Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry.

Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.

Three-wave mixing mediated femtosecond pulse compression in ß-barium borate.

Nonlinear pulse compression mediated by three-wave mixing is demonstrated for ultrashort Ti:sapphire pulses in a type II phase-matched ß-barium borate (BBO) crystal using noncollinear geometry. 170 µJ pulses at 800 nm with a pulse duration of 74 fs are compressed at their sum frequency to 32 fs with 55 µJ of pulse energy. Experiments and computer simulations demonstrate the potential of sum-frequency pulse compression to match the group velocities of the interacting waves to crystals that were initially not considered in the context of nonlinear pulse compression.

Spatiotemporal isolation of attosecond soft X-ray pulses in the water window.

Attosecond pulses at photon energies that cover the principal absorption edges of the building blocks of materials are a prerequisite for time-resolved probing of the triggering events leading to electronic dynamics such as exciton formation and annihilation. We demonstrate experimentally the isolation of individual attosecond pulses at the carbon K-shell edge (284 eV) in the soft X-ray water window with pulse duration below 400 as and with a bandwidth supporting a 30-as pulse duration. Our approach is based on spatiotemporal isolation of long-wavelength-driven harmonics and validates a straightforward and scalable approach for robust and reproducible attosecond pulse isolation.

Generation of high-fidelity few-cycle pulses at 2.1 µm via cross-polarized wave generation.

We demonstrate the generation of temporally clean few-cycle pulses at 2.1 µm by shortening of 6-optical-cycle pulses via cross-polarized wave (XPW) generation in BaF(2), CaF(2) and CVD-Diamond crystals. By combining spectra and single-shot third-order intensity cross-correlation traces in a novel Bayesian pulse retrieval technique, we measured pulse durations of 20 fs, corresponding to 2.8 optical cycles. Our results show that XPW generation in the infrared could provide a high-fidelity source of few-cycle pulses for strong-field physics applications. It could also serve as an injector for high-peak power ultrafast mid-IR wavelength parametric amplifiers.

Three-dimensional spatiotemporal pulse characterization with an acousto-optic pulse shaper and a Hartmann-Shack wavefront sensor.

We demonstrate a simplified arrangement for spatiotemporal ultrashort pulse characterization called Hartmann-Shack assisted, multidimensional, shaper-based technique for electric-field reconstruction. It employs an acousto-optic pulse shaper in combination with a second-order nonlinear crystal and a Hartmann-Shack wavefront sensor. The shaper is used as a tunable bandpass filter, and the wavefronts and intensities of quasimonochromatic spectral slices of the pulse are obtained using the Hartmann-Shack wavefront sensor. The wavefronts and intensities of the spectral slices are related to one another using shaper-assisted frequency-resolved optical gating measurements, performed at particular points in the beam. This enables a three-dimensional reconstruction of the amplitude and phase of the pulse. We present some example pulse measurements and discuss the operating parameters of the device.