-layer cascade as a means to detect different species of bacteria in images obtained from a phase-contrast microscope.

Computer-aided lens assembly.

We propose a computer-aided method of lens manufacture that allows assembly, adjustment, and test phases to be run concurrently until an acceptable level of optical performance is reached. Misalignment of elements within a compound lens is determined by a comparison of the results of physical ray tracing by use of an array of Gaussian laser beams with numerically obtained geometric ray traces. An estimate of misalignment errors is made, and individual elements are adjusted in an iterative manner until performance criteria are achieved. The method is illustrated for the alignment of an air-spaced doublet.

Digital shearing method for three-dimensional data extraction in holographic particle image velocimetry.

We report a new digital shearing method for extracting the three-dimensional displacement vector data from double-exposure holograms. With this method we can manipulate both the phase and the amplitude of the recorded signal, which, like optical correlation analysis, is inherently immune to imaging aberration. However, digital shearing is not a direct digital implementation of optical correlation, and a considerable saving in computation time results. We demonstrate the power of the method by MATLAB simulation and discuss its performance with reference to optical analysis.

Synthetic aperture interferometry: in-process measurement of aspheric optics.

A scanning probe consisting of a source and receive fiber pair is used to measure the phase difference between wave fronts scattered from the front and rear surfaces of an aspheric optic. This system can be thought of as a classical interferometer with an aperture synthesized from the data collected along the path of the probe. If the form of either surface is known, the other can be deduced. In contrast with classical interferometers, the method does not need test or null plates and has the potential to be integrated into the manufacturing process.