1.
Appl Opt
; 39(25): 4535-9, 2000 Sep 01.
Artigo
em Inglês
| MEDLINE
| ID: mdl-18350041
RESUMO
An x-ray interferometer (XRI), which takes the lattice spacing of silicon as a length unit, can measure displacement with subnanometer resolution. A scanning probe microscope that combines an XRI and a scanning-tunnel microscope is designed to measure pitch. Experimental results have proved the feasibility of the design.