1.
Appl Opt
; 36(28): 7162-71, 1997 Oct 01.
Artigo
em Inglês
| MEDLINE
| ID: mdl-18264223
RESUMO
Two dual-beam differential direct-phase-detecting optical interferometers for scanning moving surfaces are described. Two beams from these interferometers are focused ~42 mum apart on moving surfaces, and the difference in their reflected path lengths is measured to provide the surface roughness measurement. These interferometers are exceptionally insensitive to environmental vibrations and to surface physical and chemical factors. Applications discussed include the measurement of the surface roughness of a rotating cylinder and a moving web.