A full set of langatate high-temperature acoustic wave constants: elastic, piezoelectric, dielectric constants up to 900°C.

A full set of langatate (LGT) elastic, dielectric, and piezoelectric constants with their respective temperature coefficients up to 900°C is presented, and the relevance of the dielectric and piezoelectric constants and temperature coefficients are discussed with respect to predicted and measured high-temperature SAW propagation properties. The set of constants allows for high-temperature acoustic wave (AW) propagation studies and device design. The dielectric constants and polarization and conductive losses were extracted by impedance spectroscopy of parallel-plate capacitors. The measured dielectric constants at high temperatures were combined with previously measured LGT expansion coefficients and used to determine the elastic and piezoelectric constants using resonant ultrasound spectroscopy (RUS) measurements at temperatures up to 900°C. The extracted LGT piezoelectric constants and temperature coefficients show that e11 and e14 change by up to 62% and 77%, respectively, for the entire 25°C to 900°C range when compared with room-temperature values. The LGT high-temperature constants and temperature coefficients were verified by comparing measured and predicted phase velocities (vp) and temperature coefficients of delay (TCD) of SAW delay lines fabricated along 6 orientations in the LGT plane (90°, 23°, Ψ) up to 900°C. For the 6 tested orientations, the predicted SAW vp agree within 0.2% of the measured vp on average and the calculated TCD is within 9.6 ppm/°C of the measured value on average over the temperature range of 25°C to 900°C. By including the temperature dependence of both dielectric and piezoelectric constants, the average discrepancies between predicted and measured SAW properties were reduced, on average: 77% for vp, 13% for TCD, and 63% for the turn-over temperatures analyzed.

Determination and experimental verification of high-temperature SAW orientations on langatate.

Langatate (LGT) is a member of the langasite family of crystals appropriate for high-temperature frequency control and sensing applications. This paper identifies multiple LGT SAW orientations for use at high temperature, specifically in the 400°C to 900°C range. Orientations with low sensitivity to temperature are desired for frequency control devices and many sensors, conversely large temperature sensitivity is a benefit for temperature sensors. The LGT SAW temperature behavior has been calculated for orientations sweeping the Euler angles (0°, Θ, ψ), (90°, Θ, ψ), and (ψ, 90°, ψ), based on newly identified high-temperature elastic constants and temperature coefficients for this material. The temperature coefficient of delay (TCD) and total frequency change over the temperature range were analyzed from 400°C to 900°C. Multiple SAW orientations were identified with zero-TCD between 400°C and 500°C. Although no orientations that have turn-over temperatures above 500°C were identified, several have low frequency variation with temperature, of the order of -0.8% over the range 400°C to 800°C. Temperature-sensitive orientations with TCD up to 75 ppm/°C at 900°C were identified, with potential for high-temperature sensor applications. The reported predictions are shown to agree with measured behavior of LGT SAW delay lines fabricated along 6 orientations in the (90°, 23°, ψ) plane. In addition, this work demonstrates that concurrently operated LGT SAW devices fabricated on the same wafer provide means of temperature sensing. In particular, the measured frequency difference between delay lines oriented along (90°, 23°, 0°) and (90°, 23°, 48°) has fractional temperature sensitivity that ranges from -172 ppm/°C at 25°C to -205 ppm/°C at 900°C.

High-temperature langatate elastic constants and experimental validation up to 900 degrees C.

This paper reports on a set of langatate (LGT) elastic constants extracted from room temperature to 1100 degrees C using resonant ultrasound spectroscopy techniques and an accompanying assessment of these constants at high temperature. The evaluation of the constants employed SAW device measurements from room temperature to 900 degrees C along 6 different LGT wafer orientations. Langatate parallelepipeds and wafers were aligned, cut, ground, and polished, and acoustic wave devices were fabricated at the University of Maine facilities along specific orientations for elastic constant extraction and validation. SAW delay lines were fabricated on LGT wafers prepared at the University of Maine using 100-nm platinumrhodium- zirconia electrodes capable of withstanding temperatures up to 1000 degrees C. The numerical predictions based on the resonant ultrasound spectroscopy high-temperature constants were compared with SAW phase velocity, fractional frequency variation, and temperature coefficients of delay extracted from SAW delay line frequency response measurements. In particular, the difference between measured and predicted fractional frequency variation is less than 2% over the 25 degrees C to 900 degrees C temperature range and within the calculated and measured discrepancies. Multiple temperature-compensated orientations at high temperature were predicted and verified in this paper: 4 of the measured orientations had turnover temperatures (temperature coefficient of delay = 0) between 200 and 420 degrees C, and 2 had turnover temperatures below 100 degrees C. In summary, this work reports on extracted high-temperature elastic constants for LGT up to 1100 degrees C, confirmed the validity of those constants by high-temperature SAW device measurements up to 900 degrees C, and predicted and identified temperature-compensated LGT orientations at high temperature.

Pulse echo and combined resonance techniques: a full set of LGT acoustic wave constants and temperature coefficients.

This work reports on the determination of langatate elastic and piezoelectric constants and their associated temperature coefficients employing 2 independent methods, the pulse echo overlap (PEO) and a combined resonance technique (CRT) to measure bulk acoustic wave (BAW) phase velocities. Details on the measurement techniques are provided and discussed, including the analysis of the couplant material in the PEO technique used to couple signal to the sample, which showed to be an order of magnitude more relevant than the experimental errors involved in the data extraction. At room temperature, elastic and piezoelectric constants were extracted by the PEO and the CRT methods and showed results consistent to within a few percent for the elastic constants. Both raw acquired data and optimized constants, based on minimization routines applied to all the modes involved in the measurements, are provided and discussed. Comparison between the elastic constants and their temperature behavior with the literature reveals the recent efforts toward the consistent growth and characterization of LGT, in spite of significant variations (between 1 and 30%) among the constants extracted by different groups at room temperature. The density, dielectric permittivity constants, and respective temperature coefficients used in this work have also been independently determined based on samples from the same crystal boule. The temperature behavior of the BAW modes was extracted using the CRT technique, which has the advantage of not relying on temperature dependent acoustic couplants. Finally, the extracted temperature coefficients for the elastic and piezoelectric constants between room temperature and 120 degrees C are reported and discussed in this work.